MKS 252A-1-VPO Скачать руководство пользователя страница 3 | Manualshive

Страница: 3 / 55

MKS 252A-1-VPO Скачать руководство пользователя страница 3

Preliminary manual for the

MKS Type 252D Unit

This is a preliminary manual and MKS Instruments makes no claims as to
its accuracy or correctness. Due to continuing research and development
activities, the information contained within this manual, including product
specifications, is subject to change without notice. Please observe all
safety precautions and use appropriate procedures when handling and
operating the Type 252D Unit.

Copyright © 1996 by MKS Instruments, Inc.

All rights reserved. No part of this work may be reproduced or transmitted in any form or by any
means, electronic or mechanical, including photocopying and recording, or by any information
storage or retrieval system, except as may be expressly permitted in writing by MKS Instruments,
Inc.

Baratron



is a registered trademark of MKS Instruments, Inc., Andover, MA

Please Note:

MKS Instruments provides these documents as the latest version for the revision indicated.
The material is subject to change without notice, and should be verified if used in a critical
application.

Artisan Technology Group - Quality Instrumentation ... Guaranteed | (888) 88-SOURCE | www.artisantg.com

«
1
2
3
4
5
...
»

Содержание 252A-1-VPO

Страница 1: ...underutilized and idle equipment along with credit for buybacks and trade ins Custom engineering so your equipment works exactly as you specify Critical and expedited services Leasing Rentals Demos In stock Ready to ship TAR certified secure asset solutions Expert team I Trust guarantee I 100 satisfaction All trademarks brand names and brands appearing herein are the property of their respective o...

Страница 2: ...118703 P1 Rev A 8 96 MKS Type 252D Exhaust Valve Controller Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 3: ...nts Inc All rights reserved No part of this work may be reproduced or transmitted in any form or by any means electronic or mechanical including photocopying and recording or by any information storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Baratron is a registered trademark of MKS Instruments Inc Andover MA Please Note MKS Instruments provides t...

Страница 4: ...ns 12 Interconnections 12 Cables 14 Chapter Three Overview 19 General Information 19 Stepping Drive Motor 20 Front Panel Controls 21 Rear Panel Controls 23 Chapter Four Operation 25 How To Setup the Controller 25 How To Tune Up the Controller 26 How To Use the Normal Reverse Switch 27 How To Use External Control 27 Advisory 28 How To Use the Valve Position Option 29 Interconnections 29 How To Use ...

Страница 5: ...h Option 35 Chapter Five Maintenance and Troubleshooting 37 General Information 37 Maintenance 37 Alignment Procedure 37 Troubleshooting 40 Appendix A Product Specifications 43 Appendix B Model Code Explanation 45 Model Code 45 How To Order a Type 252 Unit 46 Index 47 Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 6: ...t Point Control 33 List of Tables Table 1 Valve Connector Pinout 15 Table 2 Transducer Connector Pinout 16 Table 3 Interface Connector Pinout 17 Table 4 Four Step Sequence 20 Table 5 Valve Position Option Pinout 30 Table 6 Multiple Set Point Option Pinout 32 Table 7 Process Limit Option Pinout 34 Table 8 Test Point Voltages 39 Table 9 Troubleshooting Chart 41 Artisan Technology Group Quality Instr...

Страница 7: ...List of Figures List of Tables vi Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 8: ...unding conductor of the power cord To avoid electrical shock plug the power cord into a properly wired receptacle before connecting it to the product input or output terminals A protective ground connection by way of the grounding conductor in the power cord is essential for safe operation DANGER ARISING FROM LOSS OF GROUND Upon loss of the protective ground connection all accessible conductive pa...

Страница 9: ...our product KEEP AWAY FROM LIVE CIRCUITS Do not replace components with power cable connected Under certain conditions dangerous voltages may exist even with the power cable removed To avoid injuries always disconnect power and discharge circuits before touching them DO NOT OPERATE IN EXPLOSIVE ATMOSPHERES To avoid explosion do not operate this product in an explosive atmosphere unless it has been...

