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MKS Instruments UK Ltd

Microvision2 Hardware Manual – SP101015.102 August 2010

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Please describe the system fault in detail:

Details of substances pumped, or coming into contact with the returned equipment.
Chemical names:

Precautions to be taken in handling these substances:

Action to be taken in the event of human contact or spillage:

I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been
in contact with are named above, that the information given is correct and that the following actions have
been taken:
1. The equipment has been securely packaged and labelled.
2. The carrier has been informed of the hazardous nature of the consignment if applicable.

Signed:

Title:

Date:

Phone

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Содержание Microvision2

Страница 1: ...Microvision2 Hardware Manual Microvision2 Hardware Manual SP101015 102 August 2010...

Страница 2: ...cover You can send your comments to MKS Instruments UK Ltd Spectra Products Cowley Way Weston Road Crewe Cheshire CW1 6AG U K 44 0 1270 250150 Tel International 44 0 1270 251939 Fax International Emai...

Страница 3: ...sure 18 5 5 Mounting the analyser 19 6 Microvision2 Installation 20 6 1 Installation 20 6 2 Electrical connections 20 7 Connecting to the Ethernet Port 21 7 1 Adding the Microvision2 22 7 2 Directly c...

Страница 4: ...reby declare that the equipment named above has been designed to comply with the relevant sections of the above referenced specifications The unit complies with all essential requirements of the Direc...

Страница 5: ...lectronics Temperature stabilized critical components offering improved signal stability and drift Calibrations and configurations stored locally within the RGA Flexible I O capability including a ded...

Страница 6: ...1 Mechanical Microvision2 Dimensions 127mm wide x 127mm x 179mm deep plus 46mm over analyser connector to face of CF flange Weight 1 7 kg 24VDC Power Supply Dimensions 75mm wide x 45mm high x 146mm de...

Страница 7: ...earth conductor of the power cord must be connected to the power source protective earth terminal There are no operator replaceable parts within the 24VDC power supply unit or the Microvision2 unit 1...

Страница 8: ...r panel refers to a Read all instructions carefully before use b The control unit and signal ports are designed for connection to MKS accessories via MKS supplied cables There are no accessible hazard...

Страница 9: ...re required to obtain a greater separation between control unit and RF head or if longer serial communications cables are required they must be supplied by MKS Instruments Ltd 5 Cables attached to all...

Страница 10: ...t must be returned to MKS Instruments Spectra Products Ltd unless special arrangements are made 3 There are no user serviceable parts in the electronic equipment Certain components are EMC and safety...

Страница 11: ...th the unit Do not use a standard 3 5mm jack plug Replacements are available from MKS Instruments if required The external trip feature is used to protect the filaments and electron multiplier from ex...

Страница 12: ...rip circuitry is galvanically isolated from the system ground The maximum common mode voltage is 60V DC or peak AC current limited to 2mA 4 2 Audio Socket This is a 2 5mm jack socket It is used to con...

Страница 13: ...rchased 4 7 Power A 2 pin D type connecter used to for the 24VDC power supply Pin Function Description 1 Gauge On Open collector output from gauge 2 No connection 3 24VDC Output 24VDC supply output fu...

Страница 14: ...oth fused at 120mA fuses are self resetting NOTE The 120mA maximum load for the power supply outputs is shared between the Digital and Analogue connectors Pin Function Description 1 15V 15V supply out...

Страница 15: ...llowing functionality 16 configurable I O lines 3 3V power output fused at 120mA fuses are self resetting 15V power output fused at 120mA fuses are self resetting 24V power output fused at 120mA fuses...

Страница 16: ...state d In cases where the external equipment is some distance away and or is likely to have a different ground potential the fitting of opto couplers on the interfacing should be implemented Using t...

Страница 17: ...ch are not in the box immediately contact your local MKS sales service representative 5 2 Inspecting the analyser The analyser is both fragile and very easily contaminated by the slightest touch from...

Страница 18: ...mber does not meet the above criteria you should use a specially designed adapter so that the analyser may be mounted outside the chamber Please contact your local MKS representative for assistance 5...

Страница 19: ...efully insert the analyser into the vacuum chamber ensuring that you do not allow the leads to touch the walls of the vacuum chamber Make sure the gasket does not slip part way out of its slot as you...

Страница 20: ...connector should butt up against the analyser flange If you cannot fully mate the Microvision2 to the analyser slightly loosen the three cross head screws placed around the mounting collar and try ag...

Страница 21: ...twork Auto IP will obtain an IP address from the server DHCP Short for Dynamic Host Configuration Protocol a server running on the network is responsible for assigning dynamic IP addresses to devices...

Страница 22: ...be connected to a network running BOOTP Option Use Auto IP If the Microvision2 is to be connected to a network running BOOTP then your IT Specialist will need to perform certain tasks on the BOOTP Se...

Страница 23: ...ext you need to check if your PC or MAC is configured for Auto IP most are by default Windows PC Start Connect To Show All Connections Click once on the connection hosting the Microvision2 Note the in...

