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115714-P1

Rev D, 3/99

Instruction Manual

MKS Type 153D and 1253D

Throttle Valve

Controllers

Six Shattuck Road
Andover, MA 01810-2449
(800) 227-8766 or (978) 975-2350

Fax: (978) 975-0093

E-mail: [email protected]

Web site: http://www.mksinst.com

Содержание 1253D

Страница 1: ...3 99 Instruction Manual MKS Type 153D and 1253D Throttle Valve Controllers Six Shattuck Road Andover MA 01810 2449 800 227 8766 or 978 975 2350 Fax 978 975 0093 E mail mks mksinst com Web site http w...

Страница 2: ...chaser The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty The purchaser before returning any equipment covered by this warranty which...

Страница 3: ...115714 P1 Rev D 3 99 MKS Type 153D and 1253D Throttle Valve Controllers...

Страница 4: ...n storage or retrieval system except as may be expressly permitted in writing by MKS Instruments Inc Printed in the United States of America Cluster Gauge is a trademark of MKS Instruments Inc Firmwar...

Страница 5: ...9 Erkl rung der am Ger t angebrachten Symbole 10 Sicherheitsvorschriften und Vorsichtsma nahmen 11 Medidas de seguridad de la v lvula 13 S mbolos usados en este manual de instrucciones 13 S mbolos ha...

Страница 6: ...nual Switch 31 HOLD NORMAL Switch 31 External Connectors and Controls on the 1253 Unit 32 J3 Connector VALVE Connector 32 Manual Switch 33 Internal Controls on the 153 1253 Controller 34 Factory Setti...

Страница 7: ...table Terminal PT 1 Protocol 51 New Set Point Syntax 52 How To Connect the 153 1253 to the Type 146 Cluster Gauge 52 Chapter Five Maintenance 53 General Information 53 How To Clean the Unit 53 Appendi...

Страница 8: ...Table of Contents vi...

Страница 9: ...inition des symboles apparaissant sur l unit 6 Tabelle 3 Bedeutung der am Ger t angebrachten Symbole 10 Tabla 4 Definici n de los s mbolos hallados en la unidad 14 Table 5 Interface Cables 20 Table 6...

Страница 10: ...List of Figures and Tables viii...

Страница 11: ...ractice condition or the like which if not correctly performed or adhered to could result in injury to personnel Caution The CAUTION sign denotes a hazard to equipment It calls attention to an operati...

Страница 12: ...ound IEC 417 No 5019 Frame or chassis IEC 417 No 5020 Equipotentiality IEC 417 No 5021 Direct current IEC 417 No 5031 Alternating current IEC 417 No 5032 Both direct and alternating current IEC 417 No...

Страница 13: ...lve DO NOT SUBSTITUTE PARTS OR MODIFY VALVE Do not install substitute parts or perform any unauthorized modification to the valve Return the valve to an MKS Calibration and Service Center for service...

Страница 14: ...ure leak tight installation OPERATE AT SAFE INLET PRESSURES Never operate the valve at pressures higher than the rated maximum pressure refer to the product specifications for the maximum allowable pr...

Страница 15: ...e situation pr sentant un risque d accident pour le personnel en cas d ex cution incorrecte ou de non respect des consignes Attention L indication ATTENTION signale un danger pour l appareil Elle atti...

Страница 16: ...417 No 5017 Terre de protection masse IEC 417 No 5019 Masse IEC 417 No 5020 Equipotentialit IEC 417 No 5021 Courant continu IEC 417 No 5031 Courant alternatif IEC 417 No 5032 Courant continu et altern...

Страница 17: ...DE PI CES OU DE MODIFICATION DE LA VALVE Ne pas installer des pi ces de substitution ou effectuer des modifications non autoris es sur la valve Renvoyer la valve un centre de service et de calibrage...

Страница 18: ...ES PRESSIONS D ENTR E NON DANGEREUSES Ne jamais utiliser la valve avec des pressions sup rieures la pression nominale maximum se reporter aux sp cifications de l unit pour la pression maximum admissib...

