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electron microscope. Just open the V1 block valve, the electron microscope
control software will automatically adjust the brightness, contrast, auto focus
and other operations. You can immediately see the figure image in the figure
window, which is easy to operate. Fast. To start the electron microscope from
the off state, you need to click the "hot start" button to start the electron gun,
the startup time is about 40 minutes; after the startup is completed, open the
V1 block valve to see the image
。
4.2.2.
Starting the electron microscope from the off state
4.2.2.1.
Acquisition of ultra-high vacuum
1. Turn on the mechanical pump power switch; turn on the air compressor
power switch and observe the pressure gauge above 4kg/cm.
2. Turn on the appliance main switch.
3. Turn on the field gun power switch, electrical system power switch, and
vacuum power switch in the vacuum pump and electrical cabinet.
4. Click “Pumping” on the software interface, the system automatically
completes the pumping process, and the operation is simple and
convenient.
5. Bake the vacuum system to obtain an ultra-high vacuum.
4.2.2.2.
Manual
The manual mode is mainly used for instrument maintenance. Includes
vacuum leaks and electrical repairs. In this way, pay special attention to
whether the switches of the respective valves are correct.
1. Turn on the mechanical pump power switch; turn on the air compressor
power switch and observe the pressure gauge above 4kg/cm.
2. Turn on the appliance main switch.
3. Disconnect all high voltage and filament heating power supplies; close the
shutoff valve V1.
4. In the vacuum control panel behind the main frame, turn the “AUTO/MAN”
switch to the manual “MAN” position and turn all valve manual switches to
the off position.
5. Turn on the mechanical pump.
6. Open the front stage valve V2; when the sample chamber vacuum reaches
50Pa or more, press the molecular pump to start the switch, the system
enters the pumping high vacuum state, and after the molecular pump is fully
started, turn on the ion pump.
7. If switching from manual to automatic mode, first turn off all manual switches
and turn the “AUTO/MAN” switch on the vacuum control panel behind the
main frame to the automatic “AUTO” position.
