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Inspection

No.704-2010-01

MA-3000

Service Manual

Document No.

NIC-704-2010-01

Date of Issue Jan. 16, 2014

Management Dept.

Page

MA-3000

SERVICE MANUAL

Nippon Instruments Corporation

Service Department

Date

Written By

Checked By

Approved By

1st edition

Jan. 15, 2014

Kotake

Daito

Noda

Содержание MA-3000

Страница 1: ...ice Manual Document No NIC 704 2010 01 Date of Issue Jan 16 2014 Management Dept Page 1 MA 3000 SERVICE MANUAL Nippon Instruments Corporation Service Department Date Written By Checked By Approved By...

Страница 2: ...01 MA 3000 Service Manual Document No NIC 704 2010 01 Date of Issue Jan 15 2014 Management Dept Page 2 Revision History Ver Revision Date Reason for Revision Written By Approved By 01 Jan 15 2014 Firs...

Страница 3: ...Replacement procedure of H1 heater 30 2 2 Adjustment procedure of H1 heater 33 2 3 Replacement procedure for H2 heater 34 2 5 Replacement procedure of thermocouple for H3 heater 39 2 6 Replacement pro...

Страница 4: ......

Страница 5: ...f time change components for MA 3000 Sample heating tube MA 3 W139 1360 01 1 Mercury collection tube gold nanoparticles W139 1341 00 1 Teflon joint 6 mm dia N 41663 1 Different diameter union tee 5161...

Страница 6: ...er Version I type With the instrument turned off remove the ring latches and remove the top cover Version II type With the instrument turned off remove the ring latches The M3 screws in the upper part...

Страница 7: ...ht side panel Type A or B Remove the fixing screws for transportation Type C Remove the knurled screw in the rear Remove the two knurled screws and remove the side panel Remove the M3 screw fixing the...

Страница 8: ...ft side panel Type A or B Remove the fixing screws for transportation Type C Remove the knurled screw in the rear Remove the two knurled screws and remove the side panel Remove the M3 screw fixing the...

Страница 9: ...3000 Version I type MA 3000 Version II type If the 1 mm cell branch pipe or O ring has a crease or breakage replace it If not replaced it will cause a leak No Name Comp No Qty Remark 1 Phillips screwd...

Страница 10: ...eaning of components Clean up the metal components using alcohol and wipe them Wash the other parts using neutral detergent and nitric acid Wash them using neutral detergent for 30 minutes with ultras...

Страница 11: ...sition packing s and O ring s Keep in mind that the screw will break if the connection of the 200 mm cell and the 1 mm cell is fastened too much tightly Fixing of components 6 Attach the cell unit tig...

Страница 12: ...sing the trimmers 20 minutes after switching on the power supply And then tune them to 3 0 0 2 1 hour or more after Adjustment of them if this is not possible then change the resistance Turn off the p...

Страница 13: ...f the current offset information and gain information Push the AUTO button to make the automatic gain adjustment If the difference from the constant before the alteration is abnormally large after the...

Страница 14: ...be tighten them manually and then tighten them furthermore by one turn In the case of a joint and a glass tube tighten them manually and then tighten them furthermore by a 1 6 turn 4 Loosen a stainles...

Страница 15: ...of the MA 3000 Turn OFF the MA 3000 after the sample changer operates and the Z axis moves towards you and stopped Loosen the Teflon joint at the sample inlet Unscrew 4 knurled screws holding the samp...

Страница 16: ...pen the door to the right Remove the 3 screws that fix the sample inlet Remove the sample heating tube Remove the 3 flat head screws on the sample inlet and slowly turn sample heating tube and mercury...

Страница 17: ...n an alternative manner until there is no clearance Install the Teflon joint and the mercury collection tube to the sample heating tube Disassemble the Teflon joint pass the sample heating tube throug...