Страница 10: ...injury to personnel Caution The CAUTION sign denotes a hazard It calls attention to an operating procedure practice or the like which if not correctly performed or adhered to could result in damage to or destruction of all or part of the product Note The NOTE sign denotes important information It calls attention to a procedure practice condition or the like which is essential to highlight Artisan ...

Страница 11: ...Safety Procedures and Precautions 4 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 12: ...sor The controller and control valve The system whose pressure is to be controlled The pressure sensor will usually be an MKS Baratron Capacitance Manometer whose output is 0 to 10 VDC Provision for other inputs 0 to 1 VDC or 0 to 100 mV has been built into the controller so that other transducers may be used The pressure vacuum system consists of a chamber and a pumping system Typically users wan...

Страница 13: ...ortional to the rate of change of the error signal For example Signal to valve K2 x d Error K2 is adjustable by the phase pot dt A simple description of this mode of control is that it provides an anticipation element or the valve reaches its proper steady state position sooner than without derivative This is apparent when setting up the system the derivative or phase lead control tailors the unde...

Страница 14: ...cifications lists the specifications of the instrument Appendix B Model Code Explanation describes the instrument s model code and how to order the unit Customer Support Standard maintenance and repair services are available at all of our regional MKS Calibration and Service Centers listed on the back cover In addition MKS accepts the instruments of other manufacturers for recalibration using the ...

Страница 15: ...Customer Support Chapter One General Information 8 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 16: ...e back cover of this manual for a list of MKS Calibration and Service Centers Caution Only qualified individuals should perform the installation and any user adjustments They must comply with all the necessary ESD and handling precautions while installing and adjusting the instrument Proper handling is essential when working with all highly sensitive precision electronic instruments Unpacking Chec...

Страница 17: ...o a Type 220 transducer CB258 1 10 Connects the 252 unit to Type 127 258 358 558 624 626 and 627 transducers CB128 2 10 Connects the 252 unit to Type 128 625 and 628 transducers CB254 17 6 Connects the 252 unit to Type PDR C 1C 2C PDR D 1 and PDR 5B power supply readouts CB120 3 10 Connects the 252 unit to a Type 120 transducer with a separate input power connector Valve Cable CB252 16 10 Connects...

Страница 18: ...e measurement make sure the 270 indicator switch is in the NORMAL position An important consideration is a condition that is peculiar to diffusion pumps called choking If too much gas is introduced at too high a pressure the pumping speed becomes erratic and changes radically This behavior is easily recognized by lack of stability and pneumatic noise sometimes making control impossible Reducing th...

Страница 19: ...ressure transducer should be mounted so that it is firmly supported while at the same time isolated from any vibration Any pressure transducer which delivers at least 0 1 Volt full scale can be used as the feedback element for total pressure control Interconnections Figures 1 and 2 page 13 show typical piping and cable interconnection diagrams Figure 1 shows the usual setup for standard pressure c...

Страница 20: ...llation Setup 13 Figure 1 Standard Pressure Control Setup 690 Figure 2 253 Valve Connected in Parallel with an Isolation Valve Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 21: ... Type 627 transducer use part number CB258 1 10 for a metal braided shielded cable use part number CB258S 1 10 Note The No Connection and Reserved pin assignments are defined as follows 1 The No Connection pin assignment refers to a pin with no internal connection 2 The Reserved pin assignment refers to a pin with an internal connection which may be assigned a function in the future Artisan Techno...

Страница 22: ...nnects the 252D controller to a Type 253B valve CB252 17 1 This adapter cable allows you to replace a Type 252A C controller with the Type 252D controller Valve Connector Pinout Pin Assignment 1 No Connection 2 No Connection 3 Limit switch common 4 Open limit switch 5 Close limit switch 6 No Connection 7 No Connection 8 Winding A 9 Winding A 10 Winding A Common 11 No Connection 12 No Connection 13...

