Numerik Jena LIKgo, Руководство пользователя

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1. FEATURES AND APPLICATIONS
Position encoders in drive systems have to meet high and controversial demands, especially in
linear drive systems� The demands opposing each other are high accuracy and resolution on
the one hand and low mass, small dimensions and high measuring speed on the other hand�
• The graduated scale is definitive for the quality of a linear encoder� Requirements for
maximum position deviations of ±2 μm per meter or less are no rarity. The emphasis
is mostly on the avoidance of shortrange errors, since long-range errors, mostly linear
error components, can often be compensated�
• The concentration of multiple axes in motion in very tight spaces, such as in
semiconductor-producing machines, requires the miniaturization of the drives,
guideways and encoders�
• High machining speeds and therefore high accelerations make low masses of the
components in motion essential�
The LIK go incremental encoders from NUMERIK JENA are equipped with features which are
supposed to fulfill these high requirements in an ideal way.
• Due to an interpolation up to 64-times a resolution down to 78,125 nm is possible
without any additional electronics�
• The permissible traversing speed for a sinusoidal signal output amounts to 10 m/s� A
Square wave signal output with a resolution of 0.1 μm allows a permissible traversing
speed of 1�6 m/s�
• The short-range position errors (interpolation errors) were significantly reduced by
introducing an electronic compensation of amplitude and offset deviations of the coarse
signals� This compensation functions without following error in all velocity ranges