Страница 18: ...ter and the dent of the mercury collection tube Adjust the position by adjusting the insertion depth of the Teflon joint Tighten the Teflon joint securely In particular the reducing joint must be tigh...

Страница 19: ...t to the branch pipe on the sample inlet Install the pipe heater cover and sample heater tube retainer Close the front cover and install the top cover Turn ON the power of the MA 3000 and perform the...

Страница 20: ...mple changer It is possible to specify the tray number and boat number at 1 and 2 respectively A number can be changed only when it is displayed in black Items 3 and 4 show operation to be carried out...

Страница 21: ...f the transfer arm does not touch the rack Axis X tray position Make sure that it is possible to move the tray right and left a little with the arm pushed in Axis Y high position Make sure that the pr...

Страница 22: ...1 Inspection 18 No 704 2010 01 Axis X origin position Axis Y origin position Axis X boat position Adjust the boat either leftmost or rightmost...

Страница 23: ...ading axis boat position Make sure that the loading axis fork does not touch the lift Lift lower position Make sure that the boat is not put on the claw in the front part Create states in which the bo...

Страница 24: ...l 2 When no abnormality is found carry out the returning operation to the origin using set the boat at No 100 and carry out the above procedure till Step 4 When no abnormality is found carry out the r...

Страница 25: ...es and then the leak check starts The check has been successfully completed if the flow rate decreases from around 0 4L min to 0 00L min within 30 seconds If the check fails turn OFF the power and che...

Страница 26: ...1 Inspection 2 No 704 2010 01 iv Recheck after fixing of all components...

Страница 27: ...it is not 1 to 4 adjust the value with the ZERO trimmer of the mass flow controller Turn OFF the power of the MA 3000 and remove the top cover and then the right side cover Start the MA 3000 and open...

Страница 28: ...ng becomes difficult when the temperature rises Remove the cover of the piping heater H4 Checking in inlet Carry out RUN Leak check on the software screen Disconnect the joint of the inlet from the br...

Страница 29: ...When the option unit is connected the cross joint shown below is used for connection Because even when the collection tube is normal there may a leak in another part connect the parts indicated by ea...

Страница 30: ...RH MA3 using a flowmeter that can measure 0 to 0 5 L min Measure the flow rate on the inlet side of the first collection tube 160 L Make sure that the difference between the flow rates of 1 and 2 is 0...

Страница 31: ...1 Inspection 7 No 704 2010 01 1 8 Inspection An inspection list is annexed...

Страница 32: ...e the top plate of the unit and open the left side cover 4 Turn ON the No 2 dip switch located in the center of the circuit board 5 Turn ON the power of the MA 3000 6 Start the upgrade software 7 Spec...

Страница 33: ...t working after 2 hours from turning the power OFF when the temperature is high Pull up the ring latch and remove the top cover panel Remove the two screws first in case of the Version II type Pull ou...

Страница 34: ...the heater and the case twist the solderless terminal of the heater with a long nose plier so that the gap becomes minimum Put the sample heating tube back As mentioned later it is not necessary to t...

Страница 35: ...re Leak test is carried out later Verify that the temperature of the H1 heater goes up to 150 in the maintenance mode Verify that the indicated value left red circle coincides with the set value right...

Страница 36: ...measurement to the sample inlet and monitor the inside temperature Monitoring point is 53 5mm from the end face of the sample inlet which is the center of the boat placed by the boat taking Boat hand...

Страница 37: ...ature is high i Remove the top cover panel and open the front cover ii Dismount the sample heating tube and the mercury collection tube iii Remove wiring of the H2 heater iv Extract the connectors fro...

Страница 38: ...firm that it can reach to the H3 heater and then tighten the fixing screws securely Put the sample heating tube back Put the top and side cover panels back Turn the power ON Start up the software Leak...

Страница 39: ...hours from turning the power OFF when the temperature is high Pull up the ring latch and remove the top cover panel Pull out the sample heating tube and the mercury collection tube from the front Remo...

