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PPS-

20

 

Piezo Positioner Stage

 

 

 

 

1  

 

Rev: 3.12 

 

MICRONIX USA,LLC 

  

www.micronixusa.com 

 
 

Reference Manual 

     
 

Contents 

1.

 

Introduction                                                                                                                                                                                                                                     2

 

1.1 

Product Description ....................................................................................................................................................................................... 2 

1.2 

Recommended Controllers ............................................................................................................................................................................ 3 

1.3 

Technical Data ............................................................................................................................................................................................... 3 

1.4 

Load Characteristics ...................................................................................................................................................................................... 3 

2.

 

Model Configurations                                                                                                                                                                                                                    4

 

2.1 

PPS-20 Order Numbers ................................................................................................................................................................................. 4 

3.

 

Preparing to Install the PPS-20                                                                                                                                                                                                    5

 

3.1 

Installation Preparation ................................................................................................................................................................................. 5 

3.2 

Package Contents .......................................................................................................................................................................................... 5 

4.

 

Installing the PPS-20                                                                                                                                                                                                                      6

 

4.1 

PPS-20 Installation ......................................................................................................................................................................................... 6 

4.1.1 

General Mounting ................................................................................................................................................................................ 6 

4.1.2 

X-Y Mounting ....................................................................................................................................................................................... 7 

5.

 

Connecting the PPS-20                                                                                                                                                                                                                  7

 

5.1 

Atmospheric Environments ........................................................................................................................................................................... 7 

5.1.1 

Open Loop Installation & Wiring Diagram ........................................................................................................................................... 7 

5.1.2 

Closed Loop/Encoder Installation & Wiring Diagram .......................................................................................................................... 9 

5.2 

Vacuum Environments ................................................................................................................................................................................ 10 

5.2.1 

Handling and Preparation .................................................................................................................................................................. 10 

5.2.2 

Open loop Installation & Wiring Diagram .......................................................................................................................................... 10 

5.2.3 

Closed Loop/Encoder Installation & Wiring Diagram ........................................................................................................................ 11 

6.

 

Dimensions                                                                                                                                                                                                                                    13

 

6.1 

PPS-20 with Digital Encoder ........................................................................................................................................................................ 13 

6.2 

PPS-20 with Analog Encoder ....................................................................................................................................................................... 13 

7.

 

Stacking Configurations                                                                                                                                                                                                              15

 

7.1 

Configurations Examples ............................................................................................................................................................................. 15 

8.

 

Supplementary Information                                                                                                                                                                                                      16

 

8.1 

Maintenance ............................................................................................................................................................................................... 16 

8.2 

Units and Conventions ................................................................................................................................................................................ 16 

A.

 

Appendix                                                                                                                                                                                                                                        17

 

A.1 

Electrical Connection ................................................................................................................................................................................... 17 

A.2 

2 Phase Piezo Motor Wiring Diagram .......................................................................................................................................................... 17 

A.3 

Open Loop Vacuum Wiring Diagram ........................................................................................................................................................... 18 

A.3.1 

Straight Through 9-Pin Feed Through ................................................................................................................................................ 18 

A.4 

Using the Digital Encoder Module ............................................................................................................................................................... 19 

A.4.1 

Encoder Module Pin-out .................................................................................................................................................................... 19 

A.4.2 

Operating and Electrical Specifications.............................................................................................................................................. 20 

A.4.3 

Output Signals & Signal Termination for A quad B, Index and limits ................................................................................................. 20 

A.4.4 

Resolution .......................................................................................................................................................................................... 20 

A.4.5 

Digital Encoder Wiring Diagram ......................................................................................................................................................... 21 

A.4.6 

Straight Through 25-Pin Feed Through .............................................................................................................................................. 22 

A.5 

Using an Analog Encoder ............................................................................................................................................................................. 23 

A.5.1 

Analog Encoder Overview .................................................................................................................................................................. 23 

A.5.2 

Operating and Electrical Specifications.............................................................................................................................................. 23 

A.5.3 

Analog Output (Pins 1,2,6, and 7) ...................................................................................................................................................... 23 

A.5.4 

Index Window (Pins 3) ....................................................................................................................................................................... 23 

A.5.5 

Resolution .......................................................................................................................................................................................... 24 

A.5.6 

Analog Encoder Wiring Diagram ........................................................................................................................................................ 24 

A.5.7 

Straight Through 15-Pin Feed Through .............................................................................................................................................. 25

 

 

Содержание PPS-20 Series

Страница 1: ...S e r i e s Reference Manual Precision Piezo Stage Open and Closed Loop Versions PPS 20...

Страница 2: ...PPS 20 Piezo Positioner Stage Reference Manual Rev 3 12 MICRONIX USA LLC Tel 949 480 0538 Fax 949 480 0538 Email info micronixusa com http micronixusa com...

Страница 3: ...m 11 6 Dimensions 13 6 1 PPS 20 with Digital Encoder 13 6 2 PPS 20 with Analog Encoder 13 7 Stacking Configurations 15 7 1 Configurations Examples 15 8 Supplementary Information 16 8 1 Maintenance 16...

Страница 4: ...20 is available in travel lengths of up to 51mm in open loop or with an external encoder and an optional linear encoder provides nanometer repeatability Vacuum Ultra High Vacuum 10 9 mbar and or Cryo...

