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Index 

Page

1.

Safety Instructions .................................. 3

1.1. For Your Orientation........................................................... 3

1.2. Pictogram Definitions........................................................ 3

2.

Understanding The 
Pumping Station ...................................... 4

2.1. Main Features..................................................................... 4

2.2. Pumping Station Control ................................................... 4

2.3. Pumping Station Components.......................................... 4

3.

Installation............................................... 5

3.1. Preparations For Installation............................................ 5

3.2. Laying The Exhaust Line ................................................... 5

3.3. Venting Units....................................................................... 5

3.4. Electrical Connections ...................................................... 6

3.5. Connecting The Vacuum System .................................... 6

3.6. Cooling ................................................................................. 6

3.7. Connecting The Casing Heating ...................................... 6

3.8. Connections Diagram........................................................ 7

4.

Operations................................................ 8

4.1. Lubricant Filling .................................................................. 8

4.2. Before Starting ................................................................... 8

4.3. Starting ................................................................................ 8

4.4. Switching OFF..................................................................... 9

5.

What To Do In Case 
Of Breakdowns ? ..................................... 9

6.

Maintenance ............................................ 9

6.1. The Lubricant...................................................................... 9

7.

Service.................................................... 10

8.

Technical Data....................................... 10

8.1. Dimensions........................................................................ 11

9.

Accessories .......................................... 12

10. Spare Parts............................................. 12

Declaration of Contamination .................... 13

Declaration Of Conformity ............ (last page)

Please note: 

Current operating instructions are available via

www.pfeiffer-vacuum.de under ”Infoservice”

Page

Содержание TSH 071 E

Страница 1: ...Operating Instructions Turbomolecular Drag Pumping Stations Economy Version TSH 071 E TSU 071 E PT 0067 BE A 0105...

Страница 2: ...6 3 5 Connecting The Vacuum System 6 3 6 Cooling 6 3 7 Connecting The Casing Heating 6 3 8 Connections Diagram 7 4 Operations 8 4 1 Lubricant Filling 8 4 2 Before Starting 8 4 3 Starting 8 4 4 Switchi...

Страница 3: ...hen the unit is operated in environments which require other protection classes the necessary measures must be taken Do not carry out any unauthorised conversions or alterations to the turbo pumping s...

Страница 4: ...the Display And Operating Unit DCU OO1 The Display And Operating Unit DCU OO1 serves to control and monitor the pumping station The DCU can be detached from the pumping station and ope rated with the...

Страница 5: ...umps is fitted and filled ready for operation Permissible magnetic field 4 mT Set up the pumping station on a horizontal surface In order to avoid the build up of heat when operating the pumping stati...

Страница 6: ...ng is switched off As far as possible thermally insulate the heating sleeve and pump casing during installation When heating do not touch the pump casing and heating sleeve The relay box of the casing...

Страница 7: ...release Motor turbopump Pumping station Heating Reset Standby PWM ON touch relation 25 75 Switching output 1 24 VDC max 50 mA Switching output 2 24 VDC max 50 mA GND Relay box Heating Mains input heat...

Страница 8: ...or is abnormally high the valve can be opened when the pumping station is running Once the final pressure has stabilized the valve can be closed again HINWEIS 1 2 8 7 6 3 4 5 Display And Operating Un...

Страница 9: ...levant operating instructions see Section 2 3 6 1 Lubricant The bearing on the diaphragm vacuum pump is lubricated for the duration of its working life The lubricant reservoir on the turbopump should...

Страница 10: ...th the Code of Federal Regulations CFR 49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applie...

Страница 11: ...11 8 1 Dimensions 300 338 150 100 300 Threaded holes 4xM4 for securing the heating relay box...

Страница 12: ...M 041 902 T PM 800 542 BN Water cooling PM 016 000 T PM 800 546 BN Sealing gas Valve PM Z01 142 Protective grill DN 63 PM 006 597 R Splinter shield DN 40 PM 006 375 X DN 63 PM 006 376 X Pressure Gauge...

Страница 13: ...The repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acc...

Страница 14: ...e product specified below is in accordance with the provision of EU Machinery Directive 98 37 EEC Annex II A EU Electromagentic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EE...

Страница 15: ...l Bldg 690 Sukhumvit Road Klongton Klongtoey Bangkok 10110 telephone 662 259 6244 telefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 t...

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