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Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email [email protected], www.pi.ws

PZ244E

P54x Nanopositioner

User Manual

Version: 1.2.0

Date: 27.07.2020

This document describes the following products:



P541.2 / P542.2

XY nanopositioning system with large aperture

P-541.2xx, 100 µm × 100 µm

P-542.2xx, 200 µm × 200 µm

P-541.2DD, 45 µm × 45 µm, direct drive



P541.Z

Nanopositioner Z stage with large aperture

P-541.ZCD, 100 µm, direct position measuring

P-541.ZSL, 100 µm

P-541.Z0L, 150 µm



P541.T

Nanopositioner and tip/tilt stage with large

aperture

P-541.TCD, 100 µm / 0.8 mrad, parallel

metrology

P-541.TSL, 100 µm / 0.8 mrad

P-541.T0L, 150 µm / 1.2 mrad

Model-specific properties:

Integrated sensor:

Capacitive sensors: 2CD, 2CL, 2DD, ZCD, TCD

Strain gauge sensors: 2SL, ZSL, TSL

Without sensor: 20L, Z0L, T0L

Sensor / voltage connector:

D-sub 25W3 (m): 2CD, 2DD, TCD

D-sub 7W2 (m): ZCD

LEMO: 2CL, 2SL, 20L, ZSL, Z0L, TSL, T0L

Содержание P-54 Series

Страница 1: ...m 200 m P 541 2DD 45 m 45 m direct drive P 541 Z Nanopositioner Z stage with large aperture P 541 ZCD 100 m direct position measuring P 541 ZSL 100 m P 541 Z0L 150 m P 541 T Nanopositioner and tip til...

Страница 2: ...I GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any te...

Страница 3: ...3 4 Scope of Delivery 11 3 5 Suitable Electronics 12 3 6 Accessories 12 3 7 Technical Features 13 3 7 1 PICMA Piezo Actuators 13 3 7 2 Flexure Guides 13 3 7 3 Position Sensors 13 3 7 4 ID Chip Models...

Страница 4: ...aning the P 54x 29 8 Troubleshooting 31 9 Customer Service 33 10 Technical Data 35 10 1 Specifications 35 10 1 1 Data Table 35 10 1 2 Maximum Ratings 38 10 1 3 Ambient Conditions and Classifications 3...

Страница 5: ...Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and T...

Страница 6: ...m Explanation Positioner Electrically driven mechanics here P 54x with one or more motion axes Electronics Piezo amplifier or piezo controller that supplies the operating voltage for positioners or pi...

Страница 7: ...727 xF Digital Multi Channel Piezo Controller E 754 Digital Piezo Controller E754T0001 User Manual PIMikroMove SM148E Software Manual P 5xx P 6xx P 7xx Piezo Positioning Systems PZ240EK Short Instruc...

Страница 8: ......

Страница 9: ...o axes rotationally Z X Y The P 54x can only be used as intended in conjunction with suitable electronics p 12 available from PI The electronics are not in the P 54x s scope of delivery The electronic...

Страница 10: ...being pulled out of the electronics If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 54x in the case of malfunction or failure of the system...

Страница 11: ...al notes If you give the P 54x to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing info...

Страница 12: ......

Страница 13: ...XY nanopositioning system with large aperture 100 m 100 m strain gauge sensors LEMO connectors P 541 20L XY nanopositioning system with large aperture 100 m 100 m without sensors LEMO connectors P 541...

Страница 14: ...without sensor Nanopositioner Z and tip tilt stage with large aperture Model Description P 541 TCD Nanopositioner Z and tip tilt stage with large aperture 100 m 0 8 mrad parallel metrology capacitive...

Страница 15: ...rer s address website CE conformity mark Symbol for the protective earth conductor marks the protective earth connection of the P 54x p 18 X Positive direction of motion of the X axis P 54x 2xx models...

Страница 16: ...dular System D sub 25W3 3 6 In some cases adapter cables p 12 are necessary for connecting When using single channel electronics each motion axis requires its own individual electronics For P 541 T0L...

Страница 17: ...age current In this way an especially high reliability is achieved even under extreme ambient conditions In contrast to motorized drives there are no rotating parts or friction The piezo actuators are...

Страница 18: ...rate in thermally drift free full bridge circuitry and therefore ensure optimum position stability in the nanometer range 3 7 4 ID Chip Models with D sub Connector Only An ID chip is located in the D...

Страница 19: ...as well as loss of accuracy Do not touch any sensitive parts e g platform when handling the P 54x 1 Unpack the P 54x with care 2 Compare the contents with the scope of delivery according to the contr...

Страница 20: ......

Страница 21: ...actuators can be destroyed by an abrupt contraction Do not open the P 54x Discharge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics equippe...

Страница 22: ...ectly tightened screws can cause damage Pay attention to the torque range p 42 specified for the screws used during installation INFORMATION Extension cables can reduce the positioning accuracy of the...

Страница 23: ...cting the protective earth conductor Suitable screwdriver Figure 3 Connecting the protective earth conductor profile view 1 Base body of the P 54x 2 Flat washer 3 Lock washer 4 Screw 5 Cable lug 6 Pro...

Страница 24: ...al expansion properties as the P 54x e g surfaces made of aluminum NOTICE Tensile stress when mounted vertically When the P 54x is mounted vertically certain alignments can cause tensile stress that r...

