PPS-
20 LMSM
Precision Stepper Stage
4
Rev: 3.07
MICRONIX USA,LLC
www.micronixusa.com
Reference Manual
1.4
Recommended Controllers
The following controllers are available from MICRONIX USA:
▪
MMC-200 [Stepper Motor Versions]
▪
MMC-300 [Linear Motor Versions]
1.5
Technical Data
1.6
Load Characteristics
Load Characteristics
Fx
(N)
Fy
(N)
Fz
(N)
Mx
(Nm)
My
(Nm)
Mz
(Nm)
k
ax[µrad/Nm]
k
ay[µrad/Nm]
SM-007
5
20
20
0.7
0.7
0.7
-
-
LM-003
1 Peak
2
2
0.7
0.7
0.7
-
-
Motor option
SM-007
LM-003
Speed, max.
[mm/sec]
5
100
Encoder option
Open
Loop
Analog
(1 V
pp
)
Digital
(RS-
422)
Digital Low
Cost
Analog
(1 V
pp
)
Digital
(RS-
422)
Digital Low Cost
(RS-422)
Resolution, typical
[
μ
m]
0.1
0.05
0.05
0.5
0.01
0.01
0.5
Repeatability,
bi-directional
[
µ
m]
± 4
± 0.2
± 0.2
±1
± 0.1
± 0.1
±1
Repeatability,
uni-directional
[µ
m]
0.5
0.2
0.2
1
0.1
0.1
1
