Following helium leak test:
1. Shut off purified helium supply and resume purge gas source (ensure
that the purifier remains pressurized).
2. Depressurize the purifier of helium by opening downstream isolation
valve(s) on the purifier and then system isolation valve downstream of
the purifier.
3. Before the purifier reaches atmospheric pressure, open upstream
isolation valve(s) on the purifier.
4. Post-purge the purifier assembly and gas line by flowing inert gas at
the installation purge flow rate (ref. Table 3, middle column) for 5 – 10
minutes to displace remaining helium.
After completion of the above procedure, the purifier is ready for conditioning.
5. CONDITIONING
The purpose of the conditioning procedures is to displace inert
gas used during installation of the purifier and either generate or
activate certain functional groups that are chemically bonded to
the AresKleen purification material. Any stray contaminants
introduced during the installation procedure are also removed
during the conditioning process.
WARNING:
Conditioning of purification material with reactive or corrosive gases is
usually an exothermic (heat-producing) reaction. When conditioning is
improperly executed, personal injury from fire or hazardous gas
emissions can result. To preclude atmospheric pollution and to avoid
contamination of process lines and process tool, effluent gases exiting
the purifier during conditioning should be directed to a suitable scrubber.
Should questions arise during conditioning, immediately interrupt
process gas flow by closing the inlet and outlet valves on the purifier,
then contact Pall Corporation SLS for technical assistance.
