Physical Electronics DIGITEL 1500 Скачать руководство пользователя страница 20

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Control

Power

HV Enable

Keypad

STBY

OPER

CMD

VOLTS
CURR
PRESS

SP 1, SP2, BAKE

0 through 9

ENTER

Display

Rate of Rise

3-2

Operation

Table 3-2. Front Panel Controls and Indicators

Description

Tums main power on and off. The switch is on and illuminated

when it is flush with the bezel.
This switch is normally enabled (flush with the bezel). If it is

off, high voltage cannot be generated. If enabled, it lights

continuously if high voltage is on and flashes if high voltage is

off.
Used as the primary method for controlling the DIGITEL.

Places the DIGITEL in standby mode if high voltage is enabled.

The HV enable indicator flashes.
Places the DIGITEL in operate mode if high voltage is enabled.

The HV enable indicator lights continuously.
Used to enter special commands that control the computer

interface, setpoint operation, and service features.
Places the display in voltage mode.
Places the display in current mode.

Places the display in pressure mode. When this key is first

pressed, the display momentarily flashes either torr or pascal to

indicate the units displayed. The DIGITEL must be configured

correctly for this mode to read properly (Subsection 3.2.2).

These keys control the setpoint and bakeout operation. The

indicators to the right of each key lights when that particular

setpoint relay closes (Subsection 3.9).
The keypad is in the numeric mode if one of the display digits is

flashing, otherwise it is in the command mode.
Used to enter numeric data. If the bakeout option is installed,

press this key while in command mode to momentarily display

the number of hours remaining in the bakeout cycle.
Displays the voltage, current, or pressure, as well as error and

informational codes, setpoints and control parameters.
Gives an indication of the pressure trend within the vacuum

system. Green lamps indicate a pressure decrease and red lamps

indicate a pressure increase.

Содержание DIGITEL 1500

Страница 1: ...DIGITEL 1500 Part No 1004964 Rev I J PHYSICAL ELECTRON CS ...

Страница 3: ... Operating Procedures 3 3 3 2 1 Ion Pump Operation 3 3 3 2 2 Display Operation 3 4 3 3 Rate ofRise Bargraph 3 6 3 4 Autorun 3 7 3 5 User Messages 3 8 3 6 Analog Outputs 3 10 3 7 Keypad Modes 3 10 3 8 CMD Functions 3 11 3 9 Setpoint Option 3 11 3 9 1 Parameter 1 Setpoint 3 13 3 9 2 Parameter 2 Hysteresis 3 14 3 9 3 Parameter 3 Control Parameter 3 15 3 10 Password Protection 3 16 3 11 Bakeout 3 18 3...

Страница 4: ...oard 2 3 2 3 Location of Setpoint Bakeout and Computer Interface Options 2 4 2 4 Location of Setpoint Connector 2 5 2 5 Installing the Setpoint Option Board 2 6 2 6 Location of Computer Interface Connector 2 7 2 7 Installing the Computer Interface Option Board 2 8 2 8 Rear Panel of Bakeout Power Distribution Box 2 9 3 1 Rear Panel Controls and Indicators 3 1 3 2 Front Panel Controls and Indicators...

Страница 5: ...ontrols and Indicators 3 1 3 2 Front Panel Controls and Indicators 3 2 3 3 Pressure Conversion Constants 3 5 3 4 Error Messages 3 8 3 5 Status Messages 3 9 3 6 Setpoint Parameters 3 16 3 7 ASCII Conversion 3 20 3 8 Mode Commands 3 22 3 9 Computer Interface Error Codes 3 23 3 10 Computer Interface Keyboard Commands 3 24 4 1 Routine Maintenance Schedule 4 2 Table of Contents ...

Страница 6: ...al display shown below provides direct readout of ion pump voltage current and pressure torr or pascal Ranging is automatic within the selected display mode A Rate of Rise bargraph indicates the pressure trend in the system The keyboard controls all functions except main power and high voltage and includes optional features that allow you to customize the unit to a particular system DIGITEL 1500 I...

