Operation
41
300855170_002_C4 - 06/2020 - © Leybold
4.3 Switching on
For pumps that have been stored for more than 12 months, please take note
of Section 4.7.
Switch on the power supply. All LEDs come on one after the other (sequential
light), drive electronics (and vacuum system controller) are running up (for
approximately 35 seconds).
The maximum starting pressure for the turbomolecular pump can be read
from the graph in Fig. 4.1.
Switch on the turbomolecular pump
■
via pins 7 and 8 of the socket REMOTE (X1) (For example via a remote
control or with the aid of the plug with integrated ON/OFF switch.
■
by a start command via the interface.
The turbomolecular pump accelerates. The green LED flashes. When the
pump reaches normal operation the green LED lights up permanently.
Avoid the influences of shock and vibration when the pump is running.
Exposure of the pump to accelerating forces must be avoided or reduced
to such an extent that the rotor unit will not be excited by vibrations. In the
case of critical applications you must consult our Applications Dept. first.
After a mains power failure the pump can run up automatically once more if a
start command is present.
Starting pressure
NOTICE
S
V
= Pumping speed of the
forevacuum pump (m
3
·h
-1
)
V = Volume of the vacuum
chamber (m
3
)
S
V
/ V
Starting pr
essur
e
Fig. 4.1 Determining the starting pressure of a turbomolecular pump when evacuating large volumes
Example:
Pumping speed of the forevacuum pump
S
V
= 3 m
3
/h,
Volume of the vacuum chamber
V = 60 l = 0,06 m
3
→
S
V
/ V = 50 h
-1
→
Starting pressure approx. 30 mbar
