Micronix PPS-20 Series Скачать руководство пользователя страница 7 | Manualshive

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Micronix PPS-20 Series Скачать руководство пользователя страница 7

PPS-

20

Piezo Positioner Stage

5

Rev: 3.12

MICRONIX USA,LLC

www.micronixusa.com

Reference Manual

3.

2B

Preparing to Install the PPS-20

3.1

14B

Installation Preparation

When mounting the stage, it is important to consider the flatness of the mounting
surface, as the stage will conform to the shape of that mounting surface. A surface
that is not flat can adversely affect the performance and structural integrity of the
stage.

The stage is calibrated and guaranteed to be within specification at 20°C ±5°C
unless otherwise specified. Be sure to use the stage under the following conditions:

▪

Mount to a clean and flat surface which is free of debris, burrs or dings

▪

An indoor atmosphere free of corrosive gases, excessive dust, and
condensation

▪

Temperature range of 0-40°C

▪

Relative humidity between 20-80%

▪

Locate away from water, heat, and electrical noise

3.2

15B

Package Contents

If product is damaged or there are missing components, contact MICRONIX USA
immediately. Do not discard product packaging in case of return shipment.

Package Should Contain:

▪

PPS-20 Linear Stage

▪

Reference Manual

▪

Any other previously agreed upon components such as a controller

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Содержание PPS-20 Series

Страница 1: ...S e r i e s Reference Manual Precision Piezo Stage Open and Closed Loop Versions PPS 20...

Страница 2: ...PPS 20 Piezo Positioner Stage Reference Manual Rev 3 12 MICRONIX USA LLC Tel 949 480 0538 Fax 949 480 0538 Email info micronixusa com http micronixusa com...

Страница 3: ...m 11 6 Dimensions 13 6 1 PPS 20 with Digital Encoder 13 6 2 PPS 20 with Analog Encoder 13 7 Stacking Configurations 15 7 1 Configurations Examples 15 8 Supplementary Information 16 8 1 Maintenance 16...

Страница 4: ...20 is available in travel lengths of up to 51mm in open loop or with an external encoder and an optional linear encoder provides nanometer repeatability Vacuum Ultra High Vacuum 10 9 mbar and or Cryo...

Страница 5: ...1 3 Technical Data Motor PM 002 Speed Max mm sec 2 MMC 100 10 MMC 110 Resolution Typical nm 1 open loop 2 digital encoder 10 analog encoder Bi directional Repeatability nm N A open loop 50 digital en...

Страница 6: ...Order Numbers Contact MICRONIX USA for custom applications and stacking configurations Order No PPS 20 1 Piezo Motor PM 002 1 12mm Travel 1 18mm Travel 2 26mm Travel 3 51mm Travel 5 Open Loop 0 Analo...

Страница 7: ...in specification at 20 C 5 C unless otherwise specified Be sure to use the stage under the following conditions Mount to a clean and flat surface which is free of debris burrs or dings An indoor atmos...

Страница 8: ...ounting surface Align carriage with clearance holes to access base mounting pattern Please note it is possible to move the carriage manually without damaging the stage Requires 2x M1 5 x 5mm Dowel Pin...

Страница 9: ...ting the PPS 20 5 1 17BAtmospheric Environments For controller information refer to the appropriate MMC controller manual 5 1 1 30BOpen Loop Installation Wiring Diagram Connecting the PPS 20 in an ope...

Страница 10: ...PPS 20 Piezo Positioner Stage 8 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual...

Страница 11: ...2 31BClosed Loop Encoder Installation Wiring Diagram Using the PPS 20 stage with an encoder requires a closed loop compatible controller MMC 100 or MMC 110 that recognizes encoder feedback Connect the...

Страница 12: ...s the stage with vacuum compatible connectors 9 pin female PEEK connectors for open loop 15 Pin female PEEK connector for closed loop with analog encoder 25 pin female PEEK connector for closed loop w...

Страница 13: ...ector at the vacuum chamber wall that can accommodate both the motor cable and the encoder cable The vacuum compatible PPS 20 will be supplied with wiring for a straight through feed through not a cro...

Страница 14: ...PPS 20 Piezo Positioner Stage 12 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual 5 2 3 1 Analog Encoder Wiring Diagram 5 2 3 2 Digital Encoder Wiring Diagram...

Страница 15: ...CRONIX USA LLC www micronixusa com Reference Manual 6 5BDimensions 6 1 19BPPS 20 with Digital Encoder L Travel A B C D E 20 12mm 6 1 2 15 16 30 18mm 6 1 2 25 16 40 26mm 10 3 6 35 36 80 51mm 18 7 14 75...

Страница 16: ...3 12 MICRONIX USA LLC www micronixusa com Reference Manual 6 2 20BPPS 20 with Analog Encoder 7 L Travel A B C D E 20 12mm 6 1 2 15 16 30 18mm 6 1 2 25 16 40 26mm 10 3 6 35 36 80 51mm 18 7 14 75 36 Gre...

Страница 17: ...tacking Configurations 7 1 Configurations Examples Additional Configurations available upon request Using Z Adapter P N 430509 X Y X Y No carriage X Y Back to back X Y 18mm 12mm X Y 18mm no carriage 1...

Страница 18: ...ontact MICRONIX USA The PPS 20 linear piezo stage is a precision mechanical device and should be handled with care Do not drop or mishandle the stage Do not touch the bearings as this will contaminate...

Страница 19: ...ing Diagram Pin Description Color 1 Phase 1 Red 2 Phase 2 Yellow 3 N C N C 4 Not In Use N C 5 Ground Black Green 6 N C N C 7 N C N C 8 N C N C 9 Ground N C Pin Function Low Cost Digital Analog 1 A Cos...

Страница 20: ...PPS 20 Piezo Positioner Stage 18 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 3 25BOpen Loop Vacuum Wiring Diagram A 3 1 35BStraight Through 9 Pin Feed Through...

Страница 21: ...lignment of the Encoder Head if this occurs contact MICRONIX USA Do not adjust the Encoder Head or scale For more information refer to MicroE Systems Mercury Encoders A 4 1 36BEncoder Module Pin out L...

Страница 22: ...x pulse may be aligned with other states of A or B than the ones shown Above are with reference to the sensor s optical centerline A 4 4 39BResolution All closed loop stages are supplied with 20 m sca...

Страница 23: ...2 12 White Green TP 12 2 Ground Black Green 14 14 25 Black Green 25 5 Shield 15 15 24 24 Casing 5VDC Red 4 4 10 Red 10 GND Black 17 17 22 Black 22 DCLK Gray 5 5 9 Gray 9 DCLK White Gray TP 18 18 21 W...

Страница 24: ...PPS 20 Piezo Positioner Stage 22 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 4 6 41BStraight Through 25 Pin Feed Through...

Страница 25: ...red with an appropriate controller The MMC 100 has an Analog option The PPS 20 with an analog encoder will be supplied with a 15 pin connector that incorporates both motor and encoder signals A 5 2 Op...

Страница 26: ...5 5 Shield 10 10 14 14 Casing GND Black 8 8 1 Black 1 4 Cos Brown 7 7 2 Brown 2 1 5V Red 6 6 3 Red 3 5 Cos Orange 5 5 4 White Brown TP 4 6 Sin Yellow 4 4 5 Yellow 5 2 Sin Green 12 12 12 White Yellow T...

Страница 27: ...PPS 20 Piezo Positioner Stage 25 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 5 7 49BStraight Through 15 Pin Feed Through...

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