Страница 7: ... jumper selects voltage at 6000V or 7000V 750 mA at 60 Hz at nominal line voltage Positive Can be converted to negative lV 3333 V 1V 333 mA or 1V 333 µA jumper select 1 to 10V Selectable from rear panel 120 LIS or greater Use pump size to cacluate pressure and control max pump power 7 segment red LED 0 43 character height 0000 9900V in increments of100V 0 0 x 10 6 to 5 1 0 x 10 0 A Autoranging 1 x...

Страница 8: ...akeout option is supplied with a cable Inspect all items for damage Ifdamage is found a claim should be filed with the carrier and a copy forwarded to PHI Obtain authorization from PHI prior to return if the equipment is returned WARNING Before you install the DIGITEL read the following Service should always be performed by qualified personnel Voltages up to 8000V are present An interlock is provi...

Страница 9: ... 1 torr or pascal pressure readout is selected ion pump size both switches must be set to the correct size See Subsection 3 2 2 to set the pump size High voltage jacks Readout __ _ Pump size SET B OTH SWITCHES TO _____ POWER SELECT PUMP SIZE J612 INTERLOCK MONITOR OUTPUTS J611 J610 SETPOINT CMPTR INTFC I HIGH LOSS DISPLAY VOLTAGE SAFETY RESTART UNITS PUMP SIZE OU INTLK 1 A l9 T _RR ii U fJ 1 Ys J6...

Страница 10: ...res E501 and E502 on the high voltage HV board and solder them Figure 2 2 High 2J C c cc Voltage Board J501 E503 A RET E502 HVIN E 01 E504 Top View of Chassis High Voltage Boa Location of wires E501 and E502 on the HV board Figure 2 2 Location ofE501 and E502 on HV Board 5 Connect the detachable power cord to input power on the rear panel and plug it into the wall 6 Tum the unit on and verify the ...

Страница 11: ...ds use the following precautions Handle boards at approved ESD workstation Do not touch any electrical contacts Do not rub a board against any insulator that may build up a static charge When shipping boards use approved ESD containers and packaging Install first cc c _ ___ _ _ __ _ CCC _ _ __ _ ribbon cable retainer here Install Computer Interface option here tc 3t lP c p 4 Install Setpoint or Ba...

Страница 12: ...1 mm from the rear panel and the other nine inches 229 mm from the rear panel both one in 25 mm from the bottom ofthe unit Install the Setpoint Option board first Use one ofthe following ribbon cables Installing the Setpoint Option only Use the 2 position short 40 conductor ribbon cable so that it connects the CPU board and setpoint board Installing the Setpoint Option with the Computer Option Use...

Страница 13: ...re 2 5 Installing the Setpoint Option Board 5 Install the board in the card guides so that the board components face the rear and the open connector is on top 6 Put the ribbon cable in the guides on the side ofthe chassis 7 Installing the Setpoint Option only Plug the 2 position short ribbon cable into 1109 on the CPU board and J709 on the setpoint board Figure 2 5 with the colored stripe pin 1 cl...

Страница 14: ... Figure 2 6 from the outside ofthe unit colored stripe pin 1 is on top Rear Panel JB12 INTERLOCK 0 MONITOR OUTPUTS Setpoint i connector installed J611 J610 here SETPOJNT CMPTR NTFC Figure 2 6 Location of Computer Interface Connector 2 Holding the connector in place with one hand insert the screwlock assembly in each ofthe four mounting holes from the outside Attach a lock washer and nut to each of...

Страница 15: ...onnector into J109 on the CPU board and 1809 on the computer interface board with the colored stripe pin 1 closest to the left side ofthe chassis when facing the rear panel Installing the Computer Option with the Setpoint Option installed Ifthe 2 position short ribbon cable is installed on the setpoint board discard it Plug the 3 position longer ribbon cable supplied with the computer interface op...

