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MKS Baratron 722B, Инструкция по эксплуатации

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Sicherheitshinweise für den Druckmeßumformer 

UIn dieser Betriebsanleitung vorkommende Symbole

 

13 

Sicherheitshinweise für den Druckmeßumformer 

In dieser Betriebsanleitung vorkommende Symbole 

Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in 
dieser Betriebsanleitung. 

 

Warnung!

 

Das Symbol WARNUNG! weist auf eine Gefahr für das 
Bedienpersonal hin. Es macht auf einen Arbeitsablauf, eine 
Arbeitsweise, einen Zustand oder eine sonstige Gegebenheit 
aufmerksam, deren unsachgemäße Ausführung bzw. 
ungenügende Berücksichtigung zu Verletzungen führen kann.

 

Vorsicht!

 

Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es 
macht auf einen Bedienungsablauf, eine Arbeitsweise oder eine 
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung 
bzw. ungenügende Berücksichtigung zu einer Beschädigung oder 
Zerstörung des Gerätes oder von Teilen des Gerätes führen kann.

 

 

Hinweis

 

Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines 
Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige 
Gegebenheit aufmerksam. 

Содержание Baratron 722B

Страница 1: ...1034138 001 Revision A 5 09 MKS Baratron Type 722B Absolute Pressure Transducer...

Страница 2: ...ding photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Baratron is a registered trademark of MKS Instr...

Страница 3: ...teur de pression 17 Symboles utilis s dans ce manuel d utilisation 17 Symboles apparaissant sur l unit 18 Mesures de s curit et pr cautions 19 Medidas de seguridad del transductor de presi n 21 S mbol...

Страница 4: ...cer 56 Span Adjustment 57 Chapter Three Overview 59 General Information 59 Sensor 59 Signal Conditioning Electronics 60 Label 60 Chapter Four Operation 61 General 61 Lowest Suggested Pressure Availabl...

Страница 5: ...Table of Contents NW 16 KF Fitting Information 69 Index 71 v...

Страница 6: ......

Страница 7: ...k Example 1 55 Figure 9 How To Connect the Cable to a Terminal Block Example 2 55 Figure 10 Product Label 60 Tables Table 1 Definition of Symbols Found on the Unit 10 Tabelle 2 Bedeutung der am Ger t...

Страница 8: ...List of Figures and Tables viii...

Страница 9: ...o a procedure practice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attentio...

Страница 10: ...earth ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current I...

Страница 11: ...CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessary...

Страница 12: ...prevent system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt lint glass...

Страница 13: ...ustand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ge...

Страница 14: ...eranschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg...

Страница 15: ...g nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal V...

Страница 16: ...ignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr aufgr...

Страница 17: ...te autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l appareil El...

Страница 18: ...7 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternat...

Страница 19: ...iquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise des mesures de p...

Страница 20: ...chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants p...

Страница 21: ...nales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilid...

Страница 22: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente con...

Страница 23: ...N SER EFECTUADAS NICAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o...

Страница 24: ...llar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de v...

Страница 25: ...liance with the EMC Directive 2004 108 EEC The 722B transducer is available with a selection of options Range 1 Torr through 25 000 Torr 0 2 psia through 500 psia Fittings tube 4 VCR 8 VCR 8 VCO Mini...

Страница 26: ...afety Information Symbols Used in This Instruction Manual Definitions of WARNING CAUTION and NOTE messages used throughout the manual Warning The WARNING sign denotes a hazard to personnel It calls at...

Страница 27: ...th ground IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 4...

Страница 28: ...TION WHEN OPERATING WITH HAZARDOUS MATERIALS If hazardous materials are used users must take responsibility to observe the proper safety precautions completely purge the instrument when necessary and...

Страница 29: ...event system explosion should the system pressure rise KEEP THE UNIT FREE OF CONTAMINANTS Do not allow contaminants to enter the unit before or during use Contamination such as dust dirt lint glass ch...

Страница 30: ...ustand oder eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ge...

Страница 31: ...eranschlu IEC 417 No 5019 Masseanschlu IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Gleich oder Wechselstrom IEC 417 No 5033 a Durchg...

Страница 32: ...g nur durch qualifizierte Fachleute Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten Fachleuten durchgef hrt werden niemals vom Bedienpersonal V...

Страница 33: ...ignete Berstscheibe installieren Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird sollte eine geeignete Berstscheibe in das Vakuumsystem installiert werden um eine Explosionsgefahr aufgr...

Страница 34: ...te autre situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l appareil El...

Страница 35: ...7 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et alternat...

Страница 36: ...iquement effectu par du personnel qualifi PR CAUTION EN CAS D UTILISATION AVEC DES PRODUITS DANGEREUX Si des produits dangereux sont utilis s l utilisateur est responsable de la prise des mesures de p...

Страница 37: ...chappement adapt dans le syst me vide afin d viter une explosion du syst me en cas d augmentation de la pression MAINTIEN DE L UNIT L ABRI DES CONTAMINATIONS Ne pas laisser des produits contaminants p...

Страница 38: ...nales Pone de relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilid...

Страница 39: ...tierra IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente con...

Страница 40: ...N SER EFECTUADAS NICAMENTE POR T CNICOS AUTORIZADOS Los operarios no deben intentar reemplazar los componentes o realizar tareas de ajuste en el interior del instrumento Las tareas de mantenimiento o...

Страница 41: ...llar la presi n m xima permitida INSTALE UNA C PSULA DE SEGURIDAD ADECUADA Cuando el instrumento funcione con una fuente de gas presurizado instale una c psula de seguridad adecuada en el sistema de v...

Страница 42: ...escribes the model code Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers listed on the back cover In addition MKS acce...

