MKS Instruments UK Ltd
Microvision2 Hardware Manual – SP101015.102 August 2010
18
5.3 Installing the analyser
The vacuum chamber in which you intend to mount the analyser must have a 2 .75 inch UHV Conflat®
flange fitted with a tube of 35.0mm (1.378 ") minimum ID, inclusive of a good welded joint.
The distance from the end of the analyser to its mounting flange depends on the type of system. Refer to
the analyser dimensions given on Page 6.
There must be at least the distances stated free of obstructions inside the vacuum chamber. If your
chamber does not meet the above criteria, you should use a specially designed adapter so that the
analyser may be mounted outside the chamber. Please contact your local MKS representative for
assistance.
5.4 Checking the system pressure
Quadrupole analysers cannot be operated at pressures higher than 5 x 10
-4
Torr and in the case of dual
detector analysers (faraday and electron multiplier detectors), the multiplier should not be used at
pressures above 7.6 x 10
-6
Torr.
Operation above these limits will cause irreversible damage to the filaments and possibly the ion source.
Permanent damage to the multiplier will be caused if it is used outside the above ranges.
Make use of the X-Trip interlock to prevent accidental damage to the analyser.