Maintenance
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300855170_002_C4 - 06/2020 - © Leybold
5
Maintenance
We recommend an exchange of the rotor unit after 80,000 operating hours at
the latest.
Such maintenance work can only be done by the Leybold Service. If required
contact the Leybold service center nearest to your location. You can find the
address on our internet page www.leybold.com.
At high pump loads - for example during cyclic opera tion, at high gas
through puts or at high ambient temperatures - the aforementioned mainte-
nance work should be carried forward. Please consult Leybold for recom-
mendations.
The ceramic ball bearings at the fore-vacuum side can be exchanged, if nec-
essary, by our customer service, the nearest Leybold Service Center or by
the customer: please contact us for this.
If you wish to exchange the bearings yourself, you will need a Leybold tool kit
and spare ball bearings. Immediately after exchanging the bearings, let them
run in, see Section 4.7.
Depending on the degree of contamination of the purge gas used the filter
will clog and will have to be ex changed (our experience indicates that this will
become necessary after 1 to 6 months).
When an adsorption trap is used, regenerate or renew the adsorption agent
regularly; refer to the operating instructions provided with the trap.
5.1 Cleaning
If required clean the turbomolecular pump of dust with a dry cloth.
Cleaning the frequency converter internally
The converter essentially requires no servicing since it contains no compo-
nents which could be adjusted.
5.2 Leybold Service
Whenever you send us in equipment, indicate whether the equipment is con-
taminated or is free of substances which could pose a health hazard. If it is
contaminated, specify exactly which substances are involved. You must use
the form we have prepared for this purpose.
This form is available from
www.leybold.com —> Downloads —> Download Documents.
Provide the form signed by an authorized person for each pump.
This statement detailing the type of contamination is required to satisfy legal
requirements and for the protection of our employees.
We must return to the sender any equipment which is not accompanied by a
contamination statement.
Bearing replacement
Purge gas filter
Adsorption trap