Страница 25: ...rm High torques during fastening of the load as well as high loads can overload the platform of the P 54x Mechanical overload can cause damage to the piezo actuators sensors and flexures of the P 54x...

Страница 26: ...the platform adjust the controller settings before startup or contact our customer service department p 33 NOTICE Excessively long screws The P 54x could be damaged by screws inserted too deeply Pay a...

Страница 27: ...ble size and length p 40 Suitable screwdriver Fixing the Load 1 Align the load on the P 54x so that the mounting holes in the load and the holes in the platform are in line 2 Hold the load so that it...

Страница 28: ...uitable electronics p 12 You have read and understood the user manual for the electronics The electronics are switched off Tools and accessories If intended for your system Adapter cable p 12 Connecti...

Страница 29: ...tarting Do not remove the protective earth conductor during operation If the protective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 54x to the protec...

Страница 30: ...d by a humming noise and can be caused by the following A change in the load and or dynamics requires the servo control parameters to be adjusted The P 54x is operated near to its resonant frequency I...

Страница 31: ...the P 541 T0L correctly and connected it to the electronics p 24 Tools and accessories Suitable electronics p 12 Starting and operating the P 541 T0L with the E 663 electronics 1 Control the tilting m...

Страница 32: ...e discharged in the following cases Before Installation When the P 54x is not in use but the electronics remain switched on to ensure temperature stability Before demounting e g before cleaning and tr...

Страница 33: ...o actuators Loosened screws cause a loss in positioning accuracy Loosen screws only when instructed in this manual Do not open the P 54x 7 2 Cleaning the P 54x NOTICE Damage from ultrasonic cleaning U...

Страница 34: ......

Страница 35: ...storted Mount the P 54x onto surfaces with the following characteristics only Flatness of at least 20 m The thermal expansion properties are similar to those of the P 54x e g surface made of aluminum...

Страница 36: ...ters incorrectly set because for example the load was changed 1 Switch off the servo mode of the corresponding motion axes immediately 2 Check the settings of the servo control parameters on the contr...

Страница 37: ...tion Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applica...

Страница 38: ......

Страница 39: ...oop 100 m 100 m 200 m 200 m 45 m 45 m 100 m 100 m 200 m 200 m Resolution open loop closed loop 0 2 0 3 0 4 0 7 0 1 0 3 0 2 2 5 0 4 4 Open loop 0 2 0 4 nm typ Linearity error 0 03 0 03 0 03 0 2 0 2 typ...

Страница 40: ...E 727 E 503 E 505 E 621 E 712 E 727 E 503 E 505 E 621 E 712 E 727 With digital controller With analog controllers the typical linearity error for direct drive positioners can be up to 0 1 The resolut...

Страница 41: ...0 to 80 20 to 80 20 to 80 20 to 80 20 to 80 C Material Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum Mass 750 750 730 730 700 700 g 5 Cable length 1 5 1 5 1 5 1 5 1 5 1 5 m 10 mm Sensor connec...

Страница 42: ...P 542 2SL P 542 20L 20 to 120 V 77 Hz 20 W P 541 ZCD P 541 ZSL P 541 Z0L 20 to 120 V 136 Hz 19 W P 541 TCD P 541 TSL P 541 T0L 20 to 120 V 136 Hz 19 W 1 To ensure stable operation the maximum operatin...

Страница 43: ...indoor use only Maximum altitude 2000 m Air pressure 1100 hPa to 0 1 hPa Relative humidity Highest relative humidity 80 for temperatures up to 31 C Decreasing linearly to 50 relative humidity at 40 C...

Страница 44: ...10 Technical Data 40 Version 1 2 0 PZ244E P 54x Nanopositioner 10 2 Dimensions Dimensions in mm Note that the decimal places are separated by a comma in the drawings Figure 8 P 541 2 P 542 2...

Страница 45: ...10 Technical Data P 54x Nanopositioner PZ244E Version 1 2 0 41 Figure 9 P 541 Z P 541 T...

Страница 46: ...4 Nm 6 Nm M5 2 5 Nm 3 5 Nm M4 1 5 Nm 2 5 Nm M3 0 8 Nm 1 1 Nm M2 5 0 3 Nm 0 4 Nm M2 0 15 Nm 0 2 Nm M1 6 0 06 Nm 0 12 Nm Pay attention to the screw in depth required for the respective material accordin...

Страница 47: ...nsor signal channel 1 1 Input Target sensor signal channel 2 movable part of the capacitive sensor 2 not connected 3 GND ID chip ground 4 Bidirectional Data line for ID chip 5 not connected 6 not conn...

Страница 48: ...signal channel 1 1 Input Target sensor signal channel 2 movable part of the capacitive sensor 2 Input Target sensor signal channel 3 movable part of the capacitive sensor 3 GND ID chip ground 4 Bidir...

Страница 49: ...12 D sub connector Example top view Pin Signal Function A1 PZT Piezo voltage A2 Probe Probe sensor signal immovable part of the capacitive sensor 1 Data ID chip Data line for ID chip 2 GND Target and...

Страница 50: ...CL 2SL 20L ZSL Z0L TSL T0L PZT Inner conductor Input Piezo voltage 20 to 120 V Ground 2CL P Inner conductor Output Probe sensor signal immovable part of the capacitive sensor Cable shield 2CL T Inner...

Страница 51: ...ational national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all o...

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