Страница 23: ...ansducer Input Connector Pinout Pin Assignment 1 Pressure Input 2 Reserved 3 Reserved 4 Reserved 5 Reserved 6 Reserved 7 Reserved 8 Input Connect to Analog Ground Pin 12 at Input Source 9 Reserved 10 Reserved 11 15 VDC Output 12 Power Supply Ground Analog Ground 13 15V Output 14 Chassis Table 2 Input Connector Pinout Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www art...

Страница 24: ...Ext Set Point Connect to analog ground Pin 12 at input source 9 Reserved Set Point 3 with Set Point option 10 Reserved Set Point 4 with Set Point option 11 15V Output 12 Power Supply Ground Analog Ground 13 15V Output 14 Chassis Table 3 Interface Connector Pinout Note Since there are a limited number of spare pins on the Interface connector the exact pinout depends on which options are installed 1...

Страница 25: ...Setup Chapter Two Installation 18 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 26: ... controller control valve chamber and pump The pressure transducer converts pressure to an electrical signal which is compared in the controller to the set point in most cases a precision pot whose voltage output is changed by rotating the dial Any error between the actual feedback and required set point signals is amplified by the controller and fed to the valve For example if the pressure is hig...

Страница 27: ...ly for external inputs The 5V is referenced to digital ground and all other supplies are referenced to analog ground There is a 110 ohm resistor and two diodes to keep the analog ground within 6 Volts of the chassis ground The same arrangement is also used between analog ground and digital ground The digital ground can be as much as 12 Volts from chassis ground The unregulated 24 Volt supply is ca...

Страница 28: ...sure or flow on the transducer and the set point at zero adjust the zero pot for zero error on the error meter 5 SPAN Allows precise adjustment of the full scale input voltage Any range can be accurately calibrated for any voltage within its range by applying an accurate full scale voltage turning the set point to full scale and adjusting the SPAN control for zero error For example with a 5 00 Vol...

Страница 29: ...O but will accept external OPEN and CLOSE commands External OPEN or CLOSE commands will not affect the 252 controller unless the mode switch is in the EXT position 10 OPEN CLOSE LIGHTS The OPEN CLOSE LIGHTS indicate when the valve is fully open or fully closed These lights are not used if the Valve Position Meter is installed 11 ERROR METER Meter indication of the difference between the set point ...

Страница 30: ... cable CB252 16 10 to connect the valve and controller Note If you are installing the 252D controller into an existing system that uses the old hex connector cables an adapter cable is required Use adapter cable CB252 17 1 to replace a Type 252A C controller with the Type 252D controller Refer to Table 1 page 15 for the Valve connector pinout 5 INTERFACE This 14 pin Amphenol connector provides acc...

Страница 31: ...Rear Panel Controls Chapter Three Overview 24 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 32: ...n the power cord and turn on the POWER The power LED should light 4 Allow the system to warm up for at least 15 minutes 5 Ensure the chamber pressure is less than the resolution of the transducer and zero the controller by setting the SET POINT at zero fully CCW and adjusting the ZERO control for zero error on the meter Note 1 Temperature controlled transducers such as the 270 690 and 127 or 128 n...

Страница 33: ... change in the set point control and observing the error meter Optimum response is for the error to reduce to zero but with little or no overshoot If the pressure oscillates error swings from positive to negative and back again the GAIN is too high If the pressure overshoots but settles to the proper value more PHASE LEAD is required If the pressure settles to a steady value which is other than th...

Страница 34: ...ition for the 252 controller to accept external inputs Shorting the OPEN input Pin 4 to digital ground Pin 3 will cause the valve to drive toward open and it will continue opening as long as Pins 3 and 4 are connected or until it reaches the fully open position Shorting the CLOSE input Pin 5 to digital ground Pin 3 will cause the valve to drive toward CLOSE and it will continue closing as long as ...

