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10

8. Technical Data 

Pumping Station

Unit

TSH 071 E

TSH 071 E
TSU 071 E

Connection, nominal diameter

DN 40 ISO-KF DN 63 ISO-K

DN 63 CF-F

Volume flow rate for

Nitrogen N2

l/s

33

60

Helium He

l/s

38

55

Hydrogen H2

l/s

37

45

Compression rate

N2

> 1011

He

1 · 107

H2

> 105

Final pressure

mbar

< 10-8

Start-up time

min

2

Working range

from

mbar

1000

to

mbar

< 1 · 10-8

< 1 · 10-9

Backing pump volume flow rate
at 10 mbar 50 Hz

l/min

3,8

60 Hz

l/min

4,4

Duration-/max. power1)

W

100/110

Mains connection

VAC

90-132/ 185-265

Weight

kg

15

15/16

Please refer to the relevant operating instructions for 
technical data on the individual components (see Section
2.3.).

1) With maximum gas throughput.

7. Service 

Do make use of our service facilities

In the event that repairs are necessary on your pumping stati-
on a number of options are available to you to ensure any
system down time is kept to a minimum:
– Have the pump repaired on the spot by our PFEIFFER

Service Engineers,

– Return individual components to the manufacturer for

repairs,

– Replace individual components.

Local PFEIFFER representatives can provide full details.

Before returning:

Please attach a clearly visible notice "Free of harmful sub-
stances" (both on the unit and also on the delivery note
and any accompanying letters).

"Harmful substances" are substances and preparations as
defined in the current, local, dangerous substances regulati-
ons; in the U.S.A. as
"materials in accordance with the Code of Federal
Regulations (CFR) 49 Part 173.240 Definition and Preparation".
We will carry out the decontamination and invoice this work
to you if you have not attached this note. This also applies
where the operator does not have the facilities to carry out
the decontamination work. Units which are contaminated
microbiologically, explosively or radioactively cannot be
accepted as a matter of principle.

Fill out the declaration of contamination

In every case the "Declaration of Contamination" must be
completed diligently and truthfully.

A copy of the completed declaration must accompany the
unit; any additional copies must be sent to your local
PFEIFFER Service Center.

Please get in touch with your local PFEIFFER representatives
if there are any questions regarding contamination.

Decontaminate units before returning or possi-

ble disposal. Do not return any units which are
microbiologically, explosively or radioactively
contaminated.

Returning contaminated units

If contaminated have to be returned for maintenance/repair,
the following instructions concerning shipping must be follo-
wed:

Neutralise the pump by flushing with nitrogen or dry air.

Seal all openings to the air.

Seal pump or unit in suitable protective foil.

Ship units only in appropriate transport containers.

Repair orders are carried out according to our
general conditions of sale and supply. If repairs
are necessary, please send the pump to your
nearest PFEIFFER Service Center.

Contact addresses and telephone hotline

Contact addresses and telephone numbers can be found on
the back cover of these operating instructions.

PLEASE NOTE

Содержание TSH 071 E

Страница 1: ...Operating Instructions Turbomolecular Drag Pumping Stations Economy Version TSH 071 E TSU 071 E PT 0067 BE A 0105...

Страница 2: ...6 3 5 Connecting The Vacuum System 6 3 6 Cooling 6 3 7 Connecting The Casing Heating 6 3 8 Connections Diagram 7 4 Operations 8 4 1 Lubricant Filling 8 4 2 Before Starting 8 4 3 Starting 8 4 4 Switchi...

Страница 3: ...hen the unit is operated in environments which require other protection classes the necessary measures must be taken Do not carry out any unauthorised conversions or alterations to the turbo pumping s...

Страница 4: ...the Display And Operating Unit DCU OO1 The Display And Operating Unit DCU OO1 serves to control and monitor the pumping station The DCU can be detached from the pumping station and ope rated with the...

Страница 5: ...umps is fitted and filled ready for operation Permissible magnetic field 4 mT Set up the pumping station on a horizontal surface In order to avoid the build up of heat when operating the pumping stati...

Страница 6: ...ng is switched off As far as possible thermally insulate the heating sleeve and pump casing during installation When heating do not touch the pump casing and heating sleeve The relay box of the casing...

Страница 7: ...release Motor turbopump Pumping station Heating Reset Standby PWM ON touch relation 25 75 Switching output 1 24 VDC max 50 mA Switching output 2 24 VDC max 50 mA GND Relay box Heating Mains input heat...

Страница 8: ...or is abnormally high the valve can be opened when the pumping station is running Once the final pressure has stabilized the valve can be closed again HINWEIS 1 2 8 7 6 3 4 5 Display And Operating Un...

Страница 9: ...levant operating instructions see Section 2 3 6 1 Lubricant The bearing on the diaphragm vacuum pump is lubricated for the duration of its working life The lubricant reservoir on the turbopump should...

Страница 10: ...th the Code of Federal Regulations CFR 49 Part 173 240 Definition and Preparation We will carry out the decontamination and invoice this work to you if you have not attached this note This also applie...

Страница 11: ...11 8 1 Dimensions 300 338 150 100 300 Threaded holes 4xM4 for securing the heating relay box...

Страница 12: ...M 041 902 T PM 800 542 BN Water cooling PM 016 000 T PM 800 546 BN Sealing gas Valve PM Z01 142 Protective grill DN 63 PM 006 597 R Splinter shield DN 40 PM 006 375 X DN 63 PM 006 376 X Pressure Gauge...

Страница 13: ...The repair and or service of vacuum components will only be carried out if a correctly completed declaration has been submitted Non completion will result in delay The manufacturer could refuse to acc...

Страница 14: ...e product specified below is in accordance with the provision of EU Machinery Directive 98 37 EEC Annex II A EU Electromagentic Compatibility Directive 89 336 EEC and EU Low Voltage Directive 73 23 EE...

Страница 15: ...l Bldg 690 Sukhumvit Road Klongton Klongtoey Bangkok 10110 telephone 662 259 6244 telefax 662 259 6243 U S A Pfeiffer Vacuum Inc 24 Trafalgar Square Nashua NH 03063 1988 USA telephone 1 603 578 6500 t...

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