Страница 19: ...eine sonstige Gegebenheit aufmerksam deren unsachgem e Ausf hrung bzw ungen gende Ber cksichtigung zu Verletzungen f hren kann Vorsicht Das Symbol VORSICHT weist auf eine Gefahr f r das Ger t hin Es...

Страница 20: ...etz IEC 417 No 5008 Erde IEC 417 No 5017 Schutzerdung IEC 417 No 5019 Rahmen Chassis IEC 417 No 5020 Aquipotential anschlu IEC 417 No 5021 Gleichstrom IEC 417 No 5031 Wechselstrom IEC 417 No 5032 Glei...

Страница 21: ...Kraftquellen trennen Niemals Teile austauschen oder nderungen am Ventil vornehmen Ersetzen Sie keine Teile mit baugleichen oder hnlichen Teilen und nehmen Sie keine eigenm chtigen nderungen am Ventil...

Страница 22: ...vorgenommen werden Ventil auf Undichtigkeiten pr fen berpr fen Sie sorgf ltig alle Verbindungen auf undichte Stellen Nur unter zul ssigen Anschlu dr cken betreiben Betreiben Sie das Ventil niemals un...

Страница 23: ...relieve un procedimiento pr ctica estado etc que en caso de no realizarse u observarse correctamente puede causar da os personales Precauci n El s mbolo de precauci n indica la posibilidad de producir...

Страница 24: ...IEC 417 N 5017 Protecci n a tierra IEC 417 N 5019 Caja o chasis IEC 417 N 5020 Equipotencialidad IEC 417 N 5021 Corriente continua IEC 417 N 5031 Corriente alterna IEC 417 N 5032 Corriente continua y...

Страница 25: ...da fuente de alimentaci n neum tica o el ctrica NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE LA V LVULA No instale piezas que no sean originales o modifique la v lvula sin autorizaci n Para asegurar el...

Страница 26: ...speccione cuidadosamente las conexiones de los componentes de vac o para comprobar que hayan sido instalados a prueba de fugas HAGA FUNCIONAR LA V LVULA CON PRESIONES DE ENTRADA SEGURAS No haga funcio...

Страница 27: ...ion control The pressure or position set point may be an external voltage applied to the input connector or sent as an RS 232 message The 153 1253 unit reads the pressure signal used for control appli...

Страница 28: ...nstrument in good working condition Appendix A Product Specifications lists the specifications of both units Appendix B Model Code Explanation describes the instrument s ordering code Customer Support...

Страница 29: ...S obtain an ERA Number Equipment Return Authorization Number from the MKS Service Center before shipping Please refer to the inside of the back cover of this manual for a list of MKS Calibration and S...

Страница 30: ...red during use No additional installation requirements are necessary to ensure compliance with Directives 92 59 EEC and 73 23 EEC Note 1 An overall metal braided shielded cable properly grounded at bo...

Страница 31: ...NSD U CER PU M P J1 J2 EX TERN A L SET POIN T POW ER SU PPLY PT 1 OR COM PU TER Refer to Table 1 for a description of the cable connections Figure 1 Piping and Cable Interconnections for the Type 153...

Страница 32: ...e 6 page 21 lists the cables used to interface with various pressure transducers The 153 controller can receive a set point signal from either an external voltage source or an RS 232 signal In either...

Страница 33: ...e and set point input signals You must connect the return leads to the power supply ground at a single point Grounding at multiple points will produce ground loops and IR drops which will degrade perf...

Страница 34: ...253 controller can receive a set point signal from either an external voltage source or an RS 232 signal In either case the INPUT connector which incorporates the RS 232 communications acts as the int...

Страница 35: ...or shielded cables with flying leads at one or both ends it is important at each such end to ground the shield before the wires exit Make this ground with absolute minimum length A inch piece of 22 wi...

Страница 36: ...ty of applications The size of the valve is dictated by the size of the vacuum exhaust line and the range of conductance necessary for the pressure and flow rates being used Refer to the 253 data shee...

