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©2011 IWAKI CO., LTD.

Thank you for choosing our product.

Please read through this instruction manual before use.

This instruction manual describes important precautions and instruc-

tions for the product. Always keep it on hand for quick reference.

Instruction manual

PDS-105 RA/RB

Iwaki

Photoresist Dispensing Pump

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(   )Country codes

IWAKI CO.,LTD.

 6-6 Kanda-Sudacho 2-chome Chiyoda-ku Tokyo 101-8558 Japan

TEL:(81)3 3254 2935 FAX:3 3252 8892

T787 '11/09

Australia IWAKI Pumps Australia Pty. Ltd.

TEL : (61)2 9899 2411 FAX : 2 9899 2421

Italy

IWAKI Italia S.R.L.

TEL : (39)0444 371115 FAX : 0444 335350

Austria

IWAKI EUROPE GmbH

TEL : (49)2154 9254 0 FAX : 2154 9254 48

Korea

IWAKI Korea Co.,Ltd.

TEL : (82)2 2630 4800 FAX : 2 2630 4801

Belgium IWAKI Belgium n.v.

TEL : (32)1367 0200

FAX : 1367 2030

Malaysia IWAKIm Sdn. Bhd.

TEL : (60)3 7803 8807 FAX : 3 7803 4800

China

IWAKI Pumps (Shanghai) Co., Ltd.

TEL : (86)21 6272 7502 FAX : 21 6272 6929

Norway

IWAKI Norge AS

TEL : (47)23 38 49 00 FAX : 23 38 49 01

China

IWAKI Pumps (Guandong) Co., Ltd.

TEL : (86)750 3866228 FAX : 750 3866278

Singapore IWAKI Singapore Pte. Ltd.

TEL : (65)6316 2028 FAX : 6316 3221

China

GFTZ IWAKI Engineering & Trading (Guangzhou)

TEL : (86)20 8435 0603 FAX : 20 8435 9181

Spain

IWAKI Iberica Pumps, S.A.

TEL : (34)943 630030 FAX : 943 628799

China

GFTZ IWAKI Engineering & Trading (Beijing)

TEL : (86)10 6442 7713 FAX : 10 6442 7712

Sweden

IWAKI Sverige AB

TEL : (46)8 511 72900 FAX : 8 511 72922

Denmark IWAKI Nordic A/S

TEL : (45)48 24 2345 FAX : 48 24 2346

Switzerland IWAKI (Schweiz) AG

TEL : (41)26 674 9300 FAX : 26 674 9302

Finland

IWAKI Suomi Oy

TEL : (358)9 2745810 FAX : 9 2742715

Taiwan

IWAKI Pumps Taiwan Co., Ltd.

TEL : (886)2 8227 6900 FAX : 2 8227 6818

France

IWAKI France S.A.

TEL : (33)1 69 63 33 70 FAX : 1 64 49 92 73

Taiwan

IWAKI Pumps Taiwan (Hsin-chu) Co., Ltd.

TEL : (886)3 573 5797 FAX : (886)3 573 5798

Germany IWAKI EUROPE GmbH

TEL : (49)2154 9254 0 FAX : 2154 9254 48

Thailand IWAKI (Thailand) Co.,Ltd.

TEL : (66)2 322 2471 FAX : 2 322 2477

Holland IWAKI EUROPE NL Branch

TEL : (31)547 293 160 FAX : 547 292 332

U.K.

IWAKI Pumps (UK) LTD.

TEL : (44)1743 231363 FAX : 1743 366507

Hong Kong IWAKI Pumps Co., Ltd.

TEL : (852)2 607 1168 FAX : 2 607 1000

U.S.A.

IWAKI AMERICA Inc.

TEL : (1)508 429 1440 FAX : 508 429 1386

Indonesia IWAKI Singapore (Indonesia Branch)

TEL : (62)21 690 6606 FAX : 21 690 6612

Vietnam IWAKI pumps Vietnam Co.,Ltd.

TEL : (84)613 933456 FAX : 613 933399

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Содержание PDS-105 RA

Страница 1: ...866228 FAX 7503866278 Singapore IWAKI Singapore Pte Ltd TEL 65 63162028 FAX 63163221 China GFTZIWAKIEngineering Trading Guangzhou TEL 86 2084350603 FAX 2084359181 Spain IWAKI Iberica Pumps S A TEL 34...

Страница 2: ...immediately contact your distributor a Check if the delivery is correct Check the nameplate to see if the information such as model codes and production number are as or dered b Check if the delivery...

