LEYBOLD THERMOVAC TTR 101 N, Руководство по эксплуатации

Страница: 13 / 42

13 300544655_002_C1 - 11/2016 - © Leybold
Transmitter Installation (Mechanical)
3.1
Conforming utilization

The transmitter is intended for measuring pressure.

The transmitters are intended for use in relatively clean environments.

The transmitter can only be used by persons who have suitable technical training and the necessary
experience or who have been instructed by the end-user of the product.

Always ensure that all vacuum sealing items and surfaces are clean, without damage and free of particles.

Use a cable with strain relief to ensure proper electrical connection and to reduce stress on the connectors.

To comply with EN61326-1 immunity requirements, use a braided, shielded cable.
3.2
Non-conforming utilization

The transmitter cannot be used for measurements other than described in this manual.

The transmitters are not intended for use in dirty and corrosive environments

Do not use the transmitter in presence of flammable gases or other explosive environments.

Do not install substituted parts or perform any unauthorized modification to the instrument.

The transmitter is not intended for use above maximum allowed pressure.
3.3
Process compatibility
The TTR 101 N THERMOVAC transmitters are intended for use in relatively
clean environments. The transmitter cannot be used in corrosive environments
like a semiconductor etch process chamber where aggressive gases like
fluorine are used.
If the transmitter is located close to a gas source connection like a flow
controller or leak valve the transmitter pressure measurement can be higher
than the actual chamber pressure. Location close to a pumping system
connection can cause a lower pressure measurement than actual chamber
pressure.
The transmitters and their sensor design can be mounted in any orientation
without compromising accuracy. However it is not recommended to mount the
transmitters upside down, as dust and dirt might fall into the sensor.
Explosive Environments
The sensor filament is kept at a low temperature of only 35 °C above ambient temperature, however in case of
malfunction in the sensor element can exceed normal operating temperature and consequently the transmitter
should not be used in explosive environments.
Do not use or install the transmitter where the following conditions occur:
- Temperatures lower than 0 °C or higher than 40 °C
- Corrosive or explosive gases
- Direct sunlight or other heat sources
!
Not recommended
Caution
!
!