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2.
System composition and working principle
2.1.
Overall structure
A63.7080 interacts with an electron beam with a certain energy to excite a
physical signal. The imaging signal is collected, digitized, and the like by
means of a computer system and an electrical control system to form an
image. The overall structure of A63.7080 mainly includes electronic optical
tube, sample chamber, vacuum system and electrical cabinet control.
Picture 2-1 Electron Optical Tube
2.2.
Electron optical tube
The A63.7080 electro-optical lens barrel is capable of generating and
focusing an electron beam, and finally forms a small-diameter beam spot on
the sample. The electron optical lens tube is composed of a Schottky field
emission electron gun, an electromagnetic centering system, a lens barrel
blocking valve, a lens system, a scanning coil assembly, an astigmatism device,
and a signal detecting system, as shown in Picture 2-1. There is an
electromagnetic shielding tube outside the entire optical path, which can
eliminate the interference of the external stray electromagnetic field on the
electron beam.
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Objective Iris
Schottky Field Emission Gun
Electromagnetic Centering System
Signal Detecting System
Scanning Coil Assembly
Astigmatism Device
Electromagnetic Lens System
Lens Barrel Blocking Valve
