EDH0185En1020 — 07/11
12
VP-25XA
Precision Compact Linear Stage
VP-25XA stage will then have the following interface:
CAUTION
Once the top plate interface removed, one of carriages is floating on its
axis.
9.0
Assemblies
9.1
XY Mounting
4 holes M4 thd /
`
100
x
75
2
7
9
1
Floating Carriage
CAUTION
• To make an XY stage assembly, it is necessary to tighten screws
firstly on the driving carriage of the lower stage, then the ones on
the floating carriage.
• The lower stage must be fixed on a plane surface with a flatness of
5 µm.
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