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32
Reflected
Illumination
BF
Kohler illumination system / Brightfield, Normaski DIC,
simple Polarized
/
BF/DF
/
Kohler illumination system / Brightfield / Darkfield, Normaski
DIC, simple Polarized
Light source
12V 100W halogen
Transmitted
Illumination
No
Yes
No
Yes
Illumination
-
Kohler
illumination
system
Brightfield /
Built-in filters
-
Kohler
illumination
system
Brightfield /
Built-in filters
Light Source
-
12V100W
halogen
-
12V100W
halogen
Lamp
-
12V 100W
long-life halogen
bulb (Philips
7724)
-
12V 100W
long-life halogen
bulb (Philips
7724)
Condenser
No
Yes
No
Yes
Abbe
-
N.A 1.20
-
N.A 1.20
Long-working
-
LWCD, N.A 0.65
-
LWCD, N.A 0.65
Stage
4x4 inch
Size 210(W) X 170(D) mm, Stroke 104(X) X 102(Y) mm, metal plate, glass plate (optional)
Optional
6x6” stage, 6x6” stage, 8” wafer stage, 12” wafer stage
Dimension
Approx. 246(W) x 572(D) x 514(H)
Weight
Approx. 19kg
10.2 3D module of PA53MET
Item
PA53MET-3D, PA53MET-BD-3D
1. mechanism
High-resolution 5-phases stepping motor Long cross-roller guide system
2. Stroke Distance
30mm
3. Resolution
0.01μm
4. Repeatability
0.5
μm
5. Max Speed
1.4mm/sec
6. Dimension
240(W)x 157(D) x 202.5 (H)
7. Weight
5kg
8. Load capacity
15kg
Содержание PA53MET
Страница 13: ...13 6 NOMENCLATURE...
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Страница 15: ...15 Control box and control pad are provided PA53MET 3D PA53MET BD 3D only...
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