LEYBOLD THERMOVAC TTR 101 N, Руководство по эксплуатации

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8 300544655_002_C1 - 11/2016 - © Leybold
2.1
Technical Data
Measurement principle:
Thermal conductivity according to a MEMS Pirani sensor
Mechanical deflection of a silicone membrane in a Piezo sensor
P/N: 230350V02, 230351V02, 230352V02, 230353V02, 230354V02, 230355V02, 230356V02:
Measurement range (N
2
and Air): 5×10
-5
to 1500 mbar
Accuracy
(1)
(N
2
): 5×10
-4
to 1x10
-3
mbar: ±10% of reading
1 ×10
-3
to 11 mbar: ± 5% of reading
11 to 1333 mbar: ± 0.75% of reading
1333 to 1500 mbar: ± 2% of reading
Repeatability
(1)
(N
2
): 1×10
-3
to 11 mbar: ± 2% of reading
11 to 1067 mbar: ± 0.2% of reading
P/N: 230366V02, 230702V02:
Measuring range (N
2
and Air): 5×10
-5
to 1500 mbar
Accuracy
(1)
(N
2
): MEMS Pirani: 5×10
-4
to 1x10
-3
mbar: ±10% of reading
1×10
-3
to 100 mbar: ± 5% of reading
100 to 1000 mbar: ± 25% of reading
Abs. Piezo: 0.1 to 10 mbar: ± 1% of reading ± 0.5 mbar
10 to 1333 mbar: ± 0.75% of reading
1333 to 1500 mbar: ± 2% of reading
Repeatability
(1)
(N
2
): MEMS Pirani: 1x10
-3
to 100 mbar: ± 2% of reading
Abs. Piezo: 10 to 1067 mbar: ± 0.2% of reading
Supply Voltage:
9
– 30 VDC
Power consumption:
< 1.2 Watt
Fuse (thermal recoverable):
200 mA
Analog output:
0.61
– 10.23 VDC, Log 1.286 VDC/decade
Analog output resolution:
16 bit
Analog output impedance:
100 Ω
Analog output update rate:
16 Hz
Sensor fail, analog output:
0 V