Страница 16: ...controlled power outlets for bakeout switched power outlets for pump power and four outlets for non interlocked power With optional relay controlled outlet stripts 3 maximum the power distribution box can provide additional bakeout power and or vacuum interlocked power for other equipment in the vacuum system Fuse pn 474021 r Pumping Electronics 1 _ _ J __ 11 J2 r __ ____I r _ d L I Rough Pumping ...

Страница 17: ...e should not exceed 28V The following table lists the electrical connections to the setpoint board Table 2 1 SetpointOption ElectricalConnections Pin Function 2 SPlNC 9 SPlC 1 SPlNO 4 SP2NC 11 SP2C SP2NO 8 SP4NC fail safe 15 SP4C 7 SP4NO 23 STBY 10 OPER 22 CTL RETUR N STBY OPER andCTL RETURN lines remotely control the DIGITEL to the standby and operate modes A 12 to 28V signal is placed between ST...

Страница 18: ...aximum cable length is 50 ft 15 2 m This length may be increased in some cases if the baud rate is reduced or if a low capacitance cable is used Normally connection to three pins TXD RXD and GND is required All signals are referenced to the DIGITEL For example TXD is the pin on which the DIGITEL transmits data If a receive only device is attached to the DIGITEL such as a printer only TXD and GND n...

Страница 19: ...ators Description Two switches select the pump size Both switches must be set to the correct pump size Selects pressure display units ofeither torr or pascal This switch also affects the operation ofthe setpoints Readout 1 Pump size SET BOTH SWITCHES TO PO M R f SELECT PUMP SIZE HIGH LOSS DISPLAY f VOLTAGE SAFETY RESTART UNITS PUMP SIZE OUT INTLK EJ C0 8 cf f5f TEf 1 r 6 f330 J617 1 J615 __ MANUAL...

Страница 20: ...ures Places the display in voltage mode Places the display in current mode Places the display in pressure mode When this key is first pressed the display momentarily flashes either torr or pascal to indicate the units displayed The DIGITEL must be configured correctly for this mode to read properly Subsection 3 2 2 These keys control the setpoint and bakeout operation The indicators to the right o...

Страница 21: ...ump Install the DIGITEL according to the installation instructions in Section 2 Both the DIGITEL and the pump must be grounded and have a safety ground strap connecting them The high voltage cable must be attached to the DIGITEL and the pump The proper pump size must be selected The DIGITEL must have the correct output polarity Before you run an ion pump it must be evacuated to a minimum vacuum Th...

Страница 22: ...rts to stall when the roughing pump is valved off as indicated by a decrease in voltage the roughing pump should be valved back into the system After voltage has increased above 3000V the display may be switched to current or pressure to get a better idea ofthe ion pump pressure when starting the pump the voltage display mode is more sensitive to pressure changes at the high pressures 3 2 2 Displa...

Страница 23: ...the pump ages leakage currents develop and limit minimum pressure that can be measured For this reason pressure measurements should only be used as a general indication ofpressure inside the vacuum system The pressure is calculated using the formula Ptorr 5 x10 3 x 1 N where I is the pump current N is the number of pump elements a1201 s pump has 4 elements a 2201 s pump has 8 elements a 4001 s pum...

Страница 24: ...d with a gas such as helium there is a slight change in pump current The magnitude of this change is a function ofthe leak size other pumps in the system probe gas operating pressure and ion pump history The general procedure for leak detection is 1 Valve offportions ofthe vacuum system ifpossible until the section containing the leak is isolated 2 Valve offall pumps except the ion pump this is no...

Страница 25: ...el then turns the pump back on AUTORUN also forces the DIGITEL into cool down if it detects thermal runaway Ifthe voltage is between 1000 and 3000V and drops rapidly as would happen ifthe pump went into thermal runaway while starting the DIGITEL immediately enters the cool down mode regardless ofcalculated element temperature While in the cool down mode the message COOL is displayed and high volta...

