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12

6. Maintenance 

Maintenance on the individual components of

the pumping station should be carried out in
accordance with the instructions in the
respective sections of the relevant operating
instructions.

6.1. Replacing The Lubricant Reservoir And 

The Operating Fluid

– The d

diia

ap

ph

hrra

ag

gm

m  p

pu

um

mp

p bearings are lubricated for the whole

of their working life.

– The lubricant reservoir in respect of the ttu

urrb

bo

op

pu

um

mp

p should

be replaced at least once a year. Where extreme
operating conditions or unclean processes are involved,
the replacement interval should be shorter.

Procedure:

Unscrew the four screws from the cover plate and remove.

Unscrew four screws from the turbopump holding plate.

Lift out the turbopump with the holding plate from the 
pumping station.

Carry out the change of the lubricant reservoir in
accordance with the turbopump operating instructions.

The Lubricant can contain toxic substances

from the medium pumped. Lubricant must be
disposed of in accordance with the respective
regulations.
Safety instructions data sheet for the lubricant
on request.

– The operating fluid for the rro

otta

arryy  vva

an

ne

e  vva

ac

cu

uu

um

m  p

pu

um

mp

p

should be changed at least once a year.

Procedure:

Unscrew the two screws on the right hand side panel.
Slightly lift up the side panel and remove.

Unscrew two screws 4 and pull out perforated plate 5 to
the right hand side.

Exert slight downward pressure on operating fluid duct 6,
turn 90° and bring into the forward position.

Unscrew operating fluid drain screw 7 and drain operating
fluid via operating fluid duct 6 into a suitable container.

The temperature of the operating fluid can be as

high as 80 °C.

Toxic gases and vapours can escape from the

operating fluid which can be enriched with 
substances which represent a hazard to health. 
Disposal must be carried out in accordance with
the relevant regulations. 

WARNING

WARNING

WARNING

PLEASE NOTE

Lubricant reservoir
on turbomolecular pumps

Order number

TMH/U 071

PM 073 073 -T

TMH/U 261

PM 063 265-T

TMH/U 521

PM 063 265 -T

Operating fluid for rotary 
vane vacuum pumps

Pack size

Order number

P3

1 l

PK 001 106 -T

P3

5 l

PK 001 107 -T

P3

20 l

PK 001 108 -T

4 5

7

6

9

4

8

Changing the operating fluid on rotary vane vacuum pumps

4

Screws (2 pieces)

5

Perforated plate

6

Operating fluid duct

7

Operating fluid drain screw

8

Operating fluid filler screw

9

Sight glass

Order numbers for the lubricant reservoir on turbopumps and
operating fluid on rotary vane vacuum pumps

Screw back in operating fluid drain screw 7 taking care
with the O-ring.

Fill in operating fluid as described in Section 4.1. of these
operating instructions.

Re-fit the perforated plate and the side panel.

Check the operating fluid daily where non-stop operations
are involved, otherwise each time the pumping station is
switched on.

Further information regarding changes of

operating fluid can be found in the operating
instructions for the respective rotary vane
vacuum pump.

PLEASE NOTE

Содержание TSH 071

Страница 1: ...Turbomolecular Drag Pumping Stations PT 0031 BE H 0408 TSH 071 TSU 071 TSH 261 TSU 261 TSH 521 TSU 521 Betriebsanleitung Operating Instructions...

Страница 2: ...l Schema 7 Connection Involving Rotary Vane Vacuum Pumps 8 Connection Involving Diaphragm Pumps 9 4 Operations 10 4 1 Transportation Protection 10 42 Filling In The Lubricant 10 4 3 Operational Behavi...

Страница 3: ...tomatically following an interruption to the mains power supply For this reason access to the vacuum chambers for example via doors flanges valves may only be opened once the pumping station has been...

Страница 4: ...ry vane vacuum pump must be filled with operating fluid The operating fluid is contained in a pack inclu ded with the delivery consignment Before first time starting on pumping stations equipped with...