Страница 35: ...erface connector at the signal source end If the Multiple Set Point Option MSO is used refer to How To Use the Multiple Set Point Option page 31 only the internal front panel controls can be used for set point input The controls are set to different pressure settings and then selected with either the front panel switch or remotely To remotely select set points the front panel set point selector mu...

Страница 36: ... and 100 for Open Note If the valve is not against one of the limit switches then the meter and output voltage will go higher than full scale and remain there until either one of the limit switches is contacted The meter and voltage will then track the valve position The VPO operates by counting the pulses used to drive the stepper motor The counter output is converted by resistors to an analog cu...

Страница 37: ...ose 6 Reserved Set Point 1 Set Point 1 PLO N O Relay 7 Analog Ground Set Point 2 Set Point 2 PLO N C Relay 8 Ext Set Point Ext Set Point Ext Set Point Ext Set Point 9 Reserved Set Point 3 Set Point 3 PLO Relay Common 10 VPO 10 V Set Point 4 Set Point 4 VPO 10 V 11 15VDC Supply 15VDC Supply 15VDC Supply 15VDC Supply 12 Power Ground Power Ground Power Ground Power Ground 13 15VDC Supply 15VDC Supply...

Страница 38: ... The dial represents the fraction of full scale range For example if the transducer s full scale pressure is 10 Torr and a set point is set for 0 342 3 42 indicated on the dial then when the set point is selected the controller will maintain a pressure of 3 42 Torr in either S S AUTO or EXT with no overriding commands Each set point pot should be set to a pressure or flow required by the process T...

Страница 39: ...d to the circuit ground of the digital instrument that is selecting the set points Refer to Table 3 page 17 for the complete Interface connector pinout Multiple Set Point Option Pinout Interface Connector Pin Assignment 3 Digital Ground 6 Set Point 1 7 Set Point 2 9 Set Point 3 10 Set Point 4 Table 6 Multiple Set Point Option Pinout Artisan Technology Group Quality Instrumentation Guaranteed 888 8...

Страница 40: ...w Note For some customers the logic output is reversed from that described above within process control gives a high output 5 Volts and out of control gives a low output 0 Volts Controls The process limit set point control is a single turn pot which is non linear to provide greater resolution at the lower percentage settings The approximate settings are shown in Figure 5 P C Board Figure 5 Process...

Страница 41: ...oint 2 8 Ext Set Point 9 PLO Relay Common Set Point 3 10 VPO 10 V Set Point 4 11 15VDC Supply 15VDC Supply 12 Power Ground Power Ground 13 15VDC Supply 15VDC Supply 14 Chassis Ground Chassis Ground Table 7 Process Limit Option Pinout Note 1 The N O relay contact is CLOSED when the error signal is less than the Process Limit Set Point that is everything is normal Relay contacts are rated to switch ...

Страница 42: ...nals from the limit switches The RLSO P C board is installed inside the 252 controller where the valve cable plugs into the main P C board No external adjustments are needed The standard VALVE connector on the rear panel is used with the same pin assignments as the standard unit refer to Table 1 page 15 for the Valve connector pinout Note that if no cable or valve is connected to the unit both the...

Страница 43: ...How To Use the Reverse Limit Switch Option Chapter Four Operation 36 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 44: ...hipping Please refer to the inside back cover of this manual for a list of MKS Calibration and Service Centers Maintenance Alignment Procedure The following alignment procedure should be followed to verify the zero and full scale alignment of the 252 controller Allow the controller to warm up for at least 30 minutes with the 253 valve attached before starting the alignment Note that the P C board ...

Страница 45: ...PANEL Set Point Pot CCW 000 Set Point Int Ext INT Range 10V Phase Lead CCW Gain CW Mode Manual pointing toward toggle switch Open Close Centered INSIDE NORmal REVerse Normal toward F P REAR PANEL 115 230 As available 4 Verify that the A C supply is either 115 15 or 230 15 Volts A C 5 Check the voltage at the test points listed in Table 8 page 39 and readjust the appropriate control if necessary Ar...