Страница 26: ...Four cool cycles have occurred Subsection 3 4 high voltage has been shut off and the DIGITEL is waiting for operator intervention Invalid key Normally occurs when the Okey is pressed while in the function mode Unable to write to EEPROM A change to the setpoints bakeout or password was made and the DIGITEL was unable to store it in nonvolatile memory The setpoints may still operate but will fail to...

Страница 27: ...This message flashes momentarily and is then replaced by the pressure display As above except pascal units selected The DIGITEL has entered the cool down mode Subsection 3 4 As long as it is in cool down this message remains on the display Ifany function is accessed which generates a message except OPER the message replaces COOL and is also permanent Message appears briefly after SP1 is pressed Me...

Страница 28: ... been wired for positive output the voltage monitor signal is positive and current signal is negative with respect to chassis ground Ifwired for negative these polarities are reversed 3 7 Keypad Modes Function mode Numeric mode 3 10 Operation The keyboard has two modes ofoperation function and numeric The function mode is the normal mode Whenever a key is pressed its function is executed For examp...

Страница 29: ...play for CMD Functions 3 9 Setpoint Option Fixed setpoint Setpoint allows you to control processor pressure related functions The three setpoints two user adjustable and one fixed have a set of NC Normally Closed C Common NO Normally Open contacts Note On SPI SP2 the fourth digit is not used and must be set to 0 Please note that SPI SP2 are independent This means that you could program SPl for pre...

Страница 30: ...t ofthe appropriate setpoint key lights When this happens the setpoint is on Note that the setpoint is off ifpower is off ifhigh voltage is off see Subsection 3 9 3 for the exception ifthe pressure is higher than the setpoint or if the setpoint is not active Note There is a difference between the terms on and active On refers to the state ofthe relay Active refers to whether the setpoint is enable...

Страница 31: ...es SPl for one second and then shows the value ofparameter 1 The first digit of the mantissa is flashing 2 Press 5 to change the mantissa to 5 0 Note that the second digit of the mantissa is always zero The exponent is now flashing 3 Press 7 to enter the exponent value The display now shows 5 x 10 7 the desired value The mantissa is flashing Press ENTER to input the value 4 The second parameter is...

Страница 32: ... x 10 7 3 The gun turns off outgassing decreases and the system drops to below 5 x 10 7 4 The gun turns on outgassing and raises the pressure to 6 x 10 7 By not having any hysteresis on the setpoint a large oscillator has been built out ofthe vacuum system and the electron gun Ifparameter 2 is non zero it determines the point at which the setpoint turns off while parameter 1 still determines the p...

Страница 33: ...propriate for the pump you are using Also note that ifyou change this parameter it will most likely be necessary for you to change parameters 1 and 2 as well The second digit is used for password protection When this digit is 1 the user is required to enter a four digit number before any change can be made to the setpoint See Subsection 3 10 for more information The third digit controls the high v...

Страница 34: ... off Parameter 1 should be less in value than parameter 2 Control parameter A 0 pressure 1 current B 0 no password required 1 password required C 0 HV interlock enabled 1 disabled D 0 not used should always be 0 When the setpoint is not under password protection it can be changed any time by anyone Password protection can be invoked for an unprotected password simply by changing a digit in paramet...

Страница 35: ...oints or the password itself When changing the password follow the steps carefully and be sure to record the new password Ifthe password lost contact your customer service representative A password is changed by entering a CMD function 2000 The display then shows old requesting the old current password Ifthe correct password is entered the display shows CodE requesting the new password This number...

Страница 36: ...h on for rough pumping its associated indicator lights CB1 CB2 and CB3 are used for Bakeout Pumping Electronics and Main Power respectively The Bakeout indicator lights when bakeout is on The Main Power indicator lights when main power is on Vacuum Rough Bakeout Pumping Main Power Bypass Pumping Electronics S2 S3 CB3 CB2 CB1 Figure 3 5 Front Panel ofBakeout Power Distribution Box Bakeout During ba...

