3
EDH0185En1020 — 07/11
VP-25XA
Precision Compact Linear Stage
Reversal Value (Hysteresis)
Difference between actual position values obtained for a given target posi-
tion when approached from opposite directions.
Minimum Incremental Motion (Sensitivity)
Minimum motion that a stage can achieve. Our stages and our kinematic
chain are conceived in such a way that sensitivity is better than the resolu-
tion of the encoder.
Resolution
The smallest motion an encoder fixed to the stage can measure.
Yaw, Pitch
Rotation of carriage around the Z axis (Yaw) or Y axis (Pitch), when it
moves.
The testing of on-axis accuracy, repeatability, and reversal error are made sys-
tematically with our test equipment in an air-conditioned room (20 °C
±1 °C
).
Each stage is tested with a laser interferometer.
A linear cycle with 21 measures on travel and 4 cycles in each direction
gives a total of 164 points.
3.2
Mechanical Specifications
Resolution
(µm)
0.1
On-Axis Accuracy
(µm)
2
Bi-directional Repeatability
(µm)
0.2
Pitch
(µrad)
100
Yaw
(µrad)
100
MTBF
(1)
(h)
20,000
1)
See chapter: “Maintenance”.
The MTBF value indicated above is given to use the stage with the follow-
ing parameters:
Centered load
(N)
50
Displacements
(mm)
2
Speed
(mm/s)
10
Operating rate on the cycle
50%
Cycle
21 hours/day
330 days/year
3.3
Load Specification Definitions
Normal Load Capacity (Cz)
Maximum load a stage can move while maintaining specifications.
This value is given with speed and acceleration specified for each stage,
and with a load perpendicular to bearings.
Specified Speed
(mm/s)
25
Specified Acceleration
(mm/s
2
)
100
Axial Load Capacity (±Cx)
Maximum load along the direction of the drive train.
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