8BChapter Five: Maintenance and Troubleshooting
78BGeneral Information
83
Chapter Five: Maintenance and Troubleshooting
General Information
In general, the DMA transducer requires no maintenance other than proper installation and
operation, and an occasional zero adjustment. If the transducer fails to operate properly upon
receipt, check for shipping damage and check the cables for correct continuity. Immediately
report any damage to the carrier and MKS Instruments.
If there is no obvious damage and the cable continuity is correct, check your instrument using the
Troubleshooting Chart
(Table 50, page 84). If the transducer performance does not improve and
it is necessary to return the unit to MKS for service, obtain an ERA Number (Equipment Return
Authorization Number) from any MKS Calibration and Service Center (listed on the inside back
cover of this manual) before shipping.
Maintenance
Zero Adjustment
All pressure transducers require initial and periodic zero adjustments. Prior to initial operation and
during periodic maintenance you must check the transducer zero to verify the proper output.
The transducer’s pressure signal can be zeroed by manually pressing the OneTouch Zero Push
Button on the top of the DMA unit (Figure 5, page 38). The unit’s zero can also be adjusted with
the Coarse Zero Adjustment Service in the S-Analog Sensor Object (refer to
Reporting the
Pressure Value
, page 31).
Refer to
Adjusting the Zero
, page 32, for complete instructions on adjusting the transducer zeros.
Note
In production operations such as semiconductor manufacturing, verify the
transducer zero (and adjust if necessary) each time the equipment is shut down for
routine maintenance.
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