Страница 43: ...lease refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers Caution Only qualified individuals should perform the installation and any user adjustments...

Страница 44: ...ements include sufficient air circulation Dimensions Note All dimensions are listed in inches with millimeters referenced in parentheses The dimensions of the 722B transducer vary depending upon the f...

Страница 45: ...ccess From This Side Wire Entry 28 AWG to 14 AWG 0 54 13 7 Max 6 00 152 Figure 1 Dimensions of the Low Pressure up to 1000 Torr Type 722B Transducer 0 76 19 2 0 049 1 2 0 50 12 7 Dia Tube 0 86 21 7 NW...

Страница 46: ...5 Pin Type D Connector Figure 3 Dimensions of the High Pressure 1000 to 25 000 Torr Type 722B Transducer 1 07 27 1 0 75 19 1 0 049 1 2 0 50 12 7 Dia 1000 Torr 19 3 PSI Max Tube 1 17 29 6 NW 16 KF 1200...

Страница 47: ...of the unit must point upwards as shown in Figure Error Bookmark not defined Do not install the unit with the cylindrical end of the unit pointing downward because particulate impurities may accumulat...

Страница 48: ...e proceeding to Setup page 47 carefully check all plumbing connections to the instrument to ensure a leak tight installation Making Mechanical Connections To make mechanical connections in line to a s...

Страница 49: ...tion Pinout of the 9 Pin Type D Connector Pin Assignment 1 Pressure Output 2 No Connection 3 No Connection 4 Power Input 5 No Connection 6 No Connection 7 No Connection 8 Pressure Return 9 Power Retur...

Страница 50: ...Pressure Output 3 No Connection 4 No Connection 5 Power Return 6 No Connection 7 Power Input 8 No Connection 9 No Connection 10 No Connection 11 No Connection 12 Pressure Return 13 No Connection 14 No...

Страница 51: ...ect cable to use to connect the 9 pin Type D connector to the PDR C and PDR D readout is a CB700 2 cable This cable has the mating Type D connector on the transducer end and flying leads on the PDR C...

Страница 52: ...system Readout Power Supply 0 to 10 V Pressure Output Pressure Return Power Return 10K Note 2 The absolute value of the potential difference between the chassis ground and signal common power ground...

Страница 53: ...meet these requirements are identified by application of the CE Mark Note Metal braided shielded cables are required to meet CE Mark specifications Interface Cables Transducer Connector MKS Power Supp...

Страница 54: ...h flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length Refer to Figures 2 and 3 page 55 A inch pie...

Страница 55: ...ansducer Overall Insulation if present Bare Metal Cable Clamp Making Firm Contact To Braid Braid Here Is Desirable but not usually necessary Keep Wires and Braid Flat Against Case Metal Cable Clamp Sc...

Страница 56: ...led in your system Zeroing a transducer at a pressure above its stated minimum resolution creates a zero offset relative to true absolute pressure All subsequent readings are then linear and accurate...

Страница 57: ...00 Torr 5 x 10 2 Torr 30 psia 1 x 10 3 psia 100 psia 5 x 10 3 psia 500 psia 2 x 10 2 psia Table 10 Highest Pressure for Proper Zero Adjustment Span Adjustment The span setting may require adjustment p...

Страница 58: ...This page intentionally left blank 58...

Страница 59: ...r in the transducer body One wall of this chamber is a metal diaphragm The front side of the diaphragm is exposed to the gas whose pressure is to be measured The back or reference side of the diaphrag...

Страница 60: ...face mount technology The output is either a DC voltage or mA current which is linear with pressure The transducer is then calibrated against a transfer standard to provide the selected output over th...

Страница 61: ...Suggested Pressure to Use for Control The pressures listed in the last column of Table 7 are for reference and represent the pressure reading of the transducer at 50 mV signal output A DC signal of at...

Страница 62: ...This page intentionally left blank 62...

Страница 63: ...tions while installing and adjusting the instrument Proper handling is essential when working with all highly sensitive precision electronic instruments In production operations verify the transducer...

Страница 64: ...ucer Replace if necessary Measurement slowly goes positive over time Overpressure and or a build up of contamination in the Px cavity Return to MKS for servicing or transducer replacement Unstable zer...

Страница 65: ...Ambient Operating Temperature Range 0 to 50 C 32 to 122 F 15 to 40 C 59 to 104 F 1 2 Torr only Burst Pressure 10 times full scale or 100 psi whichever is greater Fittings inch Tube 4 VCR female 8 VCR...

Страница 66: ...part number for the overpressure ring is HPS 100316301 Electrical Specifications Input Required 0 to 5 Volt output 0 to 10 Volt output 10 8 VDC to 32 VDC regulated if below 13 VDC 10 mA max 13 VDC to...

Страница 67: ...options of your transducer are identified in the model code when you order the unit The model code is identified as follows 722BXXXYYZF where Type Number 722B This designates the model number of the...

Страница 68: ...4T 25 000 RCT must include a fitting Fittings YY Six types of fittings are available designated by a two letter code Ordering Code 4 VCR Type Female CD 0 tube weld stub BA 8 VCR Type Female CE 8 VCO T...

Страница 69: ...range greater than 1200 Torr 23 psi require an HPS overpressure ring Operating the unit without a protective overpressure ring may result in injury The HPS part number for the overpressure ring is HP...

Страница 70: ...This page intentionally left blank 70...

Страница 71: ...26 Model code 51 Mounting 31 O Options 25 Orientation 31 40 P Pinout 5 pin terminal block 33 9 pin Type 33 Power 52 Pressure limit 49 Pressure lowest for control 45 Pressure lowest reading 45 R Range...

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