Страница 5: ...1 3 Technical Data Motor PM 002 Speed Max mm sec 2 MMC 100 10 MMC 110 Resolution Typical nm 1 open loop 2 digital encoder 10 analog encoder Bi directional Repeatability nm N A open loop 50 digital en...

Страница 6: ...Order Numbers Contact MICRONIX USA for custom applications and stacking configurations Order No PPS 20 1 Piezo Motor PM 002 1 12mm Travel 1 18mm Travel 2 26mm Travel 3 51mm Travel 5 Open Loop 0 Analo...

Страница 7: ...in specification at 20 C 5 C unless otherwise specified Be sure to use the stage under the following conditions Mount to a clean and flat surface which is free of debris burrs or dings An indoor atmos...

Страница 8: ...ounting surface Align carriage with clearance holes to access base mounting pattern Please note it is possible to move the carriage manually without damaging the stage Requires 2x M1 5 x 5mm Dowel Pin...

Страница 9: ...ting the PPS 20 5 1 17BAtmospheric Environments For controller information refer to the appropriate MMC controller manual 5 1 1 30BOpen Loop Installation Wiring Diagram Connecting the PPS 20 in an ope...

Страница 10: ...PPS 20 Piezo Positioner Stage 8 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual...

Страница 11: ...2 31BClosed Loop Encoder Installation Wiring Diagram Using the PPS 20 stage with an encoder requires a closed loop compatible controller MMC 100 or MMC 110 that recognizes encoder feedback Connect the...

Страница 12: ...s the stage with vacuum compatible connectors 9 pin female PEEK connectors for open loop 15 Pin female PEEK connector for closed loop with analog encoder 25 pin female PEEK connector for closed loop w...

Страница 13: ...ector at the vacuum chamber wall that can accommodate both the motor cable and the encoder cable The vacuum compatible PPS 20 will be supplied with wiring for a straight through feed through not a cro...

Страница 14: ...PPS 20 Piezo Positioner Stage 12 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual 5 2 3 1 Analog Encoder Wiring Diagram 5 2 3 2 Digital Encoder Wiring Diagram...

Страница 15: ...CRONIX USA LLC www micronixusa com Reference Manual 6 5BDimensions 6 1 19BPPS 20 with Digital Encoder L Travel A B C D E 20 12mm 6 1 2 15 16 30 18mm 6 1 2 25 16 40 26mm 10 3 6 35 36 80 51mm 18 7 14 75...

Страница 16: ...3 12 MICRONIX USA LLC www micronixusa com Reference Manual 6 2 20BPPS 20 with Analog Encoder 7 L Travel A B C D E 20 12mm 6 1 2 15 16 30 18mm 6 1 2 25 16 40 26mm 10 3 6 35 36 80 51mm 18 7 14 75 36 Gre...

Страница 17: ...tacking Configurations 7 1 Configurations Examples Additional Configurations available upon request Using Z Adapter P N 430509 X Y X Y No carriage X Y Back to back X Y 18mm 12mm X Y 18mm no carriage 1...

Страница 18: ...ontact MICRONIX USA The PPS 20 linear piezo stage is a precision mechanical device and should be handled with care Do not drop or mishandle the stage Do not touch the bearings as this will contaminate...

Страница 19: ...ing Diagram Pin Description Color 1 Phase 1 Red 2 Phase 2 Yellow 3 N C N C 4 Not In Use N C 5 Ground Black Green 6 N C N C 7 N C N C 8 N C N C 9 Ground N C Pin Function Low Cost Digital Analog 1 A Cos...

Страница 20: ...PPS 20 Piezo Positioner Stage 18 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 3 25BOpen Loop Vacuum Wiring Diagram A 3 1 35BStraight Through 9 Pin Feed Through...

Страница 21: ...lignment of the Encoder Head if this occurs contact MICRONIX USA Do not adjust the Encoder Head or scale For more information refer to MicroE Systems Mercury Encoders A 4 1 36BEncoder Module Pin out L...

Страница 22: ...x pulse may be aligned with other states of A or B than the ones shown Above are with reference to the sensor s optical centerline A 4 4 39BResolution All closed loop stages are supplied with 20 m sca...

Страница 23: ...2 12 White Green TP 12 2 Ground Black Green 14 14 25 Black Green 25 5 Shield 15 15 24 24 Casing 5VDC Red 4 4 10 Red 10 GND Black 17 17 22 Black 22 DCLK Gray 5 5 9 Gray 9 DCLK White Gray TP 18 18 21 W...

Страница 24: ...PPS 20 Piezo Positioner Stage 22 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 4 6 41BStraight Through 25 Pin Feed Through...

Страница 25: ...red with an appropriate controller The MMC 100 has an Analog option The PPS 20 with an analog encoder will be supplied with a 15 pin connector that incorporates both motor and encoder signals A 5 2 Op...

Страница 26: ...5 5 Shield 10 10 14 14 Casing GND Black 8 8 1 Black 1 4 Cos Brown 7 7 2 Brown 2 1 5V Red 6 6 3 Red 3 5 Cos Orange 5 5 4 White Brown TP 4 6 Sin Yellow 4 4 5 Yellow 5 2 Sin Green 12 12 12 White Yellow T...

Страница 27: ...PPS 20 Piezo Positioner Stage 25 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 5 7 49BStraight Through 15 Pin Feed Through...

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