Micronix PPS-20 Series Скачать руководство пользователя страница 6 | Manualshive

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Micronix PPS-20 Series Скачать руководство пользователя страница 6

PPS-

20

Piezo Positioner Stage

4

Rev: 3.12

MICRONIX USA,LLC

www.micronixusa.com

Reference Manual

2.

1B

Model Configurations

2.1

13B

PPS-20 Order Numbers

Contact MICRONIX USA for custom applications and stacking configurations.

Order No.

PPS-20-

1

Piezo Motor PM-002

1

12mm Travel

1

18mm Travel

2

26mm Travel

3

51mm Travel

5

Open Loop

0

Analog (1Vpp), 10nm

2

Digital Encoder, 2nm

3

No Limit Switch

0

Magnetic

1

Non-vacuum

0

Vacuum prepared, 10

-6

mbar

6

Vacuum prepared, 10

-9

mbar

9

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Содержание PPS-20 Series

Страница 1: ...S e r i e s Reference Manual Precision Piezo Stage Open and Closed Loop Versions PPS 20...

Страница 2: ...PPS 20 Piezo Positioner Stage Reference Manual Rev 3 12 MICRONIX USA LLC Tel 949 480 0538 Fax 949 480 0538 Email info micronixusa com http micronixusa com...

Страница 3: ...m 11 6 Dimensions 13 6 1 PPS 20 with Digital Encoder 13 6 2 PPS 20 with Analog Encoder 13 7 Stacking Configurations 15 7 1 Configurations Examples 15 8 Supplementary Information 16 8 1 Maintenance 16...

Страница 4: ...20 is available in travel lengths of up to 51mm in open loop or with an external encoder and an optional linear encoder provides nanometer repeatability Vacuum Ultra High Vacuum 10 9 mbar and or Cryo...

Страница 5: ...1 3 Technical Data Motor PM 002 Speed Max mm sec 2 MMC 100 10 MMC 110 Resolution Typical nm 1 open loop 2 digital encoder 10 analog encoder Bi directional Repeatability nm N A open loop 50 digital en...

Страница 6: ...Order Numbers Contact MICRONIX USA for custom applications and stacking configurations Order No PPS 20 1 Piezo Motor PM 002 1 12mm Travel 1 18mm Travel 2 26mm Travel 3 51mm Travel 5 Open Loop 0 Analo...

Страница 7: ...in specification at 20 C 5 C unless otherwise specified Be sure to use the stage under the following conditions Mount to a clean and flat surface which is free of debris burrs or dings An indoor atmos...

Страница 8: ...ounting surface Align carriage with clearance holes to access base mounting pattern Please note it is possible to move the carriage manually without damaging the stage Requires 2x M1 5 x 5mm Dowel Pin...

Страница 9: ...ting the PPS 20 5 1 17BAtmospheric Environments For controller information refer to the appropriate MMC controller manual 5 1 1 30BOpen Loop Installation Wiring Diagram Connecting the PPS 20 in an ope...

Страница 10: ...PPS 20 Piezo Positioner Stage 8 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual...

Страница 11: ...2 31BClosed Loop Encoder Installation Wiring Diagram Using the PPS 20 stage with an encoder requires a closed loop compatible controller MMC 100 or MMC 110 that recognizes encoder feedback Connect the...

Страница 12: ...s the stage with vacuum compatible connectors 9 pin female PEEK connectors for open loop 15 Pin female PEEK connector for closed loop with analog encoder 25 pin female PEEK connector for closed loop w...

Страница 13: ...ector at the vacuum chamber wall that can accommodate both the motor cable and the encoder cable The vacuum compatible PPS 20 will be supplied with wiring for a straight through feed through not a cro...

Страница 14: ...PPS 20 Piezo Positioner Stage 12 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual 5 2 3 1 Analog Encoder Wiring Diagram 5 2 3 2 Digital Encoder Wiring Diagram...

Страница 15: ...CRONIX USA LLC www micronixusa com Reference Manual 6 5BDimensions 6 1 19BPPS 20 with Digital Encoder L Travel A B C D E 20 12mm 6 1 2 15 16 30 18mm 6 1 2 25 16 40 26mm 10 3 6 35 36 80 51mm 18 7 14 75...

Страница 16: ...3 12 MICRONIX USA LLC www micronixusa com Reference Manual 6 2 20BPPS 20 with Analog Encoder 7 L Travel A B C D E 20 12mm 6 1 2 15 16 30 18mm 6 1 2 25 16 40 26mm 10 3 6 35 36 80 51mm 18 7 14 75 36 Gre...

Страница 17: ...tacking Configurations 7 1 Configurations Examples Additional Configurations available upon request Using Z Adapter P N 430509 X Y X Y No carriage X Y Back to back X Y 18mm 12mm X Y 18mm no carriage 1...

Страница 18: ...ontact MICRONIX USA The PPS 20 linear piezo stage is a precision mechanical device and should be handled with care Do not drop or mishandle the stage Do not touch the bearings as this will contaminate...

Страница 19: ...ing Diagram Pin Description Color 1 Phase 1 Red 2 Phase 2 Yellow 3 N C N C 4 Not In Use N C 5 Ground Black Green 6 N C N C 7 N C N C 8 N C N C 9 Ground N C Pin Function Low Cost Digital Analog 1 A Cos...

Страница 20: ...PPS 20 Piezo Positioner Stage 18 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 3 25BOpen Loop Vacuum Wiring Diagram A 3 1 35BStraight Through 9 Pin Feed Through...

Страница 21: ...lignment of the Encoder Head if this occurs contact MICRONIX USA Do not adjust the Encoder Head or scale For more information refer to MicroE Systems Mercury Encoders A 4 1 36BEncoder Module Pin out L...

Страница 22: ...x pulse may be aligned with other states of A or B than the ones shown Above are with reference to the sensor s optical centerline A 4 4 39BResolution All closed loop stages are supplied with 20 m sca...

Страница 23: ...2 12 White Green TP 12 2 Ground Black Green 14 14 25 Black Green 25 5 Shield 15 15 24 24 Casing 5VDC Red 4 4 10 Red 10 GND Black 17 17 22 Black 22 DCLK Gray 5 5 9 Gray 9 DCLK White Gray TP 18 18 21 W...

Страница 24: ...PPS 20 Piezo Positioner Stage 22 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 4 6 41BStraight Through 25 Pin Feed Through...

Страница 25: ...red with an appropriate controller The MMC 100 has an Analog option The PPS 20 with an analog encoder will be supplied with a 15 pin connector that incorporates both motor and encoder signals A 5 2 Op...

Страница 26: ...5 5 Shield 10 10 14 14 Casing GND Black 8 8 1 Black 1 4 Cos Brown 7 7 2 Brown 2 1 5V Red 6 6 3 Red 3 5 Cos Orange 5 5 4 White Brown TP 4 6 Sin Yellow 4 4 5 Yellow 5 2 Sin Green 12 12 12 White Yellow T...

Страница 27: ...PPS 20 Piezo Positioner Stage 25 Rev 3 12 MICRONIX USA LLC www micronixusa com Reference Manual A 5 7 49BStraight Through 15 Pin Feed Through...

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