Страница 5: ...operating fluid is included in the delivery consignment and must be filled into the pump before first time operating Diaphragm pumps do not require lubricant Permissible magnetic fields TSH 071 TSU 07...

Страница 6: ...of accessories please refer to Section 3 7 Connections Plan 3 5 Connecting The Vacuum Unit There should be no unilateral loading on the high vacuum flange The weight of a vacuum chamber freely flange...

Страница 7: ...MEASURANCE TERMINAL STRIP X1 3 TERMINAL STRIP TSHU 071 261 521 RS 485 REMOTE VENT FAN HEAT TMS FV PUMP X2 PM 051 409 X 13 14 1S2 1X2 PE PE TC 1E5 PM 051 101 T POT EQUALIZATION FRAME GROUNDING M 1 U V...

Страница 8: ...CKING PUMP AS ROTARY VANE PUMP 21 X1 22 X1 A1 A2 1K1 12 21 14 1 2 1 2 12 21 14 1K1 1 4 K A 1 2 3 4 FV PUMP ws PM 051 409 X gn bn ge Z MAINS TURBO PE PE 18 OPTION 19 20 A1 A2 PE 1Y8 TVV 001 FORE VACUUM...

Страница 9: ...X gn bn ge Z MAINS BACKING PUMP AS DIAPHRAGM PUMP 21 X1 22 X1 240VAC 5A SOLID STATE RELAY PE TURBO PE M 1 U V PE 1E8 FAN 17 15 X1 16 X1 M 1 U V PE 1M7 BACKING PUMP 18 1G5 POWER SUPPLY 20 19 A1 A2 PE 1...

Страница 10: ...nt and type of operating fluid is shown on the rating plate Screw in operating fluid filler screw 8 and take care with the O ring Re secure the filling hose in the side panel Fit the side panel back o...

Страница 11: ...itched off with the key 6 Pumpstand EIN AUS pumping station ON OFF Turbopump and vacuum chamber are vented via Venting Valve TVF 005 which opens for 0 3 seconds when the venting frequency does not att...

Страница 12: ...right hand side Exert slight downward pressure on operating fluid duct 6 turn 90 and bring into the forward position Unscrew operating fluid drain screw 7 and drain operating fluid via operating flui...

Страница 13: ...hich are contaminated microbiologically explosively or radioactively cannot be accepted as a matter of principle Fill out the declaration of contamination In every case the Declaration of Contaminatio...

Страница 14: ...3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 Rotary Vane Pump DUO 2 5 m 3 h 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 2 5 UNO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 5 m 3 h 5 5 5 5 5 5 5 5 5 DUO 10 m 3 h 10 10 10 10 10 10 10 10...

Страница 15: ...onnection Durchf hrung Me kabel Auspuff G1 2 Exhaust G1 2 Feedthrough Measurement cable Sperrgas Flutgas Sealing gas Venting gas Wasserk hlung Water cooling 3 150 145 275 96 Betriebsmittel abla rinne...

Страница 16: ...ug PM 041 903 T PM 0542 BN 208 V UL plug PM 041 904 T 115 V UL plug PM 041 905 T TMH TMU 521 230 V Schuko plug PM 051 096 T PM 0542 BN 208 V UL plug PM 051 097 T 115 V UL plug PM 051 098 T Water cooli...

Страница 17: ...he repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acce...

Страница 18: ...the product specified below is in accordance with the provision of EU Machinery Directive 98 37 EEC EU Electromagentic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EEC Produk...

Страница 19: ...81 3 32 259 011 Email pfeiffer hakuto co jp Korea Pfeiffer Vacuum Korea Ltd 703 Ho 853 1 Hankuk Mulru Dongchonri Suzi Eup 449 843 Yong in City Kyungkido Phone 82 31 266 0741 Fax 82 31 266 0747 Email s...

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