Страница 40: ...erminal board Terminals are not polarized however do not mistake right for left Put the thermocouple and the cover of terminal board back Fix the thermocouple so that the tip of the thermocouple touch...

Страница 41: ...heater temperature goes up to 600degC or higher during the measurement Confirm the H3 heater temperature goes down to 200degC after completion of the measurement Execute the leak check after putting a...

Страница 42: ...heating tube and mercury collection tube Remove the terminal board cover for the H3 heater and then remove the thermocouple The thermocouple itself is connected to the heater relay board through a co...

Страница 43: ...to the center of the sample heating tube However do not touch 5mm from the tip as the protection glass is broken Put on to the 8th turn of 14 turns Adjust the position of the thermocouple to sit on t...

Страница 44: ...setting if NG 3 The control signal changes 0 or 24V when temperature setting is changed Defective board or cable 1 Preparation of tools parts 2 Parts dismounting Turn the main power OFF Do not start...

Страница 45: ...ert as it is socket type Note that there are two types namely D type for DC and A type for AC SSR for H2A and H2B Insert as it is socket type Note that there are two types namely D type for DC and A t...

Страница 46: ...14 402 Drain Tank 18 IUC 56 655 02 Roller Clamp KT 6 19 W139 1120 01 Activated Carbon Case Set for outlet 20 W139 1130 01 Activated Carbon Case Set for career gas Tube S1037 0202 00 PTFE 2 4 1m S1037...

Страница 47: ...to MFC MFC 3 PTFE 2 4 100mm MFC to Filter 4 PTFE 2 4 280mm to Filter Filter IN 5 PTFE 2 4 110mm Filter OUT to Inlet 6 PTFE 2 4 700mm to Inlet Inlet 7 PTFE 2 4 300mm Reducing joint V1 IN 8 PTFE 2 4 240...

Страница 48: ...t our service 13 BC LIFT TIME OUT ERROR The movement of the lift motor was not completed An error occurred when the lift went up down Turn OFF the power open the front door and adjust the sample chang...

Страница 49: ...when lifted up and Z axis hit the tray and stopped 3 Remove them if the board or the tray on the arm can be removed In the above case remove the board only as the tray is caught 4 Turn the power of M...

Страница 50: ...LIPTUP DOWN Which side is the lift Either one should be ON Served as the origin sensor too TRAY ON when a tray is on the X axis BOAT Not used DOOR OPEN ON when the door of the tray case is open REFUS...

Страница 51: ...Tray No and advance the movement Tray No Enter the number of the tray onto which the boat is loaded Boat No Enter the boat number Advances by 1 movement Returns by 1 movement Advances to the next step...

Страница 52: ...e of the tray and the tray and the rack are in parallel If they are not in paralle loosen the screw of the arm and adjust the parallelism Axis X Out Pull out the tray Make sure that the tray detection...

Страница 53: ...er and the lift do not touch each other Loosen the 4 screws and adjust the angle of the boat handling poker so that it does not touch the lift Axis Z Boat Insert the boat handling poker into the lift...

Страница 54: ...Axis Y Down Move down the tray Axis Z Measure Seal the inlet Adjust the pre compression of the spring Set the MEASURE POS OFFSET so that the distance shown left is 1 5mm shorter than the distance whe...

Страница 55: ...lick BC Adjust Ready state Put a boat on Tray No 1 and set it to the MA 3000 Axis Y origin Make sure that the bottom of the transfer arm does not touch the rack If adjust by moving the origin position...

Страница 56: ...the mounting position of the linear guide which the arm to come to the center of the case Table position Make sure that the protrusion of the arm is housed in the hole in the tray when the tray is ra...

Страница 57: ...1 Inspection 33 No 704 2010 01 Tray sensor Adjust the sensor position Axis Y origin position Axis X boat position Create states in which the boat is put in the rightmost and leftmost positions...

