A Tektronix Company
LO
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6517B
Electrometer/High Resistance Meter
VOLTS
ACCURACY TEMPERATURE
(1 Year)
1
COEFFICIENT
6½-DIGIT
18°–28°C
0°–18°C & 28°–50°C
RANGE RESOLUTION
±(% + offset)
±(% + offset)/°C
2 V
1 µV
0.025 + 40 µV
0.003 + 20 µV
20 V
10 µV
0.025 + 300 µV
0.002 + 100 µV
200 V
100 µV
0.06 + 3 mV
0.002 + 1 mV
NMRR:
2V and 20V ranges >60dB, 200V range >55dB. 50Hz or 60Hz
2
.
CMRR:
>120dB at DC, 50Hz or 60Hz.
INPUT IMPEDANCE:
>200T
Ω
in parallel with 20pF, <2pF guarded (1M
Ω
with zero
check on).
SMALL SIGNAL BANDWIDTH AT PREAMP OUTPUT:
Typically 100kHz (–3dB).
NOTES
1. When properly zeroed, 6½-digit, 1 PLC (power line cycle), median filter on, digital filter
= 10 readings.
2. Line sync on.
AMPS
ACCURACY TEMPERATURE
(1 Year)
1
COEFFICIENT
6½-DIGIT
18°–28°C
0°–18°C & 28°–50°C
RANGE RESOLUTION
±(% + offset)
±(% + offset)/°C
20 pA
10 aA
2
1 + 3 fA
0.1 + 500 aA
200 pA
100 aA
2
1 + 5 fA
0.1 + 1 fA
2 nA
1 fA
0.2 + 300 fA
0.1 + 20 fA
20 nA
10 fA
0.2 + 500 fA
0.03 + 100 fA
200 nA
100 fA
0.2 + 5 pA
0.03 + 1 pA
2 µA
1 pA
0.1 + 100 pA
0.005 + 20 pA
20 µA
10 pA
0.1 + 500 pA
0.005 + 100 pA
200 µA
100 pA
0.1 + 5 nA
0.005 + 1 nA
2 mA
1 nA
0.1 + 100 nA
0.008 + 20 nA
20 mA
10 nA
0.1 + 500 nA
0.008 + 100 nA
INPUT BIAS CURRENT:
<3fA at T
CAL
. Temperature coefficient = 0.5fA/°C,
20pA range.
INPUT BIAS CURRENT NOISE:
<750aA p-p (capped input), 0.1Hz to 10Hz band-
width, damping on. Digital filter = 40 readings, 20pA range.
INPUT VOLTAGE BURDEN at T
CAL
±1°C:
<20µV on 20pA, 2nA, 20nA, 2µA, and 20µA ranges.
<100µV on 200pA, 200nA, and 200µA ranges.
<2mV on 2mA range. <5mV on 20mA range.
TEMPERATURE COEFFICIENT OF INPUT VOLTAGE BURDEN:
<10µV/°C on pA,
nA, and µA ranges.
PREAMP SETTLING TIME (to 10% of final value) Typical:
0.5sec (damping off)
2.0 sec (damping on) on pA ranges. 15msec on nA ranges damping off, 1msec on
µA ranges damping off. 500µsec on mA ranges damping off.
NMRR:
>60dB on all ranges at 50Hz or 60Hz
3
.
NOTES
1. When properly zeroed, 6½-digit, 1PLC (power line cycle), median filter on,
digital filter = 10 readings.
2. aA = 10
–18
A, fA = 10
–15
A.
3. Line sync on.
OHMS (Normal Method)
TEMPERATURE
ACCURACY
1
COEFFICIENT
(10–100% Range) (10–100% Range)
6½-DIGIT 18°–28°C (1 Year) 0°–18°C & 28°–50°C
AUTO
AMPS
RANGE RESOLUTION ±(% + offset)
±(% + offset)
V SOURCE
RANGE
2 M
Ω
1
Ω
0.125 + 10
Ω
0.01 + 10
Ω
40 V
200 µA
20 M
Ω
10
Ω
0.125 + 100
Ω
0.01 + 100
Ω
40 V
20 µA
200 M
Ω
100
Ω
0.15 + 1 k
Ω
0.015 + 1 k
Ω
40 V
2 µA
2 G
Ω
1 k
Ω
0.225 + 10 k
Ω
0.035 + 10 k
Ω
40 V
200 nA
20 G
Ω
10 k
Ω
0.225 + 100 k
Ω
0.035 + 100 k
Ω
40 V
20 nA
200 G
Ω
100 k
Ω
0.35 + 1 M
Ω
0.110 + 1 M
Ω
40 V
2 nA
2 T
Ω
1 M
Ω
0.35 + 10 M
Ω
0.110 + 10 M
Ω
400 V
2 nA
20 T
Ω
10 M
Ω
1.025 + 100 M
Ω
0.105 + 100 M
Ω
400 V
200 pA
200 T
Ω
100 M
Ω
1.15 + 1 G
Ω
0.125 + 1 G
Ω
400 V
20 pA
NOTES
1. Specifications are for auto V-source ohms, when properly zeroed, 6½-digit, 1PLC, median filter on, digital filter = 10 readings. If
user selectable voltage is required, use manual mode. Manual mode displays resistance (up to 10
18
Ω
) calculated from measured
current. Accuracy is equal to accuracy of V-source plus accuracy of selected Amps range.
PREAMP SETTLING TIME:
Add voltage source settling time to preamp settling time in Amps specification.
Ranges over 20G
Ω
require additional settling based on the characteristics of the load.
OHMS (ALTERNATING POLARITY METHOD)
The alternating polarity sequence compensates for the background (offset) currents of the material or device
under test. Maximum tolerable offset up to full scale of the current range used.
Using Keithley 8009 fixture
REPEATABILITY:
D
I
BG
×
R/V
ALT
+ 0.1% (1
σ
) (instrument temperature constant ±1°C).
ACCURACY: (
V
SRC
Err + I
MEAS
Err
×
R)/V
ALT
where:
D
I
BG
is a measured, typical background current noise from the sample and fixture.
V
ALT
is the alternating polarity voltage used.
V
SRC
Err is the accuracy (in volts) of the voltage source using V
ALT
as the setting.
I
MEAS
Err is the accuracy (in amps) of the ammeter using V
ALT
/R as the reading.
VOLTAGE SOURCE
TEMPERATURE
ACCURACY (1 Year)
COEFFICIENT
5½-DIGIT
18°–28°C
0°–18°C & 28°–50°C
RANGE
RESOLUTION
±(% s offset)
±(% offset)/°C
100 V
5 mV
0.15 + 10 mV
0.005 + 1 mV
1000 V
50 mV
0.15 + 100 mV
0.005 + 10 mV
MAXIMUM OUTPUT CURRENT:
100V Range:
±10mA, hardware short circuit protection at <14mA.
1000V Range:
±1mA, hardware short circuit protection at <1.4mA.
SETTLING TIME
:
100V Range:
<8ms to rated accuracy.
1000V Range:
<50ms to rated accuracy.
NOISE (typical):
100V Range:
<2.6mV rms.
1000V Range:
<2.9mV rms.
65
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