Ossila Spin Coater, Руководство пользователя

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Contents
1. Overview .........................................................................................................................................4
2. EU Declaration of Conformity (DoC) .......................................................................................5
3. Safety ................................................................................................................................................8
3.1 Warning ................................................................................................................................................8
3.2 Use of Equipment .............................................................................................................................8
3.3 Hazard Icons .......................................................................................................................................8
3.4 General Hazards ...............................................................................................................................9
3.5 Servicing ...............................................................................................................................................9
3.6 Health and Safety – Installation ..................................................................................................10
3.7 Health and Safety – Operation ...................................................................................................10
3.8 Health and Safety – Servicing ......................................................................................................10
4. Unpacking .....................................................................................................................................10
4.1 Packing List ........................................................................................................................................10
4.2 Damage Inspection ........................................................................................................................11
5. Specifications ......................................................................................................................................11
6. System Components .................................................................................................................12
7. Installation ....................................................................................................................................13
8. Operation ......................................................................................................................................14
8.1 Overview ............................................................................................................................................14
8.2 User Interface ...................................................................................................................................15
8.3 Programming and Usage .............................................................................................................16
9. Maintenance ................................................................................................................................20
9.1 Cleaning .............................................................................................................................................20
9.2 Repair and Service ..........................................................................................................................20
9.3 Storage Conditions .........................................................................................................................21
10. Troubleshooting .......................................................................................................................21
11. Related products ......................................................................................................................22
11.1 Compatible Substrates ...............................................................................................................22
11.2 Related Equipment ......................................................................................................................22