6
Fitting The Splinter Shield
Insert the splinter shield in the high vacuum flange in such a
way that the corrugation of the strainer points outwards.
DN 63
➡
Bend the clamping lugs slightly outwards so that
subsequently the splinter shield is seated firmly in the high
vacuum flange (to avoid noise).
➡
Insert the splinter shield in the high vacuum flange while
pressing the clamping lugs slightly inwards.
➡
Press the outer ring of the splinter shield up to the limit
stop point in the high vacuum flange.
DN 40
➡
Insert the splinter shield up to the limit stop point in the
high vacuum flange (bend not the clamping lugs
outwards).
12a
12
H
Inserting the splinter shield
12 Splinter shield
12a Clamping lug
3.3. Connecting The Fore-Vacuum Side
Backing pump:
Vacuum pressure
≤
10 mbar; with
enhanced convection cooling < 0.1 mbar.
Recommendation: Oil-Free Diaphragm Pump or Rotary
Vane Vacuum Pumps from the Pfeiffer
Vacuum
range (note installation position,
turbopump, see Section 3.2.).
Connecting the backing pump
All connections of the fore-vacuum line: with the usual small
flange components or hose screw connections.
Be sure to conduct away the exhaust gases
from the backing pump. Do not reduce the free
cross section of the fore-vacuum flange with
following components.
The exhausted process gases and vapours can
represent a health hazard and can also be envi-
ronmentally damaging.
Comply with all the gas manufacture's safety
instructions.
➡
With rigid pipe connections: fit a bellows in the connecting
line to reduce vibration.
➡
The electrical connection of the backing pump is made via
a relay box whose control line is connected to ”FV PUMP”
on the TC 600.
Please refer to Operating Instructions PT 0030 BN for
details on the relay box, backing pump and its installation.
WARNING
CAUTION
Directly flanging the pump
The turbopump can be flanged onto the vacuum chamber
vertically (0°) up to an angle of 90° maximum.
The fore-vacuum flange must always point
downwards.
CAUTION
90°
11
Permissible installation positions for the turbopump
11
Vacuum chamber
The maximum loading capacity of the high vacu-
um flange is 200 N (equivalent to 20 kg).
Assymetric loading on the high vacuum flange
must be avoided.
With horizontal pump installation and oil-sealed backing
pumps (e.g. rotary vane pumps) the fore-vacuum flange of the
turbopump must be aligned vertically downwards (maximum
deviation ±20°), otherwise the turbopump could become
dirty.
CAUTION
20°
20°
11
Installation position with oil-sealed backing pump
No forces from the piping system must be
allowed to act on the pump where turbopumps
are anchored.
Suspend or support all pipes to the pump.
CAUTION