Страница 37: ...s Refer to the valve instruction manual for directions on installation and operation of the valve Warning The moving parts in the valve create a risk of personal injury until the valve is securely inc...

Страница 38: ...and the product model code and displays the CE mark signifying compliance with the European CE regulations 153DXYZ Serial Model 012345678 MKSInstruments Inc Made in the USA Figure 4 Serial Number Labe...

Страница 39: ...53 unit J1 Inp ut J2 Power Pow er O P E N CL O SE Manual Switch CLOSE Indicator OPEN Indicator HOLD NORMAL HOLD NORMAL Switch TYPE 153 CONTROL VALVE Figure 6 Top Panel of the 153 Unit J1 INPUT Connect...

Страница 40: ...Point Input Hi side 10 Set Point Return Lo side 11 Power Common Return for power supply 2 12 15 30V Power Supply Input 1 13 Pressure Signal Common Lo side 4 14 No Connection 15 No Connection 16 No Co...

Страница 41: ...the location of the switch The OPEN indicator light located to the left of the manual switch illuminates when the valve is fully open The CLOSE indicator light is located to the right of the manual s...

Страница 42: ...The J1 INPUT connector and the J2 POWER connector function exactly the same on the 1253 unit as they do on the 153 unit Refer to External Connectors and Controls on the 153 Unit page 29 for details o...

Страница 43: ...tch The manual switch labeled MAN located to the left of the VALVE connector J3 allows you to manually drive the valve to the open or closed position The OPEN indicator light located to the left of th...

Страница 44: ...s the connections for all the internal controls Figure 8 shows the location of the dipswitch bank inside the 153 1253 unit Dipswitch Bank Figure 8 Dipswitch Bank on the Motherboard The dipswitch bank...

Страница 45: ...UT connector You can override the analog set point by sending an RS 232 signal to the 153 1253 controller Use the standard protocol A command to revert back to an analog set point Switch 6 Establishes...

Страница 46: ...switch bank on the motherboard Table 11 shows the factory configuration for the RS 232 communications parameters Factory Default RS 232 Communication Parameters Parameter Setting Baud Rate 9600 Parity...

Страница 47: ...ontrol Parameter Parameter Setting Control Type Pressure Set Point Type Analog Set Point Control Normal Pressure Full Scale 10 Volts Set Point Full Scale 10 Volts Gain Setting 10 Lead Setting 5 Table...

Страница 48: ...o Analog pressure zero Analog set point full scale Analog pressure full scale Lead Gain Present valve position The following conditions apply at power up The processor checks the position of all switc...

Страница 49: ...f the position signal is more than 3 different from the appropriate value the Valve Slipped signal is set to 1 meaning slipped When message R8 is sent to the 153 1253 unit the unit returns either C0 o...

Страница 50: ...Valve Slippage Signal Chapter Three Overview 40 This page intentionally left blank...

Страница 51: ...l is normally 0 to 10 Volts but the zero and full scale voltages can be adapted to individual applications Refer to Calibration page 44 for more information The GAIN and LEAD constants used in the con...

Страница 52: ...able terminal Refer to RS 232 Communications page 46 for more information Note Regardless of the communication device used the control characters used are identical 1 Configure your system to withstan...

Страница 53: ...e same LEAD setting for a drop in pressure Therefore duplicate the test for the LEAD parameter with the same set point and direction as required in the process 4 Reduce the GAIN setting if the pressur...

Страница 54: ...voltage that corresponds to an analog set point zero value The analog set point zero value is set to 0 0 Volts at the factory Learn the Analog Set Point Full Scale 1 Supply full scale input voltage o...

Страница 55: ...erroneous voltage value 2 Send the Learn Analog Pressure Full Scale command Type F2 and press ENTER The 153 1253 controller raises the pressure to the full scale value of the transducer The 153 1253...

Страница 56: ...e terminal PT 1 via the RS 232 interface The computer can read pressure valve position and tuning parameters It can also change the set point open and close the valve and change the tuning parameters...

Страница 57: ...Note The 153 1253 unit is configured for eight data bits one stop bit and no handshaking You cannot change these settings How To Change the Dipswitch Settings In order to change the communication para...

