Setting Measurement Items
98
ZFX-C User’s Manual
Guidelines for setting detection size and detection interval
Possible output results
The following values can be output when expressions are set.
For details on reference position, position difference p.50
• Detection size
Determine the detection size roughly according to the size of the defect to be detected.
Setting a smaller detection size results in stronger detection sensitivity, while setting a larger detection size results
in weaker detection sensitivity.
When a larger detection size is set, the difference with elements that are not defects decreases as the density of
elements other than defects also is included in the calculation at (2). In other words, the more background that is
included in the detection area, the weaker the detection sensitivity becomes.
• Detection interval
Determine the detection interval roughly according to the size of the defect and the detection size.
The larger the detection interval that is set, the shorter the processing time becomes.
When the detection area is greater than the defect, set a smaller detection interval.
When the defect is greater than the detection area, set a slightly larger detection interval.
When a small detection interval is set, elements overlapping the edge of the defect also are included in the com-
parison, and so the defect value decreases, which results in less stable detection of the defect.
Item
Description
Message
Judgment result
The judgment result is output. (0:OK, -1:NG, -2: not measured)
Judge (JG)
Defect
Measured extent of defects is output. (0 to 255)
Defect (F)
Maximum density
The maximum density value inside the measurement region is output.
(0 to 255)
Max. density (GH)
Minimum density
The minimum density value inside the measurement region is output.
(0 to 255)
Min. density (GL)
Number of defects
The number of defects having an extent of defects at or exceeding the
judgment condition is output. (0 to 255)
Number of defects
(N)
Defect position
The X, Y coordinates of the defect position are output.
(-9999.999 to 9999.999)
Position X, Y
(X, Y)
Reference position
The X, Y coordinates of the defect position when the measurement
region is drawn are output. (-9999.999 to 9999.999)
Reference X, Y
(SX, SY)
Position difference
The difference obtained by "measurement position - reference
position" is output. (-9999.999 to 9999.999)
Position dif. X, Y
(DX, DY)
Note
(1)
(2)
Detection size
Defect
Sensitivity
Processing time
Stronger
Weaker
Longer
Shorter
Содержание Smart Sensor ZFX-C
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