PI P-54 Series, Руководство пользователя

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10 Technical Data
P­54x Nanopositioner PZ244E Version: 1.2.0 37
P­541.ZCD P­541.TCD* P­541.ZSL P­541.TSL* P­541.Z0L P­541.T0L* Unit Tolerance
Repeatability θ
X
, θ
Y
– 0.01 – 0.05 – – µrad typ.
Tilt θ
X
, θ
Y
(motion in Z) ±15 ±15 ±15 ±15 ±15 ±15 µrad typ.
Mechanical properties
Stiffness Z 0.8 0.8 0.8 0.8 0.8 0.8 N/µm ±20 %
Resonant frequency Z, no
load
410 410 410 410 410 410 Hz ±20 %
Resonant frequency θ
X
, θ
Y
,
no load
– 330 – 330 – 330 Hz ±20 %
Resonant frequency Z,
200 g
250 250 250 250 250 250 Hz ±20 %
Resonant frequency θ
X
, θ
Y,
200 g
– 270 – 270 – 270 Hz ±20 %
Push/pull force capacity 50 / 20 50 / 20 50 / 20 50 / 20 50 / 20 50 / 20 N max.
Drive properties
Ceramic type PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
Electrical capacitance 6.3 6.3 6.3 6.3 6.3 6.3 µF ±20 %
Miscellaneous
Operating temperature
range
20 to 80 20 to 80 20 to 80 20 to 80 20 to 80 20 to 80 °C
Material Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum
Mass 750 750 730 730 700 700 g ±5 %
Cable length 1.5 1.5 1.5 1.5 1.5 1.5 m ±10 mm
Sensor connection D-sub 7W2
(m)
D-sub
25W3 (m)
LEMO 3 × LEMO – –
Voltage connection D-sub 7W2
(m)
D-sub
25W3 (m)
LEMO 3 × LEMO LEMO 3 × LEMO
Recommended electronics E-503,
E-505,
E-610,
E-621,
E-625,
E-712,
E-727,
E-754
E-503,
E-505,
E-610,
E-621,
E-625,
E-712,
E-727,
E-754
E-503,
E-505,
E-610,
E-621,
E-625,
E-712,
E-727,
E-754
E-503,
E-505,
E-610,
E-621,
E-625,
E-712,
E-727,
E-754
E-503,
E-505,
E-610,
E-621,
E-625,
E-712,
E-727,
E-754
E-503,
E-505,
E-610,
E-621,
E-625,
E-712,
E-727,
E-754
* Parallel kinematics design; the maximum displacement for translation motion and tip/tilt motion cannot be achieved
simultaneously.
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo
nanopositioning systems are free of friction.
All specifications based on room temperature (22 °C ±3 °C).