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3

Caution, danger of damage to the pump or the
system.

CAUTION

1. Safety Instructions 

Read and follow all instructions in this manual.
– Inform yourself regarding:
– Hazards which can be caused by the pumping station;
– Hazards which can be caused by your system;
– Hazards which can be caused by the medium being 

pumped.

Avoid exposing any part of the body to vacuum.

Observe the safety and accident prevention regulations.

Regularly check that all accident prevention measures are 
being complied with.

Do not operate the turbo pumping station with open high 
vacuum flange.

Use at least 4 bracket screws to connect the high vacuum 
flange.

The unit has been accredited protection class IP 30. When 
the unit is operated in environments which require other 
protection classes, the necessary measures must be
taken.

Do not carry out any unauthorised conversions or 
alterations to the turbo pumping station.

The control of turbopumping stations has been so
designed that the pumps re-start automatically following
an interruption to the mains power supply. For this reason,
access to the vacuum chambers (for example, via doors,
flanges, valves) may only be opened once the pumping 
station has been switched off.

When returning individual components please observe the 
shipping instructions (refer to the operating instructions 
for the pumping station components).

Modifications reserved.

Warning, danger of personal injury.

WARNING

1.1.

For Your Orientation

Instructions in the text

Working instruction: here, you have to do something.

Symbols used

The following symbols are used throughout in illustrations.

High vacuum flange

Cooling water connection

Electric connection

Exhaust

Abbreviations used

DCU = Display and operating unit
TC

= Electronic drive unit, turbopump

TPS = Power supply

Position numbers

The same pump and accessory parts have the same position
numbuers in all illustrations.

1.2. Pictogram Definitions

Warning, danger of burns from touching hot

parts.

WARNING

Warning, danger of injury from rotating parts.

WARNING

Please note, attention to particulary important

information on the product, handling the
product or to a particular part of the documen-
tation.

PLEASE NOTE

Содержание TSH 071

Страница 1: ...Turbomolecular Drag Pumping Stations PT 0031 BE H 0408 TSH 071 TSU 071 TSH 261 TSU 261 TSH 521 TSU 521 Betriebsanleitung Operating Instructions...

Страница 2: ...l Schema 7 Connection Involving Rotary Vane Vacuum Pumps 8 Connection Involving Diaphragm Pumps 9 4 Operations 10 4 1 Transportation Protection 10 42 Filling In The Lubricant 10 4 3 Operational Behavi...

Страница 3: ...tomatically following an interruption to the mains power supply For this reason access to the vacuum chambers for example via doors flanges valves may only be opened once the pumping station has been...

Страница 4: ...ry vane vacuum pump must be filled with operating fluid The operating fluid is contained in a pack inclu ded with the delivery consignment Before first time starting on pumping stations equipped with...

Страница 5: ...operating fluid is included in the delivery consignment and must be filled into the pump before first time operating Diaphragm pumps do not require lubricant Permissible magnetic fields TSH 071 TSU 07...

Страница 6: ...of accessories please refer to Section 3 7 Connections Plan 3 5 Connecting The Vacuum Unit There should be no unilateral loading on the high vacuum flange The weight of a vacuum chamber freely flange...

Страница 7: ...MEASURANCE TERMINAL STRIP X1 3 TERMINAL STRIP TSHU 071 261 521 RS 485 REMOTE VENT FAN HEAT TMS FV PUMP X2 PM 051 409 X 13 14 1S2 1X2 PE PE TC 1E5 PM 051 101 T POT EQUALIZATION FRAME GROUNDING M 1 U V...

Страница 8: ...CKING PUMP AS ROTARY VANE PUMP 21 X1 22 X1 A1 A2 1K1 12 21 14 1 2 1 2 12 21 14 1K1 1 4 K A 1 2 3 4 FV PUMP ws PM 051 409 X gn bn ge Z MAINS TURBO PE PE 18 OPTION 19 20 A1 A2 PE 1Y8 TVV 001 FORE VACUUM...

Страница 9: ...X gn bn ge Z MAINS BACKING PUMP AS DIAPHRAGM PUMP 21 X1 22 X1 240VAC 5A SOLID STATE RELAY PE TURBO PE M 1 U V PE 1E8 FAN 17 15 X1 16 X1 M 1 U V PE 1M7 BACKING PUMP 18 1G5 POWER SUPPLY 20 19 A1 A2 PE 1...

Страница 10: ...nt and type of operating fluid is shown on the rating plate Screw in operating fluid filler screw 8 and take care with the O ring Re secure the filling hose in the side panel Fit the side panel back o...

Страница 11: ...itched off with the key 6 Pumpstand EIN AUS pumping station ON OFF Turbopump and vacuum chamber are vented via Venting Valve TVF 005 which opens for 0 3 seconds when the venting frequency does not att...

Страница 12: ...right hand side Exert slight downward pressure on operating fluid duct 6 turn 90 and bring into the forward position Unscrew operating fluid drain screw 7 and drain operating fluid via operating flui...

Страница 13: ...hich are contaminated microbiologically explosively or radioactively cannot be accepted as a matter of principle Fill out the declaration of contamination In every case the Declaration of Contaminatio...

Страница 14: ...3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 Rotary Vane Pump DUO 2 5 m 3 h 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 UNO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 10 m 3 h 10 10 10 10 10 10 10 10...

Страница 15: ...onnection Durchf hrung Me kabel Auspuff G1 2 Exhaust G1 2 Feedthrough Measurement cable Sperrgas Flutgas Sealing gas Venting gas Wasserk hlung Water cooling 3 150 145 275 96 Betriebsmittel abla rinne...

Страница 16: ...ug PM 041 903 T PM 0542 BN 208 V UL plug PM 041 904 T 115 V UL plug PM 041 905 T TMH TMU 521 230 V Schuko plug PM 051 096 T PM 0542 BN 208 V UL plug PM 051 097 T 115 V UL plug PM 051 098 T Water cooli...

Страница 17: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 18: ...the product specified below is in accordance with the provision of EU Machinery Directive 98 37 EEC EU Electromagentic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EEC Produk...

Страница 19: ...81 3 32 259 011 Email pfeiffer hakuto co jp Korea Pfeiffer Vacuum Korea Ltd 703 Ho 853 1 Hankuk Mulru Dongchonri Suzi Eup 449 843 Yong in City Kyungkido Phone 82 31 266 0741 Fax 82 31 266 0747 Email s...

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