background image

4

About this manual

1

About this manual

1.1

Validity

This operating manual is for customers of Pfeiffer Vacuum. It describes the functioning 
of  the designated product and provides the most important information for safe use of 
the unit. The description follows applicable EU guidelines. All information provided in this 
operating manual refers to the current state of the product's development. The documen-
tation remains valid as long as the customer does not make any changes to the product.
Up-to-date operating instructions can also be downloaded from 
www.pfeiffer-vacuum.com. 

1.1.1

Applicable documents

*also available via www.pfeiffer-vacuum.com

1.2

Conventions

1.2.1

Safety instructions

The safety instructions in Pfeiffer Vacuum operating instructions are the result of risk 
evaluations and hazard analyses and are oriented on international certification stan-
dards as specified by UL, CSA, ANSI Z-535, SEMI S1, ISO 3864 and DIN 4844. In this 
document, the following hazard levels and information are considered:

HiPace 400, depending on the model

Operating instructions

Operating instructions "Electronic drive unit TC 400", standard

PT 0203 BN*

Operating instructions "Electronic drive unit TC 400 PB", Profibus

PT 0244 BN*

Operating instructions "Electronic drive unit TC 400 E74", acc. Semi E74

PT 0302 BN*

Operating instructions "Electronic drive unit TC 400 DN", DeviceNet

PT 0352 BN*

Operating instructions "Electronic drive unit TC 400 EC", EtherCAT

PT 0452 BN*

Declaration of conformity

Part of this document

DANGER

Imminent danger

Indicates an imminent hazardous situation that will result in death or serious injury.

WARNING

Possibly imminent danger

Indicates an imminent hazardous situation that can result in death or serious injury.

CAUTION

Possibly imminent danger

Indicates an imminent hazardous situation that can result in minor or moderate injury.

NOTICE

Command or note

Command to perform an action or information about properties, the disregarding of 
which may result in damage to the product.

Содержание HiPace 400

Страница 1: ...PT 0210 BEN G 1604 OPERATING INSTRUCTIONS EN Translation of the original instructions HIPACE 400 Turbopump...

Страница 2: ...2 3 Drive 11 4 3 Range of application 12 5 Installation 13 5 1 Preparatory work 13 5 2 Set up 13 5 2 1 Earthquake safety 14 5 2 2 Use of a splinter shield or protection screen 14 5 2 3 Vibration dampe...

Страница 3: ...Maintenance replacement 30 7 1 Maintenance intervals and responsibilities 30 7 2 Replacing the operating fluid reservoir 30 7 3 Replacing the electronic drive unit 32 7 3 1 Rotation speed set value 32...

Страница 4: ...NSI Z 535 SEMI S1 ISO 3864 and DIN 4844 In this document the following hazard levels and information are considered HiPace 400 depending on the model Operating instructions Operating instructions Elec...

Страница 5: ...flange Vacuum flange of the backing pump Exhaust flange of the backing pump Electrical connection Sealing gas connection Venting connection Cooling water connection Prohibition of an action to avoid a...

Страница 6: ...nd maintenance of connected devices are described in detail in the operating instructions of the individual components For information on order numbers of components see Accessories Use original acces...

Страница 7: ...g maintenance and repairs or in case of reinstallation kg WARNING Risk of injury through falling objects When transporting vacuum pumps by hand there is a danger through loads slipping and falling dow...

Страница 8: ...mproper gas mode operation with improper high levels of insulated heat input operation in improper high magnetic fields venting with improper high venting rates use of the vacuum pump to generate pres...

Страница 9: ...y before connection Keep the original protective covers Always transport the turbopump in its upright position 3 2 Storage Close the flange openings by using the original protective covers Close furth...

Страница 10: ...ng plate 4 1 3 Variants HiPace 400 with TC 400 and 24 V DC 5 HiPace 400 with TC 400 and 48 V DC 5 4 1 4 Scope of delivery Turbopump with electronic drive unit Mating plug for the connection remote on...

Страница 11: ...he drive power au tomatically Depending on the application and the HiPace different cooling variants are selectable 4 2 2 Rotor bearing Hybrid bearing TurboDrag pump High vacuum side maintenance free...

Страница 12: ...ic field 6 mT Overvoltage category II Connection voltage TC depending on the variants 24 V DC 5 48 V DC 5 Remarks to ambient conditions The specified permissible ambient temperatures apply to operatio...

Страница 13: ...ible cleanliness when installing any high vacuum parts Un clean components prolong the pump down time All flange components must be grease free dust free and dry at installation The operating fluid re...

Страница 14: ...damper Fig 3 Example How to secure against shifting and tipping by external tremors Safety connection implementation each by the customer VACUUM CHAMBER Reduced volume flow rate in H2 He N2 Ar Splint...

Страница 15: ...rom the pipe system may be exerted on the fixed pump To avoid contamination via the fore vacuum line when using oil sealed backing pumps the fore vacuum flange should always point vertically downward...

Страница 16: ...rding to the drawing and with the component parts of the mounting kit 2 Use the required number of 16 claw clamps 3 Tighten the claw clamps crosswise in three steps 4 Tightening torque 5 15 25 2 Nm DA...

Страница 17: ...mm2 in all oper ating conditions 6 Tighten the hex screws crosswise in three steps 7 Tightening torque DN 160 5 10 16 1 Nm Stud screw and threaded hole Mind that the sealing surfaces are not damaged 1...

Страница 18: ...les The tensile strength of the flange material must be at least 270 N mm2 in all oper ating conditions 4 Tighten the hex screws crosswise in three steps 5 Tightening torque DN 160 10 20 38 3 Nm Stud...