Страница 46: ...Zero R32 Input 0 Set point 0 TPB 6 0 000 D A Zero R39 Input 0 Set point 0 TPB 5 0 000 Meter Zero R49 Input 0 Set point 0 TPB 3 0 000 Lead Zero R46 Input 0 Set point 0 TPB 4 0 000 Gain Zero R64 Input 10 000V TPB 8 5 000 002 SPAN R17 Set point 1000 TPB 7 5 000 002 Set point Adjust R20 TPB 8 TPB 5 000 TPB 6 0 000 Diff Amp Cal R36 Table 8 Test Point Voltages Artisan Technology Group Quality Instrument...

Страница 47: ...trol settings FRONT PANEL Power ON Power light should be on Set Point Switch on INT Control at proper level Input Select As required normally 10V Phase As required normally 1 to 5 sec Gain As required normally 100 Mode AUTO or EXT INSIDE Nor Rev NORMAL REAR PANEL 115 230 As required by AC power supply 3 Determine the probable cause from the Troubleshooting Chart refer to Table 9 page 41 Artisan Te...

Страница 48: ...h inside is set correctly usually NORMAL d Check if motor can be moved in Manual Refer to Motor Symptoms below Motor runs but valve flapper does not move a Set screws are loose in adapter between transmission and valve b Either arm or gear inside transmission box is loose c Stepping motor gear box gears loose or stripped Motor runs and valve flapper moves a Inability to control due to problems in ...

Страница 49: ...Troubleshooting Chapter Five Maintenance and Troubleshooting 42 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 50: ...nel Operating Temperature 0 to 40 C 32 to 104 F Output Power and 15 0 6 VDC 250 mA maximum each Power Requirements Input Power Line Voltage 40 Watts 90 VAC 60 Hz minimum 70 Watts 132 VAC 50 Hz maximum 90 to 132 VAC 50 60 Hz or 198 to 264 VAC 50 60 Hz Regulation 0 25 of full scale maximum Repeatability 0 1 of full scale maximum Valve Output Built in driver to power the 253 Control Valve 24 Volts at...

Страница 51: ...Appendix A Product Specifications 44 This page intentionally left blank Artisan Technology Group Quality Instrumentation Guaranteed 888 88 SOURCE www artisantg com ...

Страница 52: ...int Controls Type Number This designates the model number of the instrument The controller is identified as the Type 252D Number of Set Point Controls X Three types of set point control multiple set point option are available designated by a single number code Ordering Code Standard single set point control 1 Optional three set point controls 3 Optional four set point controls 4 Artisan Technology...

Страница 53: ...er the Type 252 controller with one set point and no options the product code is 252D 1 To order the Type 252 controller with four set point control and the PLO option the product code is 250D 4 PLO To order the Type 252 controller with four set point control the valve position option and the process limit option the product code is 250D 4 VPO PLO Artisan Technology Group Quality Instrumentation G...

Страница 54: ...normal reverse switch 27 process limit option 33 reverse limit switch option 35 set point control 28 tune up 26 valve position option 29 P Power requirements 11 R Returning the product 7 9 S Safety procedures and precautions 1 Set point control 28 Setup interconnections 12 mounting 12 system design 11 transducers 12 valve installation 12 Span adjustment 21 Specifications 43 T Troubleshooting 40 Ar...

Страница 55: ...quipment Have surplus equipment taking up shelf space We ll give it a new home Learn more Visit us at artisantg com for more info on price quotes drivers technical specifications manuals and documentation Artisan Scientific Corporation dba Artisan Technology Group is not an affiliate representative or authorized distributor for any manufacturer listed herein We re here to make your life easier How...

Отзывы:

Нет отзывов