Newport ESP6000, Руководство пользователя

Страница: 12 / 291

x
Figure 4.1-18 — Position Status Menu .............................................................................................................................. 4-14
Figure 4.1-19 — Help Menu ..............................................................................................................................................4-14
Figure 4.1-20 — About Screen .......................................................................................................................................... 4-15
Figure 4.2-1 — Servo Tuning Main Screen ...................................................................................................................... 4-16
Figure 5.4-1 — VI Front Panel .........................................................................................................................................5-105
Figure 6.1-1 —Typical Motion Control System .................................................................................................................. 6-1
Figure 6.2-1 — Position Error Test .....................................................................................................................................6-3
Figure 6.2-2 — High Accuracy for Small Motions .............................................................................................................. 6-4
Figure 6.2-3 — Low Accuracy for Small Motions ............................................................................................................... 6-4
Figure 6.2-4 — Effect of Stiction and Elasticity on Small Motions ................................................................................... 6-5
Figure 6.2-5 — Error Plot ....................................................................................................................................................6-5
Figure 6.2-6 — Error vs. Motion Step Size ......................................................................................................................... 6-6
Figure 6.2-7 — Hysteresis Plot ............................................................................................................................................ 6-7
Figure 6.2-8 — Real vs. Ideal Position ...............................................................................................................................6-7
Figure 6.2-9 — Pitch, Yaw, and Roll Motion Axes ............................................................................................................. 6-8
Figure 6.2-10 — Pitch, Yaw and Roll ..................................................................................................................................6-8
Figure 6.2-11 — Wobble ......................................................................................................................................................6-8
Figure 6.2-12 — Position, Velocity, and Average Velocity ................................................................................................ 6-9
Figure 6.3-1 — Servo Loop ................................................................................................................................................ 6-11
Figure 6.3-2 — P Loop .......................................................................................................................................................6-12
Figure 6.3-3 — PI Loop ...................................................................................................................................................... 6-13
Figure 6.3-4— PID Loop ....................................................................................................................................................6-13
Figure 6.3-5 — Trapezoidal Velocity Profile .................................................................................................................... 6-14
Figure 6.3-6 — PID Loop with Feed-Forward ................................................................................................................... 6-14
Figure 6.3-7 — Tachometer-Driven PIDF Loop ................................................................................................................ 6-15
Figure 6.4-1— Trapezoidal Motion Profile ...................................................................................................................... 6-16
Figure 6.4-2 — Position and Acceleration Profiles .......................................................................................................... 6-16
Figure 6.4-3 — Origin Switch and Encoder Index Pulse ................................................................................................. 6-17
Figure 6.4-4 — Slow-Speed Origin Switch Search ........................................................................................................... 6-18
Figure 6.4-5 — High/Low-Speed Origin Switch Search ................................................................................................... 6-18
Figure 6.4-6 — Origin Search From Opposite Direction ................................................................................................. 6-18
Figure 6.5-1 — Encoder Quadrature Output .................................................................................................................... 6-19
Figure 6.5-2 — Optical Encoder Scale .............................................................................................................................. 6-20
Figure 6.5-3 — Optical Encoder Read Head .................................................................................................................... 6-20
Figure 6.5-4 — Single-Channel Optical Encoder Scale and Read Head Assembly ....................................................... 6-20
Figure 6.5-5 — Two-Channel Optical Encoder Scale and Read Head Assembly .......................................................... 6-21
Figure 6.6-1 — Stepper Motor Operation ......................................................................................................................... 6-22
Figure 6.6-2 — Four-Phase Stepper Motor ....................................................................................................................... 6-22
Figure 6.6-3 — Phase Timing Diagram ............................................................................................................................ 6-23
Figure 6.6-4 — Energizing Two Phases Simultaneously ................................................................................................. 6-23
Figure 6.6-5 — Timing Diagram, Half-Stepping Motor .................................................................................................... 6-24
Figure 6.6-6 — Energizing Two Phases with Different Intensities ................................................................................. 6-24
Figure 6.6-7 — Timing Diagram, Continuous Motion (Ideal) ........................................................................................ 6-24
Figure 6.6-8 — Timing Diagram, Mini-Stepping .............................................................................................................. 6-24
Figure 6.6-9 — Single Phase Energization ....................................................................................................................... 6-25
Figure 6.6-10 — External Force Applied .......................................................................................................................... 6-25
Figure 6.6-11 — Unstable Point ........................................................................................................................................6-25
Figure 6.6-12 — Torque and Tooth Alignment ................................................................................................................. 6-26
Figure 6.6-13 — DC Motor .................................................................................................................................................6-27
Figure 6.7-1 — Simple Stepper Motor Driver ................................................................................................................... 6-29
Figure 6.7-2 — Current Build-up in Phase ........................................................................................................................ 6-29
Figure 6.7-3 — Effect of a Short ON Time on Current ..................................................................................................... 6-29
Figure 6.7-4 — Motor Pulse with High Voltage Chopper ................................................................................................. 6-30
Figure 6.7-5 — DC Motor Voltage Amplifier .................................................................................................................... 6-30
Figure 6.7-6 — DC Motor Current Driver ......................................................................................................................... 6-31
Figure 6.7-7 — DC Motor Velocity Feedback Driver ........................................................................................................ 6-31
Figure 6.7-8 — DC Motor Tachometer Gain and Compensation .................................................................................... 6-32
Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com