CLXP:
Boron Trichloride (BCl
3
)
Chlorine (Cl
2
)
Carbon Tetrachloride (CCl
4
)
Chlorosilane (SiH
3
Cl)
Dichlorosilane (SiH
2
Cl
2
)
Trichlorosilane (SiHCl
3
)
Tetrachlorosilane (SiCl
4
) *
HCLP:
Hydrogen Chloride (HCl)
Chlorosilanes (SiH
3
Cl,
SiH
2
Cl
2
, SiHCl
3
, and SiCl
4
)*
All gases listed for use with
OXP except Oxygen (O
2
)
OXP:
Air (CDA)
Oxygen (O
2
)
Carbon Dioxide (CO
2
)
Nitrous Oxide (N
2
O)
Inerts (see INP)
HBRP:
Hydrogen Bromide (HBr)
CDAP:
Air (CDA)
* Contact Pall Corporation SLS for technical assistance.
CAUTION:
Purifiers are shipped under 5 – 15 psig argon pressure. Always
wear safety glasses when removing caps.
Table 2 (continued):
Purification Material Designations
WARNINGS:
• Reaction of the purification material with large concentrations of air
or water may evolve.
º
Heat and flammable gas for INP, SIP, and FCP purification materials.
º
Heat and corrosive gas for CLXP, HCLP, and HBRP purification
materials.
º
Heat, flammable gas, and corrosive gas for SF6P and NH3P
purification materials.
º
Heat, flammable gas, and toxic gas for GEH4P purification material.
º
Heat for OXP purification material.
• NEVER PASS PURE OXYGEN OR AIR THROUGH A PALL
GASKLEEN
®
PURIFIER CONTAINING INP, SIP, FCP, GEH4P, SF6P,
OR NH3P PURIFICATION MATERIALS.