Страница 37: ...and displays the control number Sets the timer to run while heater is on The three zeros configure the setpoint to pressure no password HV interlock enabled Displays the value ofthe timer followed by Hr Sets the timer Enters the time value If the setpoint had been password protected you are prompted for the password at this point The bakeout setpoint has been configured but the heaters do not turn...

Страница 38: ...uter Interface Commands See Subsection 3 13 As each character is transmitted to the DIGlTEL it is echoed back to the device to verify that the character was received The DIGITEL expects to receive 7 bit characters with one stop bit parity is ignored It transmits 7 bit characters with one stop bit and even parity The computer interface uses two special control characters Backspace BS sent to the DI...

Страница 39: ...above but indicates the bakeout heaters are on B is a blank or space For example the report 07 14 43 5900V2 6E 3I H Bl 3 tells us that it is day 7 at 2 43 P M the output is 5900V at 2 6 mA the high voltage is on bakeout is enabled setpoint 1 and the bakeout heaters are on Note Voltage or current information is not updated while in cool down mode Use the RC command to generate a report that lists A...

Страница 40: ... 15 minutes The P value can be used to determine how close the pump is to reaching power limit shutdown These limits are shown in Table 3 9 Pump Size S Value P Value 20 25 1 11 60 80 2 21 120 150 4 42 220 270 8 84 The current parameter works like power but it is not dependent on pump size A value of 50 mA is used continuously When 50 mA hr of excess current has accumulated the cool down cycle is i...

Страница 41: ...disable 8 Keyboard on 9 Keyboard off These functions draw a close parallel to keyboard commands except on offcommands Ifthe keyboard has been turned offfrom the computer interface pressing a key momentarily displays Err 13 The setpoint control command format is SNPXXYY where N p xx Example 1 is the setpoint number 1 2 or 3 is the parameter number 1 2 3 or 4 are the two digits ofthe parameter or if...

Страница 42: ...g off The timed reporting interval is adjusted by the command SLINN where NN 01 to 99 minutes The date and time may be set with the command where DD is the day 00 99 HH is the hour 00 23 MM is the minute 00 59 STDDHHMM Timed and exception reporting generate the same output produced by the RD command Timed reporting produces an output at fixed intervals that can be set from 1 to 99 minutes Exceptio...

Страница 43: ...HHMM Set minutes 33MM Set logging interval 34NN SLINN The computer interface must be initialized before it can be used Initialization occurs whenever the power is turned on CMD 3006 is entered from the keyboard the watchdog circuit forces a reset or a break signal at least 220 milliseconds long is received 3 13 Summary of DIGITEL Commands Command Functions 2000 3001 3002 3003 3004 3005 3006 3007 3...

Страница 44: ...R x 5 SPl or SP2 Mantissa exponent ENTER On value Mantissa exponent ENTER Offvalue XXX0 X 0 1 BAKE ENTER Pressure 0 Current 1 Password required 1 HV interlock On 0 Off 1 Not used Set to 0 ENTER Mantissa exponent ENTER On value Mantissa exponent ENTER Offvalue XXXX X 0 1 Pressure 0 Current 1 Password required 1 Pressure 0 Current 1 Password required 1 HV interlock On 0 Off 1 Bakeout time Continuous...

Страница 45: ...imed reporting on Exception reporting on Timed reporting off Exception reporting off Logging interval NN 01 99 Set date and time Print a report Print AUTORUN parameters Read setpoint parameters X 1 3 Set setpoint parameter N Setpoint P Parameter XX or XXYY Parameter value Invalid function Option not installed Logic error Cycle limit shutdown Invalid key Hardware error Illegal password Keyboard dis...

Страница 46: ... voltage cable with power on After turning power off allow at least one minute before disconnecting electrical equipment Do not operate the control without a proper electrical ground or near water The control may be damaged and its safety reduced if it is operated outside of its specifications CAUTION Circuit boards may be destroyed by a small static discharge To avoid damaging the boards use the ...

