Operation
42
300855170_002_C4 - 06/2020 - © Leybold
4.4 Shutting down
Switch off the pump.
■
via contacts 7 and 8 of the socket REMOTE (X1)
■
apply a stop command via the interface
■
for the power supply units offered or recommended by Leybold switch off
the DC voltage.
After switching off, the green status LED will flash until the rotor of the turbo-
molecular pump is at standstill. This may take several minutes. With the DC
power supply off, the turbomolecular pump will act as a generator supplying
the frequency converter and the control unit with the connected devices with
energy as indicated by the yellow power LED.When the generator mode is
enabled, the turbomolecular pump supplies power back in to the DC power
grid.
Switch off the forevacuum pump.
When using oil-sealed forevacuum pumps, vent the turbomolecular pump
before it comes to a stop; refer to Section 4.5.
When using TRIVAC pumps the built-in anti-suckback valve will close auto-
matically, shutting off the forevacuum line. In forevacuum pumps without a
vacuum retention valve, close the valve in the forevacuum line.
When the system is not operating, ensure that neither ambient air nor clean-
ing media can enter the pump.
If a failure occurs the turbomolecular pump will be shut down automatically.
The red LED at the frequency converter lights up.
Under vacuum conditions the pump may take up to one hour to run down,
when venting to atmospheric pressure it may take up to one minute. During
the time the pump is running down, the green LED will flash, indicating that
the rotor has not yet arrived at standstill.
When shutting down by
switching off the power supply voltage
, there will
be only enough power for the LEDs down to a speed of the pump of approx-
imately 200 Hz. Thus the pump may still turn without a LED being on. For
this reason, when switching off without venting, wait for approximately 15
minutes after the LEDs have turned off until the pump has arrived at stand-
still.
Unplug any connectors only when the mains voltage is switched off
and
the pump does no longer turn.
Generator operation
Venting
CAUTION
