![background image](http://html1.mh-extra.com/html/omron/d6f-ph/d6f-ph_user-manual_740809018.webp)
17
D6F-PH MEMS Differential pressure Sensor User’s Manual (A288)
7-3-4. Data Registers (D051h-D068h)
Table13. 16bit Data Register Map
Address
Registers Name
MSB
D7
D6
D5
D4
D3
D2
D1
LSB
D0
Description
D051h
COMP_DATA1_H
DATA<15:8>
Compensated Flow rate
Register
D052h
COMP_DATA1_L
DATA<7:0>
D061h
TMP_H
DATA<15:8>
Internal Temperature
Register
D062h
TMP_L
DATA<7:0>
For additional information, please refer to Section 8: Explanation of output data.