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Chapter Two:  Installation

Setup

13

Setup

Follow the guidelines listed below when setting up an 1100 Series MFC:

1. Place the 1100 Series MFC where it will be connected to a gas supply and process

chamber.

2. Mount the MFC into position.

Mounting of flow components in other than the position in which they are calibrated
(typically horizontal) will cause a small zero shift.  The zero offset can be removed
according to the instructions in Warm Up and Start Up, page 25.

3. Install the MFC in the gas stream such that the flow will be in the direction of the arrow

on the side of the controller's base.

4. Be sure to allow clearance for the cable connector and tubing:

Straight Shielded connectors require approximately 3” (76.2 mm) height.

Right Angle connectors require approximately 2” (50.8 mm) height.

5. Be sure to allow access to the zero potentiometer.

Refer to Figure 6, page 18, for the location of the zero potentiometer.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

Содержание Mass-Flo 1159B

Страница 1: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

Страница 2: ...B 2159B 1160B 2160B 1162B 2162B 1163B 2163B Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 508 975 2350 Fax 508 975 0093 E mail mks mksinst com Web site http www mksinst com Artisan Technolog...

Страница 3: ...Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 4: ...tute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which is asserted to be defective by th...

Страница 5: ...111155 P1 Rev K 10 96 MKS Mass Flo Controller Types 1159B 2159B 1160B 2160B 1162B 2162B 1163B 2163B Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 6: ...of MKS Instruments Inc Andover MA Cajon VCR and VCO are registered trademarks of Cajon Company Macedonia OH Kalrez and Viton are registered trademarks of DuPont de Nemours E I Co Inc Wilmington DE Ne...

Страница 7: ...Setup 13 Mounting an MFC 14 Mounting an MFC Configured with a NUPRO Valve 14 Gas Line Connections 15 How To Install a Swagelok Fitting 15 Chapter Three Overview 17 General 17 NUPRO Positive Shut off V...

Страница 8: ...Determine the Flow Controller Range 32 How To Read the Flow Output Directly 33 Chapter Six Maintenance 35 Valve Adjustment 35 Repair 36 Chapter Seven Troubleshooting 37 Appendix A Product Specificatio...

Страница 9: ...ng Holes 14 Figure 4 Aluminum Mounting Plate Holes 14 Figure 5 Standard Compression Fitting 15 Figure 6 Dimensions 18 Figure 7 NUPRO Valve Dimensions 18 Figure 8 Wiring Diagram for an Input Divider 33...

Страница 10: ...List of Figures and Tables vi Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 11: ...DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT Do not install substitute parts or perform any unauthorized modification to the instrument Return the instrument to an MKS Calibration and Service Center...

Страница 12: ...e operated at pressures higher than the rated maximum pressure refer to the product specifications for the maximum allowable pressure INSTALL A SUITABLE BURST DISC When operating from a pressurized ga...

Страница 13: ...njury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to could result in damage to...

Страница 14: ...Safety Procedures and Precautions 4 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 15: ...urement technique U S Patent Nos 4464932 4679585 Foreign Patents Patents Pending each instrument is a laminar flow device whose precise indication of mass flow is achieved through the use of a range c...

Страница 16: ...al dimensions and electrical pinouts of the instruments It also includes information about the NUPRO valve interface cables and the control valve Chapter Four Operation explains how to start up and op...

Страница 17: ...obtain information about companion products MKS offers contact any authorized MKS Calibration and Service Center If it is necessary to return the instrument to MKS please obtain an ERA Number Equipme...

Страница 18: ...Customer Support Chapter One General Information 8 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 19: ...of the back cover of this manual for a list of MKS Calibration and Service Centers Unpacking Checklist Standard Equipment Type 1100 Series MFC unit Refer to Introduction page 5 for a description of th...

Страница 20: ...r input required is 15 VDC 5 300 mA A The maximum voltage current at startup is 15 VDC 5 300 mA B The typical steady state voltage current should be 15 VDC 180 mA 4 The warm up time is 30 minutes for...

Страница 21: ...the connector s must make good contact to the device s case ground Good contact is about 0 01 ohms and the ground should surround all wires Contact to ground at just one point may not suffice 4 For sh...

Страница 22: ...Metal Cable Clamp For Physical Strain Relief Figure 1 Preferred Method To Connect a Shielded Cable Example 2 Alternate Method To Connect Cable shown on a transducer Transducer Overall Insulation if pr...

Страница 23: ...ccording to the instructions in Warm Up and Start Up page 25 3 Install the MFC in the gas stream such that the flow will be in the direction of the arrow on the side of the controller s base 4 Be sure...

Страница 24: ...clude a positive shut off NUPRO 4BN Valve in their configurations Each assembly is attached to an aluminum plate and is intended to be mounted horizontally Vertical mounting is acceptable but a correc...

Страница 25: ...ee of axial scratches 2 Insert the tubing through the compression nut and ferrules all the way to the shoulder Figure 5 shows the components in a standard compression fitting Nut Back Ferrule Shoulder...

Страница 26: ...Gas Line Connections Chapter Two Installation 16 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 27: ...MFC 1100 Series instruments offer a choice of either normally closed or normally open versions as well as a choice of either a Type D or a recessed P C card edge connection The MFC 1100 Series instrum...

Страница 28: ...gelok 4 44 112 8 mm Figure 6 Dimensions 0 928 0 010 9 16 18 UNF 2B outlet 5 16 24 UNF 2B inlet 10 32 air vent 1 8 NPT Female air inlet 0 500 0 015 1 0 0 015 1 25 0 03 31 8 0 7 mm 2 38 0 03 60 5 0 7 mm...

Страница 29: ...s the ports of 3x10 8 sccm He and a leak rate of less than 1x10 9 sccm He to the outside The following configurations are available Type 2159 An MFC Type 1159 configured with a NUPRO BN positive shut...

Страница 30: ...ds are not CE Mark compliant Note 1 Metal braided shielded cables are required to meet CE Mark specifications 2 To order metal braided shielded cables add an S after the cable type designation For exa...

Страница 31: ...nector Pinout Pin Assignment Pin Assignment 1 MKS Test Point 9 No Connection 2 Flow Signal Output 10 Optional Input 3 Valve Close 11 Signal Common 4 Valve Open 12 Signal Common 5 Power Common 13 No Co...

Страница 32: ...KS Test Point No Connection 9 K No Connection Signal Ground 10 L Valve Close Table 2 P C Edge Card Connector Pinout Note 1 Pins 1 through 10 are located on one side of the gold finger connection and p...

Страница 33: ...control current is used to lift the armature from the seat allowing a controlled flow of gas In MFCs with normally open valves 1162 1163 2162 and 2163 the control current is used to pull the armature...

Страница 34: ...Control Valve Chapter Three Overview 24 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 35: ...When power is first applied the output signal jumps to 7 5 VDC You can monitor the flow output signal as the heaters stabilize and the output approaches zero After being powered for a minute or so th...

Страница 36: ...ay occur momentarily while the gas pressure equalizes across the flow controller 2 Turn the Zero pot located on the input side of the flow controller until the readout displays zero Refer to Figure 6...

Страница 37: ...meter purges at a rate of flow that is somewhat less than the full scale range of the controller Adjusting the Speed to Set Point The 1100 Series MFC instruments are equipped with a circuit that prov...

Страница 38: ...NUPRO BN Shutoff Valve Chapter Four Operation 28 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 39: ...s are established such that a voltage change on the sensor winding is a linear function of a flow change This signal is then amplified to provide a 0 to 5 VDC output Improved response times compared t...

Страница 40: ...e set point is below the flow signal negative in relation to the flow signal the valve closes Most controllers use an integral mode which means that the longer the error endures the more the valve ope...

Страница 41: ...d Cp x x x where GCFx Gas Correction Factor for gas X dx Standard Density of gas X g l at 0 C and 760 mmHg Cpx Specific Heat of gas X cal g C 0 3106 Density of nitrogen Specific Heat of nitrogen S Mo...

Страница 42: ...in the following formula GCF of N2 GCF of Ar x Desired flow rate of Ar where x is the flow rate of nitrogen sccm 1 00 1 39 x 250 sccm Ar x 180 sccm N2 A flow rate of 250 sccm of Ar will produce a flo...

Страница 43: ...o read the flow signal directly Using the values from the example above and assuming a 1 Volt F S readout the flow signal must be divided 2 44 to 1 00 Volts 2 44 V 10 K 1 00 V 100 sccm 14 4 K Use 1 RN...

Страница 44: ...How To Read the Flow Output Directly Chapter Five Theory of Operation 34 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 45: ...he factory prior to shipment using a Helium Mass Spectrometer to assure a leak integrity of 10 5 scc sec He If leak checked using a MFC valve adjustment bench test as described below with no set point...

Страница 46: ...f 5 VDC to give 100 of F S The voltage level at pin J pin 1 Type D connector should be between 0 and 5 0 VDC during control Repair Contact any authorized MKS Sales Office or Calibration and Service Ce...

Страница 47: ...oning Valve incorrectly adjusted Disconnect valve override Return for service Return for service Unit produces large pressure drop or will not pass full flow Clogged sensor tube and or bypass Return f...

Страница 48: ...Chapter Seven Troubleshooting 38 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 49: ...dg Resolution measurement 0 1 of F S Temperature Coefficients Zero Span 0 05 of F S C 500 ppm 6 0 10 of Rdg C 1000 ppm Warm up Time 30 minutes7 Due to continuing research and development activities th...

Страница 50: ...ecifications Dimensions Body length less fittings VCR mating face to face 5 30 H x 3 00 L x 1 45 W8 134 6 mm x 76 2 mm x 36 8 mm 5 30 H x 4 88 L x 1 45 W 134 6 mm x 76 2 mm x 36 8 mm Fittings Standard...

Страница 51: ...1144 1 964 1 250 6 86 3 926 3 163 0 701 1 00 0 31 0 42 0 86 Chlorodifluoromethane Freon 22 Chloropentafluoroethane Freon 115 Chlorotrifluoromethane Freon 13 Cyanogen Deuterium CHClF2 C2 ClF5 CClF3 C2...

Страница 52: ...29 5 395 4 660 0 98 0 50 0 33 0 35 0 38 Freon 13 B1 Freon 14 Freon 21 Freon 22 Freon 23 CBrF3 CF4 CHCl2 F CHClF2 CHF3 0 1113 0 1654 0 140 0 1544 0 176 6 644 3 926 4 592 3 858 3 127 0 37 0 42 0 42 0 46...

Страница 53: ...ide Nitrogen Trifluoride Nitrous Oxide Octafluorocyclobutane Freon C318 Oxygen NO2 NF3 N2 O C4 F8 O2 0 1933 0 1797 0 2088 0 185 0 2193 2 052 3 168 1 964 8 937 1 427 0 16 0 48 0 71 0 17 1 00 Pentane Pe...

Страница 54: ...afluoride Xenon SF6 CCl3 F SiHCl3 CCl2 FCClF2 or C2 Cl3 F3 WF6 Xe 0 1592 0 1357 0 1380 0 161 0 0810 0 0378 6 516 6 129 6 043 8 360 13 28 5 858 0 26 0 33 0 33 0 20 0 25 1 32 1Empirically defined 2Consu...

Страница 55: ...eak rate 19 M Manual organization 6 Measurement 29 Messages definitions of 3 Mounting 14 N Normally closed valves 5 17 Normally open valves 5 17 NUPRO valve 5 17 19 27 O Operation 25 R Readout 33 Repa...

Страница 56: ...Index 46 Valve override 27 Z Zero 18 26 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com...

Страница 57: ...service in house repair center WE BUY USED EQUIPMENT Sell your excess underutilized and idle used equipment We also offer credit for buy backs and trade ins www artisantg com WeBuyEquipment REMOTE IN...

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