PI P-603 Series, Руководство пользователя, Страница: 16 / 21

User Manual
P603T0001, valid for P-603
CBo, 1/11/2021
Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany Page 16 / 21
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws , www.pi.ws
Technical Data
Specifications
P-603.1S1
P-603.1S2
P-603.3S1
P-603.3S2
P-603.5S1
P-603.5S2
P-603.x01
Open-loop
versions
Unit
Active axes Z Z Z Z
Motion and positioning
Integrated sensor SGS SGS SGS –
Travel range at -20 to 120 V,
open loop
120 380 550 as P-603.xS1 µm
Travel range, closed loop 100 300 500 – µm
Resolution, open loop, 180 g 2 3 5 as P-603.xS1 nm
Resolution, closed loop, 180 g 10 20 25 – nm
Linearity error, closed loop 0.2 0.2 0.2 – %
Unidir. Repeatability, 10%,
1 Sigma
7 10 20 – nm
Mechanical properties
–
Stiffness in motion direction 0.3 0.14 0.06 as P-603.xS1 N/µm
Resonant frequency, no load 900 410 300 as P-603.xS1 Hz
Resonant frequency, under
load, 180 g
160 110 80 as P-603.xS1 Hz
Push/pull force capacity in
motion direction
40 / 20 35 / 13 30 / 10 as P-603.xS1 N
Drive properties
Piezo ceramic PICMA® P-885 PICMA® P-885 PICMA® P-885 as P-603.xS1
Electrical capacitance 1.5 3.1 3.7 as P-603.xS1 µF
Miscellaneous
Operating temperature range -20 to 80 -20 to 80 -20 to 80 as P-603.xS1 °C
Material Stainless steel Stainless steel Stainless steel as P-603.xS1
Dimensions 33.5 mm ×
21 mm × 6 mm
52 mm × 21 mm ×
6 mm
62 mm × 21 mm ×
6 mm
as P-603.xS1
Mass S1 version: 0.03
S2 version: 0.04 S1 version: 0.04
S2 version: 0.05 S1 version: 0.05
S2 version: 0.06 as P-603.xS1 kg
Cable length 0.5 0.5 0.5 as P-603.xS1 m