Страница 47: ... For220V u Use T10A sloblo Figure 4 1 Location of Maintenance Components To gain access to the unit interior remove the six screws securing the top cover to the chassis These are located on both sides ofthe unit 1 Tum power offto the unit Wait two minutes and remove the top cover 2 Clean the interior ofthe chassis with clean oil free compressed air at 50 psi maximum 3 Clean all high voltage wiring...

Страница 48: ...n the offposition not flush with the bezel 2 Insert a small screwdriver into the notch at the top ofthe lens 3 Gently pull the lens forward until it is free of the housing 4 Locate the lamp puller inside the housing and pull it forward to free the lamp 5 Replace the lamp with a type CM85 28V T 1 3 4 wedge base lamp or equivalent 6 Carefully push the lamp back into the socket and snap the lens into...

Страница 49: ...t the voltage of the variable power supply until the desired current is obtained Perform the following calibration procedure 1 Push the front panel POWER switch to off not flush with the bezel 2 Wait for two minutes and remove the top cover 3 Disconnect J405 on the Power Supply board Figure 4 2 4 Push the front panel HV ENABLE switch off not flush 5 Plug in the power cable 6 Pull the safety interl...

Страница 50: ...djust R317 to obtain a DVM reading of 3 06V Figure 4 3 Disconnect the DVM 9 Press the CURR 5 key to enter the current display mode 10 Check the zero adjustment Ifnecessary adjust R311 so that the front panel display reads 0 0 x 10 5 J109 c c c CPU Board V Figure 4 3 CPU Board Calibration Components 11 Disconnect the power cable from the rear ofthe unit Service 4 5 ...

Страница 51: ...0W mounted to the chassis with a jumper wire Figure 4 4 14 Connect a variable current source between E502 and the chassis 15 Connect a power cord 16 To check the gain ofthe amplifier adjust the variable current source for an output of30 mA Press the CURR 5 key Adjust R310 on the CPU board Figure 4 3 so the front panel display reads 3 0 x 10 2 17 Check the following gains Current Source Front Panel...

Страница 52: ...own Setpoint relays do not transfer Error message received when SPl or SP2 is pressed on keyboard Setpoints are lost when unit is turned offand on again Symptom Computer Interface not operating Possible Cause Replace setpoint board EEPROM 1 Setpoints not programmed 2 Current or pressure too high 3 Check cable from setpoint board to rear panel 4 Setpoint board 1 Check ribbon cable from CPU board to...

Страница 53: ...ver loose or removed 4 Check Voltage Select switch setting 1 Keyboard not plugged in properly 2 Shorted key 1 Check ribbon cable from CPU board to display board 2 Display board 3 CPU board 1 Check pump select switch setting 2 Shorted HV cable 3 Defective ion pump 4 Contaminated ion pump 5 Excessive gas load 1 Defective 5V supply Check TP403 Figure 4 5 2 Display board 3 CPU board 1 Defective 15V su...

Страница 54: ...ns of 1 10 or 100 to provide an appropriate level signal for the AID converter This analog multiplexing may be frozen and certain analog switches selected by using keyboard commands listed below These commands should only be used during service by a qualified electronic technician Command 0817 0809 0801 0818 0810 0802 0880 0800 Source Gain ILOW 1 ILOW 10 ILOW 100 IHIGH 1 IHIGH 10 IHIGH 100 HV 1 Mu...

Страница 55: ...cable for ion pump control units 15 2 0 9 long 100 1515 Bakeable HV Cable 20 long 2 0 9 100 1516 Bakeable HV Cable 30 long 2 1 4 100 1518 Bakeable HV Cable 50 long 2 1 4 222 0401 Computer interface option RS 232 1 0 5 222 0402 Setpoint option 1 0 5 222 0403 Bakeout Setpoint option 1 0 5 4 10 Service ...