Страница 24: ...e following options Obtain an IP address automatically Obtain DNS server address automatically Click OK MAC Apple Menu System Preferences Network Ethernet Configure Choose the option Using DHCP or Usi...

Страница 25: ...on to start the application After a few moments the following dialog appears displaying a list of all discovered MKS RGA s You can see that there is only one RGA displayed in the example yours may con...

Страница 26: ...r Application found on the supplied MKS Utilities CD This application does not require installation but you will require administrative privileges to make changes to the Windows Firewall exceptions fo...

Страница 27: ...ct the Use the following fixed settings option Enter the IP address and the Subnet issued to you by your IT Specialist The Default Gateway is used in situations where multiple networks exist or for co...

Страница 28: ...hed to the analyser if baking for longer periods then a Thermal Extender must be used The analyser may be baked up to 250o C but care should be taken to avoid exposing the ceramic feedthrough to sudde...

Страница 29: ...to a small electrical current which can be passed to the electronics for amplification and subsequent display to the outside world 4 The flanged housing This is the only part of the analyser seen unde...

Страница 30: ...ngs as possibly acceptable and anything outside these ranges as being a definite fail Any readings less than 1 ohm we can assume as a short circuit and any reading above 5 Meg Ohm 5x106 ohms as being...

Страница 31: ...by the hot filament referred to as the emission current flowing to the ion source cage This is normally maintained at a fixed value of 1mA The current flow through the filament is increased until the...

Страница 32: ...ch to put small parts replacement filament a method of holding the analyser securely in an upright position a small bench vice is ideal pen and paper on which to make notes and sketches 9 4 1 Removing...

Страница 33: ...e situation in your vacuum system With the filaments removed you have a clear view of the source cage The signs to look for are powdery deposits which will vary in colour but may be brown blue canary...

Страница 34: ...he two M2 x4 pan head screws through the filament plate and tighten securely Do not over tighten 3 Re fit each barrel connector in the same orientation as removed sliding each barrel connector over th...

Страница 35: ...ead screws The electrical connections are made via two barrel connectors one to each filament see Fig 1 3 Hold the barrel connectors highlighted in orange firmly with your pliers and slacken the screw...

Страница 36: ...ure situation in your vacuum system With the filaments removed you have a clear view of the source cage The signs to look for are powdery deposits which will vary in colour but may be brown blue canar...

Страница 37: ...been loosely fitted check the alignment of both filament plates before tightening securely 4 Re fit each barrel connector in the same orientation as removed sliding each barrel connector over the conn...

Страница 38: ...g cylinder with sufficient iso propyl alcohol to cover the ion source only Note the measuring cylinder should be of a diameter and length to accommodate the analyser Put the measuring cylinder into th...

Страница 39: ...mmeter Clean container in which to put small parts Pen and paper on which to make notes and sketches 1 Remove the analyser from the vacuum system place it on the bench in an upright position holding t...

Страница 40: ...MKS Instruments UK Ltd Microvision2 Hardware Manual SP101015 102 August 2010 40 Open Ion source Fig 1 Fig 2 Fig 3 Fig 4...

Страница 41: ...to ensure that no shorts are introduced and that the analyser is kept clean The orientation of the ion source is by the small notch on the mounting base This notch is positioned so that it sits over...

Страница 42: ...small parts Pen and paper on which to make notes and sketches 1 Remove the analyser from the vacuum system place it on the bench in an upright position holding the analyser in a small bench vice or a...

Страница 43: ...MKS Instruments UK Ltd Microvision2 Hardware Manual SP101015 102 August 2010 43 PVD CVD Ion source Fig 1 Fig 2 Fig 2a...

Страница 44: ...ensure that no shorts are introduced and that the analyser is kept clean The orientation of the ion source is by the small notch on the mounting base This notch is positioned so that it sits over the...

Страница 45: ...fied as it is the only pin with a metalized contact running through it The pins are numbered clockwise from this pin Pin Descriptions Pin Connection 1 Earth 2 Source plate 3 Electron Multiplier 4 Fila...

Страница 46: ...e supplied complete with filaments Filaments Ion source type Tungsten Thoriated Iridium Open and UHV 842 023 842 024 PVD 842 060 842 002 Ion source Filter type Ion source type Tungsten Thoriated Iridi...

Страница 47: ...s the serial numbers date of purchase and a fault description Fill in the relevant sections of the Health and Safety Returns Form below or we can provide you with a copy This form MUST accompany the i...

Страница 48: ...MKS Instruments UK Ltd Microvision2 Hardware Manual SP101015 102 August 2010 48...

Страница 49: ...s information before we receive the equipment A copy should also be given to the carrier FAILURE TO COMPLETE THIS FORM OR COMPLY WITH THE PROCEDURE WILL LEAD TO DELAYS IN SERVICING THE EQUIPMENT Our R...

Страница 50: ...stances Action to be taken in the event of human contact or spillage I hereby confirm that the only toxic or hazardous substances that the equipment specified above has been in contact with are named...

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