Parts adjustments and replacements
30
7.6.1
Replace the escaper and robot escaper guide.
Before replacement, remove any screws that were loaded in the chamber.
Replace and adjust the escaper and the robot escaper guide after removing the attaching
plate for the holding plate along with the holding plate.
To replace the escaper, remove the screws attaching the robot escaper guide and then
remove the robot escaper guide. Remove the screws attaching the escaper and then remove
the escaper.
Assemble, loosely, the escaper that corresponds with the screw’s nominal diameter, as it will
need adjusting later.
Attach the robot escaper guide
which corresponds with the screw’s nominal diameter.
Escaper
Power switch
Escaper attaching
screw
Screw for attaching
the robot escaper
guide
Screw sensor LED
Escaper
bracket
attaching bolt
Robot escaper
guide