Страница 56: ...ower T601 is a current limiting transformer Its short circuit current is 750 mA at nominal line The magnetic characteristics ofT601 when combined with the electrical characteristics ofthe bridge rectifier and capacitor yield a de voltage vs current curve that is suitable for ion pumps in the range of120 Lis and larger When current load is light D601 and C601 behave as a voltage doubler As current ...

Страница 57: ...r fire protection the secondary ofT401 contains internal temperature sensitive fuses The output ofT401 is rectified filtered and regulated to provide the 5V 15V regulated and 12V umegulated outputs A control signal from the CPU board turns Q402 on and offto enable the primary ofthe high voltage transformer U401 402 and Q401 control the HV enable lamp on the front panel 5 4 CPU Board Schematic 6157...

Страница 58: ...tized by the 8 bit successive approximation AID converter U308 D307 and U307 form an adjustable 3 06V reference The microprocessor continuously samples both current and voltage alternately Gain in the voltage mode is always one In current mode the CPU selects IHIGH or ILOW and gains of1 10 or 100 to provide an appropriate level signal for the AID converter 5 5 Display Board Schematic 1003223 The d...

Страница 59: ...to prevent data from being written to U702 during transient power conditions U703 is a universal parallel I 0 device Its PB0 3 outputs control the four output relays through relay driver U704 Remote standby and operate inputs are optically isolated by U705 706 and read on PB6 7 which are programmed as inputs PB0 1 controls the non volatile store and write functions on U702 5 8 Computer Interface S...

Страница 60: ...0 630221 1003200 623011 1004803 615741 625703 1004776 1003223 1003219 1003203 623012 Control DIGITEL Top Level Assembly CPU PCB Assembly Power Supply PCB Assembly H V Board PCB Assembly Display PCB Assembly Keyboard PCB Assembly Setpoint PCB Assembly RS232 Computer Interface PCB Assembly Chassis Schematic CPU Schematic Power Supply Schematic H V Board Schematic Display Board Schematic Keyboard Sch...

Страница 61: ...de 3 4 D Description 1 1 Display 3 2 4 E Error Messages 3 8 Evacuating the pump 3 3 F Functions CMD 3 11 4 9 Front panel controls 3 2 Fuse replacement 4 3 H High voltage enable switch 3 2 1 Ion pump current voltage measuring 3 10 evacuating 3 3 size selection 3 1 starting 3 4 Installation 2 1 K Keypad 3 2 10 L Lamp replacement 4 3 Leak detection 3 6 M Maintenance 4 2 Messages user 3 8 Modes ofoper...

Страница 62: ...arameters 3 13 Pump current voltage measuring 3 10 evacuating 3 3 size selection 3 1 starting 3 4 R Rate of Rise bargraph 3 2 6 Rear panel 3 1 S Schematics 6 1 Service 4 1 Setpoint option 3 11 board installation 2 5 electrical connections 2 10 setting parameters 3 13 Specifications 1 2 Starting the pump 3 4 Status messages 3 9 1 2 Index T Theory of Operation 5 1 Chassis 5 1 Computer Interface boar...

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Страница 67: ...MPU 8 BIT NP 1 000 EA IC 74LS154 4 16 DECODE DEMUX NP 1 000 EA CRYSTAL 2 4576 MHZ CY2B pp 2 000 EA RES 100 OHM 25W 5 RC07 NP 9 000 EA IC OP AMP CA3140E BIMOS pp 1 000 EA IC 74LSOO QUAD 2 INP NANO NP 2 000 EA IC 4040 12 BIT BIN COUNTER pp 1 000 EA IC 6810 SRAM lK 128X8 DU 1 000 EA RES 4 99K OHM 25W 1 RN60D PP 1 000 EA DID ZENER 6 2V 4W 1N821 PP 1 000 EA IC AD7574JN ADC AD7574JN PP 1 000 EA CAP 100 ...

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