Страница 58: ...miter is a carriage return CR Note You must reboot the system before any changes to the dipswitch setting are recognized by the 153 1253 unit 5 Replace the cover of the unit How To Connect to the MKS...

Страница 59: ...ng parameters listed in Table 16 page 50 C Close the valve D Same as A F1 Learn analog set point full scale F2 Learn analog pressure full scale G xxx x Set controller gain in percent H Hold valve posi...

Страница 60: ...Degrees R8 Slipped C x 0 OK 1 Slipped R10 Set Point Zero ZA xxx x Percent R11 Pressure Zero ZB xxx x Percent R12 Set Point F S FA xxx x Percent Ry13 Pressure F S FB xxx x Percent Table 15 Report Comm...

Страница 61: ...the controller To reset the zero and full scale settings refer to How To Calibrate the 153 1253 page 44 of your Instruction Manual Portable Terminal PT 1 Protocol When using the portable terminal PT 1...

Страница 62: ...hen use the PID control on the 146 instrument to control the valve Refer to How To Change the Dipswitch Settings page 47 for instructions on how to change switch 8 Note The 146 instrument must contain...

Страница 63: ...Information 53 Chapter Five Maintenance General Information Periodically check for wear on the cables and inspect the enclosure for visible signs of damage How To Clean the Unit Periodically wipe down...

Страница 64: ...General Information Chapter Five Maintenance 54 This page intentionally left blank...

Страница 65: ...by the same external supply used by the 153 1253 or by a separate external supply Outputs Opto coupled Limit Switch L S One for Open one for Close 30 V maximum 10 mA maximum Power Loss Unit saves cal...

Страница 66: ...holds the valve in position Valve Speed OPEN to CLOSE Normal 7 5 seconds Fast 1 8 seconds Ref SP021 84 Physical Specifications Connectors One 25 pin D female for input signals and power input One 9 p...

Страница 67: ...del number of the valve Type 153 with ASA Flanges Type Number Nominal Inside Diameter inches mm ASA Flange Size Flapper O Ring 153D 2 2 1 1 888 48 2 Yes 153D 2 2 2 1 950 50 2 No 153D 60 2 1 2 362 60 2...

Страница 68: ...79 20 KF 40 No 153D 1 40 1 1 270 32 KF 40 Yes 153D 1 40 2 1 270 32 KF 40 No 153D 2 50 1 1 888 48 KF 50 Yes 153D 2 50 2 2 000 51 KF 50 No 153D 60 63 1 2 362 60 NW 63 Yes 153D 60 63 2 2 362 60 NW 63 No...

Страница 69: ...153D 1 2CF 1 1 270 32 2 Yes 153D 1 2CF 2 1 270 32 2 No 153D 2 3CF 1 1 888 48 33 8 Yes 153D 2 3CF 2 2 000 51 33 8 No 153D 2 4CF 1 2 000 51 4 Yes 153D 2 4CF 2 2 000 51 4 No 153D 3 6CF 2 3 000 76 6 No 1...

Страница 70: ...or the Type 1253 Unit Appendix B Model Code Explanation 60 Model Code for the Type 1253 Unit The model code for this stand alone electronics module is 1253D There are no options to specify through the...

Страница 71: ...es model codes 57 B Baud rate 35 36 C Cabling 20 Calibration 44 Calibration voltages 45 CE Mark 28 CF flanges model codes 59 Connectors 1253 unit 32 33 153 unit 29 31 Control method selection 35 Contr...

Страница 72: ...26 N Normal mode 35 Normal Reverse switch 46 NULL MODEM cable 46 NW ISO flanges model codes 58 P Portable terminal protocol 51 Position control 17 POWER connector 31 Power down constants 38 Power req...

Страница 73: ...action 35 format 35 signal 49 signal source 35 syntax 52 Sicherheitshinweise f r das Ventil 9 Standard protocol 49 51 System considerations 26 T Tuning 43 U Unpacking instructions 19 V VALVE connector...

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