PI P-54 Series, Руководство пользователя

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3 Product Description
10 Version: 1.2.0 PZ244E P­54x Nanopositioner
Nanopositioner Z stage with large aperture
Model Description
P-541.ZCD Vertical nanopositioning stage with large aperture, 100 µm, direct
position measuring, capacitive sensors
P-541.ZSL Vertical nanopositioning stage with large aperture, 100 µm, strain gauge
sensors
P-541.Z0L
Vertical nanopositioning stage with large aperture, 150 µm, without
sensor
Nanopositioner Z and tip/tilt stage with large aperture
Model Description
P-541.TCD Nanopositioner Z and tip/tilt stage with large aperture, 100 µm /
0.8 mrad, parallel metrology, capacitive sensors
P-541.TSL Nanopositioner Z and tip/tilt stage with large aperture, 100 µm /
0.8 mrad, strain gauge sensors
P-541.T0L Nanopositioner Z and tip/tilt stage with large aperture, 150 µm /
1.2 mrad, without sensor
3.2 Product View
The figure serves as an example and can differ from your positioner model.
Figure 1: Exemplary product view
1 Platform
2 Cable exit
3 Protective earth connector
4 Base body