Страница 3: ...Suction process 10 Identification codes 11 Installation 12 Before installation 12 Installation Piping Wiring 13 Installation 13 Piping 13 Wiring 14 A connector signal 14 B connector motor 14 Operation...

Страница 4: ...Inspection 18 Daily inspection 18 Wear part list 18 Specification Outer dimension 19 Specification 19 Pump 19 Stepping motor 20 Encoder RB type 20 Home sensor 20 Pressure sensor 20 Outer dimension 21...

Страница 5: ...ymbol accompanies each precaution suggesting the use of Caution Prohibited actions or specific Requirement Indicates mishandling could lead to personal injury or prop erty damage CAUTION Caution marks...

Страница 6: ...in failure or injury Use this product in specified conditions only Do not modify the pump Alterations to the pump carries a high degree of risk It is not the manufac turer s responsibility for any fai...

Страница 7: ...ure water or the liquid to be delivered before the start of operation Static electricity When low electric conductivity liquids such as ultra pure water and fluor inactive liquid e g FluorinertTM are...

Страница 8: ...not waterproof Do not operate the pump while wet with solu tion or water Failure or injury may result Immediately dry off the pump if it gets wet Do not close discharge line during operation Solution...

Страница 9: ...s reciprocates Principle of operation The bellows expands and contracts as the ball screw reciprocates The reciprocating motion of the bellows compresses or expands the shape of the tubephragm via hyd...

Страница 10: ...10 Introduction Suction process IN...

Страница 11: ...ion 1 Pump c Flow rate 05 5 0ml shot max discharge capacity d Drive unit RA Compact type RB With an encoder line driver e Wet end O ring K Kalrez f Pressure sensor P Positive pressure sensor 0 1000kPa...

Страница 12: ...normal or dangerous conditions suspend operation immediately and inspect solve problems Do not install the pump in a flammable atmosphere Before installation A driver in a user s PLC and other related...

Страница 13: ...indoors Allow sufficient space around the pump for easy access and maintenance Mounting position Install the pump as close to a supply tank as possible in a flooded suction system Mounting direction A...

Страница 14: ...r output D Encoder B phase Line driver output E GND common F Sensor output open collector G 5 24VDC home sensor power H 5VDC encoder power The RA type does not equipped with the encoder B connector mo...

Страница 15: ...ome sensor is at the L GND level Number of pulses Discharge capacity RV Calculated flow rate Number of input pulses 1ml 2400 2ml 4800 3ml 7200 4ml 9600 5ml 12000 The above data is based on the assumpt...

Страница 16: ...vis cosity and piping conditions and may overload the bellows Do not set a discharge speed too fast Suction pressure may be too low negative and trigger cavitation depending on operating conditions s...

Страница 17: ...wiring Correct wiring and resume operation Power supply voltage is too low Observe the rated voltage of the pump Motor failure Check the motor Replace as necessary Liquid can not be pumped up Air ingr...

Страница 18: ...medi ately and remove problems according to Troubleshooting Wear part list To run the pump for a long period wear parts need to be replaced periodically or when pump performance has reduced Contact yo...

Страница 19: ...pressure may be too low negative and trigger cavitation depending on operating conditions such as liquid viscosity piping layouts and suction speed max 3ml sec Adjust the suction speed as necessary 2...

Страница 20: ...on current 60mA or below Detection Incremental Number of output pulses 500 Output phase 2 phase A and B Output type Line driver Home sensor Items Spec Manufacturer OMRON Model EE SX670A Supply voltage...

Страница 21: ...21 Specification Outer dimension PDS 105R A B Specification Outer dimension IN 1 4 PFA tube OUT 1 4 PFA tube 60 100 182 13 5 50 100 189 213 5 105 182 7 161 175 4 4 30 4 4 30 R 2000 23...

Страница 22: ...2 In port unit 1 PFA 3 Out port 1 PFA 4 In connecting port 1 PFA 5 Out connecting port 1 PFA 7 O ring 2 Kalrez AS568 129 10 Valve cap 2 PP 11 Valve seat 4 PCTFE 12 Valve guide 4 PTFE 13 Valve 4 RUBY...

Страница 23: ...23 Specification Specification Outer dimension...

Страница 24: ...866228 FAX 7503866278 Singapore IWAKI Singapore Pte Ltd TEL 65 63162028 FAX 63163221 China GFTZIWAKIEngineering Trading Guangzhou TEL 86 2084350603 FAX 2084359181 Spain IWAKI Iberica Pumps S A TEL 34...

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