amount of inert gas shown below for each of the purifier. Monitor
the effluent gas to determine when conditions are safe to remove
the purifier.
Gaskleen
®
PG550 Purifier:
Minimum of 1,200 liters (42.4 ft
3
) of inert purge gas
Gaskleen
®
PG2400 Purifier:
Minimum of 5,000 liters (176.6 ft
3
) of inert purge gas
Gaskleen
®
PG11000 Purifier:
Minimum of 22,000 liters (776.8 ft
3
) of inert purge gas
CAUTION:
Maintenance personnel must be provided with suitable protective
equipment.
Even though a purifier that has served for hazardous gas
purification may have been properly purged, small but dangerous
amounts of process gas may nevertheless remain adsorbed to the
purification material or equipment surfaces. For this reason, and
to preclude potential personal injury when replacing a purifier that
has served for purification of hazardous gases, personnel must be
provided with suitable protective equipment.
Typical Procedure:
1. Open inlet and outlet valves on purifier.
2. For all process gases, purge the purifier with at least the
minimum volume of purge gas as stated below. Ensure that
effluent gas is directed to a suitable vent or scrubber and NOT
to the process tool.
• Purifiers exposed to “Intended Process Gases” listed for INP
and OXP purification materials do not require purging
(exceptions for SiCl
4
, O
2
, and N
2
O which should be purged