Страница 19: ...counter flange 2 If used Insert protective screen or splinter shield with the clamping lugs downward into the high vacuum flange of the turbopump 3 Place the seal exactly in the hollow 4 Connect the f...

Страница 20: ...away the gas emission from the backing pump Observe all safety recommendations of the gas producer Fig 5 Connecting the backing pump 20 Fore vacuum connection 20a Backing pump 20 1 Centering ring 20...

Страница 21: ...ends to connect an appropriate earthing wire to derive applica tive interferences Fig 6 Installing the earthing connection 5 6 3 Power and electrical supply For voltage supply of the electronic drive...

Страница 22: ...the units listed below are connected with the preconfigured connection they are immediately ready for operation according to the factory settings It is possible to connect other accessories to do so s...

Страница 23: ...se of shut down or power failure The permissible connection pressure is max 1500 hPa absolute Unscrew the venting screw with seal ring from the venting connection Screw in the venting valve with seal...

Страница 24: ...the settings and control via the interfaces of the electronic drive unit Install the sealing gas supply e g inert gas via a connection adapter or on the inlet side G 1 8 of the control valve Sealing g...

Страница 25: ...eating jackets Plug in and fix the accessory s control lead to the corresponding accessory connection port on the electronic drive unit Default for the casing heating is accessory B2 Establish the mai...

Страница 26: ...ling water connection Socket connection Hose lines External diameter 8 mm Internal diameter 6 mm Cooling water quality filtrated mechanically clean optically clear no turbidity no sediments chemical l...

Страница 27: ...Operation via remote connection Operation via RS 485 and Pfeiffer Vacuum display and control units or PC Operation via field bus 6 3 Function description NOTICE Risk of destroying the pump by inputtin...

Страница 28: ...Operating instructions HPU Operating instructions Electronic drive unit TC 400 Switch on the supply voltage with switch S1 on the power supply or on the DCU 400 Settings are possible via interface RS...

Страница 29: ...ssible via interface RS 485 by using DCU HPU or PC 1 When mains power is restored the venting procedure is aborted Basic information for the rapid venting Venting of the vacuum chamber in two steps As...

Страница 30: ...umped media is possible Poisoning hazard through contact with materials that damage health In the case of contamination carry out appropriate safety precautions in order to pre vent danger to health t...

Страница 31: ...ee cloth Do not use any cleaning fluids Using tweezers insert the new Poroplast rods 9x Install the new operating fluid reservoir in the bearing mounting of the turbopump with the felt side oriented t...

Страница 32: ...redundant safety system for avoiding excess rotation speeds Adjust the parameter P 777 according to the pump type Alternatively If no display and control unit is available please use the SpeedCon fig...

Страница 33: ...eiffer Vacuum Service clean the turbopump completely Replace the operating fluid reservoir if necessary If necessary have the bearings replaced Take into account the total running time Installation an...

Страница 34: ...via interface RS 485 Please refer to operating instructions of the electronic drive unit Voltage drop in the cable too high Use a suitable cable Pump does not attain the final rotational speed within...

Страница 35: ...0 l s Leave electronic drive on the pump Close the flange openings by using the original protective covers If possible send pump or unit in the original packaging Sending of contaminated pumps or devi...

Страница 36: ...e when ordering accessories or spare parts Item Designation Order number Notes Pieces Order qty 7 Operating fluid reservoir PM 143 452 T incl Poroplast rods 1 8 Electronic drive unit TC 400 according...

Страница 37: ...entering ring stud screws PM 016 455 T Mounting kit for DN 100 ISO F including coated centering ring protec tion screen stud screws PM 016 457 T Mounting kit for DN 100 ISO F including coated centerin...

Страница 38: ...PM 071 142 X Control cable for pumping stations 0 7 m PM 061 675 AT PM 061 675 AT PM 061 675 AT Y Connector M12 to RS 485 P 4723 010 P 4723 010 P 4723 010 Y connector shielded M12 for accessories P 4...

Страница 39: ...75 kPa 10 0 01 1000 10 1 7 5 Torr mm Hg 1 33 1 33 10 3 133 32 1 33 0 133 1 1 Pa 1 N m2 mbar l s Pa m3 s sccm Torr l s atm cm3 s mbar l s 1 0 1 59 2 0 75 0 987 Pa m3 s 10 1 592 7 5 9 87 sccm 1 69 10 2...

Страница 40: ...ondensing 5 85 non condensing Protection category IP54 IP54 IP54 Connection pressure max for venting sealing gas valve 1500 hPa 1500 hPa 1500 hPa Drive power max 350 W 350 W 350 W Operating voltage 48...

Страница 41: ...06 5 230 5 239 208 M8 6x M8 6x 208 45 45 16 7 30 130 1 1 7 59 VV DN 25 ISO KF G 1 4 8 131 145 5 HV DN 100 ISO K 150 130 131 230 5 239 206 5 175 208 45 45 1 1 7 150 59 30 M8 6x VV DN 25 ISO KF G 1 4 8...

Страница 42: ...technical documentation is Mr Helmut Bern hardt Pfeiffer Vacuum GmbH Berliner Stra e 43 35614 A lar HiPace 400 Harmonised standards and national standards and specifications which have been ap plied...

Страница 43: ...are the only supplier of vacuum technology that provides a complete product portfolio COMPETENCE IN THEORY AND PRACTICE Benefit from our know how and our portfolio of training opportunities We suppor...

Отзывы: