MKS Granville-Phillips 203 Series, Инструкция по эксплуатации

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Certification
8
Series 203 Variable Leak Valve Installation and Operating Instructions
11 Certification
MKS/Granville-Phillips certifies that this product met its published
specifications at the time of shipment from the factory.
12 Limited Warranty
This Granville-Phillips product is warranted against defects in materials and
workmanship for one year from the date of shipment provided the
installation and preventive maintenance procedures specified in this
instruction manual have been followed. Granville-Phillips Company will, at
its option, repair or replace or refund the selling price of an item which
proves to be defective during the warranty period provided the item is
returned to Granville-Phillips Company together with a written statement of
the problem.
13 Specifications
Materials
Seal Pure silver
All other interior surfaces
304 Stainless Steel
Physical Data
Bakeout temperature
450 ° C, bakeout clamp attached
70 ° C valve open or closed driver installed
Seal deformation vs. number of closures
Negligible
Increase in closing torque vs. number of
closures
Negligible
Flow path, flange to flange, when fully open 168 mm (6.62 in)
Maximum conductance for dry nitrogen at
25 ° C
400 cc/sec.
Leakage conductance when fully closed
10 –11 liters/sec.
Normal closing torque 50 inch-ounces
Standard connections
Type 304 Stainless Steel, Rotatable CuSeal or
Mini-CuSeal flanges
Maximum Inlet Pressure
Connection type
Port A Port B
CuSeal or Mini-CuSeal flange
25 psig 200 psig
Type 304 SS tubulation (welded to system) 25 psig 200 psig