Contents
2
GA01297_002_A1 - 11/2014 - © Oerlikon Leybold Vacuum
Page
Original installation and operating instructions.
0
Important Safety Information
4
0.1
Hazards caused by materials and substances
4
0.2
Risk of damaging the device
4
1 Description
5
1.1
Design and Function
5
1.2
Supplied Equipment
5
1.3
Technical Data
6
1.4
Ordering Data
6
2
Transport and Storing
7
3 Installation
7
4
Operation and Maintenance
9
4.1
Replacing the Filter Elements
9
4.2
Oerlikon Leybold Vacuum Service
11
5
Waste Disposal
12