Pfeiffer Vacuum TPH 2201, Руководство по эксплуатации

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2.1. Main Features
Turbopumps TPH/TPU 2201 with the TC 600 form a complete
unit. Voltage is supplied by Power Pack Unit (see
”Accessories”).
Turbomolecular Pump TPH/TPU 2201
1 High vacuum flange
2 Fore-vacuum flange
3 Cooling water connection
8 Electronic Drive Unit TC 600
42 Venting connection
66 Sealing gas connection
71 Lubricant filler srew
72 Lubricant drain screw
73 Sight glass
100 Measuring connection
Cooling
Standard: Water cooling
Integrated protective measures against excess temperatures:
The Electronic Drive Unit TC 600 reduces
the rotor rotation speed.
Bearings
The pump rotor has bearings at both ends. Each ball bearing
has its own circulatory lubrication system.
The turbopumps must not be transported when
filled with lubricant.
Feature TPH 2201 TPU 2201
High vacuum flange DN 250 ISO-K DN 250 CF-F
High vacuum seal Viton Metal
Attainable final < 1 · 10-8 mbar < 1 · 10-10 mbar
pressure (without baking-out) (with baking-out)
2. Understanding The Pumps TPH/TPU 2201
Proper use
– The Turbomolecular Pumps TPH/TPU 2201 may only be
used for the purpose of generating vacuum.
– The turbopumps may only be used to pump those media
against which they are chemically resistant. For other
media the operator is required to qualify the pumps for the
processes involved.
– If the process produces dust, the maintenance intervals
must be specified accordingly and sealing gas must be
used.
– If the pump is to be operated with more than 50% of the
permissible gas load, sealing gas must be used.
– The turbopump must be connected to a backing pump in
accordance with Section 3.3.
– Only PFEIFFER power pack units may be used to operate
the TC 600. These power pack units guarantee voltage
which is safely separated from the mains accordance with
Standard EN 60 742. The use of other power pack units
requires the express agreement of the manufacturer.
– The pumps may only be operated providing the ambient
conditions in compliance with Protection Type IP 30 are
observed.
Improper use
The following is regarded, inter alia, as improper:
– The pumping of explosive gases.
– Operating the pumps in areas where there is a danger of
explosion.
– The pumping of gases and vapours which attack the mate-
rials of the pumps.
– The pumping of corrosive gases without sealing gas.
– The pumping of condensating vapours.
– Operations involving impermissibly high levels of gas
loads.
– Operations with impermissibly high fore-vacuum pressure.
– Operations with improper gas modes.
– Operations involving too high levels of heat radiation
power (see Section 9. ”Technical Data”).
– Operating the pump in environments which require a pro-
tection class superior to IP 30.
– The use of other power pack units or accessories which
are not named in this manual or which have not been
agreed by the manufacturer.
– The connection to power pack units with earthing of a
direct voltage pole.
Improper use will cause all claims for liability and guarantees
to be forfeited.
2.2. Differences Between The Pump Types
M
1
66 8
73 72 71 3 42 100 2