Страница 58: ...ading axis boat position Make sure that the loading axis fork does not touch the lift Lift lower position Make sure that the boat is not put on the claw in the front part Create states in which the bo...

Страница 59: ...l 4 When no abnormality is found carry out the returning operation to the origin using set the boat at No 100 and carry out the above procedure till Step 4 When no abnormality is found carry out the r...

Страница 60: ...Key in 10 to the Boat No Click of BC ADJUST and proceed the steps to the sequence of lift up Fix the boat taking Boat handling poker by tightening at the angle not to touch to the lift then put the T...

Страница 61: ...ansportation of the boat can be made without any trouble for each case of that the boat sits this side in the tray and the machine side If the boat does not sit exactly execute Adjustment of the plate...

Страница 62: ...t up once again after putting the Boat handling poker back to the origin to this side Put back the step by clicking of the BC ADJUST and click while the boat is set to proceed with the step Verify tha...

Страница 63: ...enance screen Remove the Teflon joint of the boat taking Boat handling poker at this side and remove the three screws fixing the Boat handling poker then pull out the old pole Put a new Boat handling...

Страница 64: ...Key in 10 to the Boat No Click of BC ADJUST and proceed the steps to the sequence of lift up Fix the boat taking Boat handling poker by tightening at the angle not to touch to the lift then put the T...

Страница 65: ...ansportation of the boat can be made without any trouble for each case of that the boat sits this side in the tray and the machine side If the boat does not sit exactly execute Adjustment of the plate...

Страница 66: ...ty 3 6 Adjustment of sample changer Vertical axis Y axis Following malfunctions are supposed to take place as abnormality i To hear abnormal noise ii Fail to catch tray iii Stop in the midst of operat...

Страница 67: ...e Drive the Y axis independently from Execution Maintenance BC Input pass word 0219 AXIS Y MANUAL DRIVE ORIGIN shows original point ROW11 shows 11th stair of the sample boat case The gap between the t...

Страница 68: ...rly There are two reminders for the replacement When the tray transport arm is transported into the tray case it should be center of the case If it is not center adjust the position by putting a thin...

Страница 69: ...the tray case and move the position right and left to check Offset adjustment to bring the boat on the tray to the center of the lift Put two boats on the tray No 1 and No 10 and then check if the ce...

Страница 70: ...acement of the lift motor Grease up Wipe off 1st grease on the part of broken line shown below and then apply the grease VADEN grease supplied with the instrument Adjustment or replacement of the boat...

Страница 71: ...ssary Replacement of the lift motor unit is made after removal of the tray case however it is recommended to let the factory carry out this work because that the part of vertical and horizontal axes p...

Страница 72: ...epeat measurement of distilled water and purge does not improve the situation cleansing of cell joints Boat handling poker and sample inlet and replacement of sample heating tube and mercury collectin...

Страница 73: ...ts tubes of measurement route cell and activated carbon filter for ventilation and disassembling and cleansing of dehumidification tube and electro magnetic valve Reference value of ABS in case of 0 2...

Страница 74: ...rd A 1 piece S1106 1503 02 Pre Amprifier Board B 1 piece S1106 1503 03 Pre Amprifier Board C 1 piece S1106 1504 01 Lamp PrevAmplifier Relay Board 1 piece S1106 5100 05 Main Board 1 piece VLQ P 10 F O...

Страница 75: ...6165 Reducing Union Joint 1pc IDC NH1Y 2100 20BA C Circuit Protectpr 1pc IUC 56 655 02 Roller Clamp KT 6 1pc KAN 01084 12 Activated Charcoal 250g btl 1btl N 1063 0513 401 Sponge for Activated Carbon F...

Страница 76: ...ion LED1 TX Data transmission LED11 RD ORG RD Syringe origin LED2 RX Data reception LED44 UP Lift upper position LED37 H1FAN H1 fan ON LED45 DOWN Lift lower position LED39 V4 V4 valve ON LED36 V3 V3 v...

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