PPS-
20 LMSM
Precision Stepper Stage
27
Rev: 3.07
MICRONIX USA,LLC
www.micronixusa.com
Reference Manual
A.5.5
Index Window (Pins 3)
A.5.6
Resolution
.
All closed loop stages are supplied with 20µm scales. The interpolation is done
in an MMC controller to a higher resolution as specified in the order. With an
analog encoder the MMC controller has an achievable resolution of 10nm.
A.5.7
Analog Encoder Wiring Diagram
Standard Cable Descriptions:
A. PPS-20 Motor Cable - Vacuum Side
B. PPS-20 Encoder Cable - Vacuum Side
C. Atmospheric Motor Connector (Female Dsub 25 Pin to Male Dsub 9 Pin)
D. Atmospheric Encoder Module (Female Dsub 25 Pin to Female Dsub 9 Pin)
Wiring Diagram:
-Encoder
-Motor
Stepper Motor Connector Pinout
Description
Color
L1
L2
L3
L4
L5
L6
Motor B-
Orange
1
1
13
13 (Brown)
4
Ground
Brown
14
14
25
25 (Black)
9
Motor B+
Blue
2
2
12
12 (White - Brown TP)
3
+5V
Orange
15
15
24
24 (Red)
8
Motor A-
Red
3
3
11
11 (Green)
2
Limit +
Blue
16
16
23
23 (White - Violet TP)
7
Motor A+
Yellow
4
4
10
10 (White - Green TP)
1
Limit -
Violet
17
17
22
22 (Violet)
6
Shield
-
5
5
9
9 (Shield)
Casing
Enc Shield
-
8
8
6
6 (Shield)
Casing
+5V
Red
10
10
4
4 (Red)
5
Ground
Black
22
22
17
17 (Black)
4
Cos+
Brown
11
11
3
3 (Brown)
1
Cos-
Orange
23
23
16
16 (White - Brown TP)
6
Sin+
Yellow
12
12
2
2 (Yellow)
2
Sin-
Green
24
24
15
15 (White - Yellow TP)
7
Index+
Violet
13
13
1
1 (Violet)
3
(Female Dsub 25 Pin Peek Connector)
Stepper Version
