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•
Starting at zero, measure a point(or feature) at the start and end of each of the segments to be
used in the SLEC correction.
•
Construct distances between each of the feature pairs that make up the segments of your
correction length. Take note of the X or Y component of each distance result.
•
Navigate to the SLEC correction setup page for the axis you are calibrating.
Mx Button-->Setup-->Error corrections-->SLEC-->X or Y SLEC.
Note: The supervisor password is required in order to add SLEC segments to the system.
If the “+”
key is not displayed within the X or Y SLEC screen, please verify that the supervisor password has
been correctly entered into the system.
•
Press the “+” softkey button to add your first segment.
•
Enter the “Standard” and “Observed” values into the fields for Segment 1. The standard value
will be the nominal or certified length of the segment being calibrated. The observed value will
be the actual measured X or Y distance for that same segment.
•
Repeat the previous 2 steps for each segment to be calibrated.
•
Enter the “Mapping offset” for the axis being calibrated into the “Mapping offset” field. The
Mapping offset should be set to the distance between the startup machine zero position and
the zero position of the calibration artifact that was used to collect the correction data.
•
Set the Enable flag to Yes to activate the SLEC correction for that axis.
The procedure above can be repeated for each axis that needs to be calibrated.
3.4
Entering Non-Linear Error Correction(NLEC)
Non-Linear Error Correction(NLEC) corrects for non-linear stage inaccuracies that may be present in a
system. This error correction method compares the positions of a series of measurements, collected
across the XY measuring range, to a matching list of certified or nominal positions for those measured
features. The result is an XY “error map” that reflects the non-linear errors of the system. In general, the
higher the density of calibration features(row and column count), the more resolute your “error map”
will be.
NLEC data can be collected and entered interactively, performing measurements and recording results
manually, or by running a part program that has been authored to guide the collection of NLEC data
through the Mx200 programming system. In either case the NLEC correction is entered into the system
by importing features from the feature list.
