Checklists and Logs
Appendix D
Push bearings out of yoke.
Make sure new bearings are cleaned and lubricated with Krytox
LVP low vacuum grease.
Reassemble in reverse order (make sure bowed snap ring is
oriented correctly and fully seated in groove).
Table 9-11 Shaft Bearings- Drive Pulley
9.4.9.Replacing Shaft Bearings (Top
Pulley)
Replacing Shaft Bearings (Top Pulley)
Remove dropping chamber cover.
Remove drive belt.
Remove snap rings on upper bump stop and slide down shaft.
Remove retaining rings on top of upper pulley yoke.
Remove pulley (slide down).
Remove bowed retaining ring from short end of pulley shaft (note
orientation).
9-19
Содержание FG5
Страница 19: ...Design Components and Function 2 Figure 2 8 Top view of interferometer optics and beam path 2 11 ...
Страница 20: ...Design Components and Function 2 Figure 2 9 Side view of interferometer optics and beam path 2 12 ...
Страница 22: ...Design Components and Function 2 Figure 2 10 The Superspring 2 14 ...
Страница 31: ...Design Components and Function 2 Figure 2 13 Rotation Monitor 2 23 ...
Страница 32: ......
Страница 42: ...How to Set Up and Run the FG5 3 3 10 ...
Страница 44: ...How to Set Up and Run the FG5 3 Figure 3 2 V Post 3 12 ...
Страница 53: ...How to Set Up and Run the FG5 3 1 Backup the data 2 Shut off computer power 3 21 ...
Страница 87: ...Adjustment and Maintenance 4 4 29 ...
Страница 91: ...Adjustment and Maintenance 4 4 33 ...
Страница 104: ...Troubleshooting 5 5 2 ...
Страница 117: ...Troubleshooting 5 5 15 ...
Страница 131: ...Checklists and Logs Appendix D 9 3 ...
Страница 140: ...Checklists and Logs Appendix D Table 9 6 Replacing Drive Belt 9 12 ...
Страница 145: ...Checklists and Logs Appendix D Table 9 10 Replace Linear Bearings 9 17 ...
Страница 149: ...Checklists and Logs Appendix D Table 9 13 Replace Shaft Encoder 9 21 ...